The mechanics of polymer swelling on microcantilever sensors

Microsystem Technologies

Volumn 15, Issue 2, 2009, Pages 333-340

  Privorotskaya, Natalya L ^a   King, William P ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABS RESINS; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; DEFORMATION; FINITE ELEMENT METHOD; MECHANICS; POLYMERS; SENSORS; SILICON; STRESS CONCENTRATION; STRESSES; THREE DIMENSIONAL;

3D EFFECTS; ANALYTE; BIOCHEMICAL SENSORS; CANTILEVER SYSTEMS; FINITE ELEMENT MODELS; MECHANICAL DEFORMATIONS; MICRO CANTILEVERS; MICROCANTILEVER SENSORS; PIEZORESISTIVE CANTILEVERS; PIEZORESISTIVE SENSORS; POLYMER LAYERS; POLYMER SWELLINGS; SENSOR OPTIMIZATIONS; SILICON BEAMS; SILICON CANTILEVERS; STIFF POLYMERS; STRESS DISTRIBUTIONS; SYSTEM SENSITIVITIES;

PHOTORESISTS;

EID: 55149125812     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0672-6     Document Type: Article

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