Scanning probe arrays for life sciences and nanobiology applications

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1698-1701

  Aeschimann, Laure ^a   Meister, André ^b   Akiyama, Terunobu ^a   Chui, Benjamin W ^a   Niedermann, Philippe ^b   Heinzelmann, Harry ^b   De Rooij, Nico F ^a   Staufer, Urs ^a   Vettiger, Peter ^a,b  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b CSEM   (Switzerland)

Author keywords

AFM; Life science; Nanobiology; Parallel imaging; Piezoresistive sensing; Scanning probe array

Indexed keywords

CANTILEVER BEAMS; MICROMACHINING; NANOTECHNOLOGY; OPTICAL SENSORS; PIEZOELECTRIC DEVICES; SILICON WAFERS;

LIFE SCIENCE; NANOBIOLOGY; PARALLEL IMAGING; PIEZORESISTIVE SENSING; SCANNING PROBE ARRAY;

ARRAYS;

EID: 33646045880     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.201     Document Type: Article

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