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Volumn 8, Issue 8, 2008, Pages 1402-1404
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Maskless photolithography using UV LEDs
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Author keywords
[No Author keywords available]
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Indexed keywords
ANALYTIC METHOD;
ARTICLE;
DEVICE;
LIGHT EMITTING DIODE;
MICROFLUIDIC ANALYSIS;
PHOTOLITHOGRAPHY;
PRIORITY JOURNAL;
ULTRAVIOLET RADIATION;
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EID: 47949096215
PISSN: 14730197
EISSN: 14730189
Source Type: Journal
DOI: 10.1039/b800465j Document Type: Article |
Times cited : (56)
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References (15)
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