Comparative assessment of different sacrificial materials for releasing SU-8 structures

Reviews on Advanced Materials Science

Volumn 10, Issue 2, 2005, Pages 149-155

  Psoma, Sotiria D ^a   Jenkins, Derek W K ^a  

^a SCIENCE AND TECHNOLOGY FACILITIES COUNCIL   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CHROMIUM; COPPER; ETCHING; GOLD; MATERIALS TESTING; POLYIMIDES; POLYMETHYL METHACRYLATES; POLYSTYRENES; SCANNING ELECTRON MICROSCOPY;

ETCHANT CONCENTRATIONS; SACRIFICIAL LAYERS; SACRIFICIAL MATERIALS; UNDERCUTTING PROCESS;

NANOSTRUCTURED MATERIALS;

EID: 24744435100     PISSN: 16065131     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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