Towards delafossite structure of Cu-Cr-O thin films deposited by reactive magnetron sputtering: Influence of substrate temperature on optoelectronics properties

Vacuum

Volumn 114, Issue , 2015, Pages 101-107

  Sun, Hui ^a   Arab Pour Yazdi, Mohammad ^a   Briois, Pascal ^a   Pierson, Jean Francois ^b   Sanchette, Frederic ^c,d   Billard, Alain ^a,e  

^a UNIVERSITÉ DE TECHNOLOGIE DE BELFORT MONTBÉLIARD   (France)

^b UNIVERSITÉ DE LORRAINE   (France)

^c Institut Charles Delaunay   (France)

^d LRC CEA ICD LASMIS   (France)

^e DIF   (France)

Author keywords

CuCrO2 thin films; Delafossite; Optoelectronics properties; Reactive magnetron sputtering

Indexed keywords

AMORPHOUS FILMS; ARGON; CHROMIUM COMPOUNDS; HARDENING; MAGNETRON SPUTTERING; STRUCTURAL PROPERTIES; SUBSTRATES; THERMODYNAMIC STABILITY; THIN FILMS;

ANNEALING TEMPERATURES; CUCRO; DELAFOSSITES; OPTOELECTRONIC PROPERTIES; OPTOELECTRONICS PROPERTY; REACTIVE MAGNETRON SPUTTERING; SUBSTRATE TEMPERATURE; THERMAL INSTABILITIES;

COPPER;

EID: 84921723325     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2015.01.009     Document Type: Article

References (37)

1. 2 Nature 389 1997 939 942
2. A.N. Banerjee, and K.K. Chattopadhyay Recent developments in the emerging field of crystalline p-type transparent conducting oxide thin films Prog Cryst Growth Charact Mater 50 2005 52 105
3. H. Kawazoe, H. Yanagi, K. Ueda, and H. Hosono Transparent p-type conducting oxides: design and fabrication of p-n heterojunctions MRS Bull 25 2000 28 36
4. 2 films J Alloys Compd 474 2009 401 405
5. 2 polycrystals Sol Energy Mater Sol Cells 95 2011 2924 2927
6. A. Subrahmanyam, and Ullash Kumar Barik Electrical and optical properties of silver doped indium oxide thin films prepared by reactive DC magnetron sputtering J Phys Chem Solids 67 2006 1518 1523
7. 2 film electrodes fabricated using the sulfurization of Ag-In metal precursors Sol Energy Mater Sol Cells 95 2011 1859 1866
8. R. Nagarajan, N. Duan, M.K. Jayaraj, J. Li, K.A. Vanaja, and A. Yokochi P-type conductivity in the delafossite structure Int J Inorg Mater 3 2001 265 270
9. 2 thin films Thin Solid Films 516 2008 1426 1430
10. 2/n-ZnO heterojunction diode grown by rf magnetron sputtering Bull Mater Sci 31 2008 753 758
11. 2 thin films deposited by polyacrylamide gel route Mater Sci Semicond Process 16 2013 38 42
12. Y.J. Zhang, Z.T. Liu, D.Y. Zang, and L.P. Feng Structural and opto-electrical properties of Cu-Al-O thin films prepared by magnetron sputtering method Vacuum 99 2014 160 165
13. 2 thin films Thin Solid Films 474 2005 261 266
14. 2 films deposited by magnetron sputtering J Mater Sci 44 2009 1594 1599
15. M.A. Marquardt, N.A. Ashmore, and D.P. Cann Crystal chemistry and electrical properties of the delafossite structure Thin Solid Films 496 2006 146 156
16. 2 thin films Appl Surf Sci 288 2014 258 264
17. 2 thin films Appl Surf Sci 254 2007 1343 1346
18. 2 epitaxial films prepared by combining two-step deposition and post-annealing techniques J Cryst Growth 311 2009 1117 1122
19. 2 films and powders J Appl Phys 89 2001 8022 8025
20. 2 thin films prepared by chemical solution deposition method J Sol-Gel Sci Technol 59 2011 222 227
21. 2 thin films prepared by pulsed laser deposition J Alloys Compd 614 2014 221 225
22. 2 thin film by N doping Appl Surf Sci 256 2010 4121 4124
23. 2 films Appl Surf Sci 273 2013 324 329
24. 3-α coatings elaborated by DC magnetron sputtering at room temperature Mater Chem Phys 117 1 2009 178 182
25. 3 coatings elaborated by DC magnetron sputtering ECS Trans 7 1 2007 2313 2319
26. M. Arab Pour Yazdi, P. Briois, S. Georges, and A. Billard Electrical and structural investigations of perovskite structure reactively sputter deposited coatings Solid State Ionics 180 2009 1246 1251
27. 2 anatase thin films Thin Solid Films 558 2014 443 448
28. 2 thin films with amorphous to crystalline structures Thin Solid Films 516 2008 6353 6358
29. S.M. Chung, J.H. Shin, W.S. Cheong, C.S. Hwang, K.I. Cho, and Y.J. Kim Characteristics of Ti-doped ITO films grows by DC magnetron sputtering Ceram Int 38S 2012 S617 S621
30. 2:Mg thin films by chemical solution deposition with two-step annealing Ceram Int 38S 2012 S673 S676
31. 2 films prepared by annealing of amorphous Cu-Al-O films at high temperature under controlled atmosphere Thin Solid Films 519 2011 5966 5970
32. 4 nanopowders Adv Mater Res 284-286 2011 974 979
33. Y.L. An, Z.H. Li, and J. Shen Enhanced visible light response of CuO nanoparticle-modified sodium titanate nanotube heterojunction thin films Mater Lett 74 2012 65 67
34. Y. Xu, and M.A.A. Schoonen The absolute energy positions of conduction and valence bands of selected semiconducting minerals Am Mineral 85 2000 543 556
35. J. Tauc Amorphous and liquid semiconductors 1974 Plenum London
36. 2 thin films by sol-gel processing J Alloys Compd 509 2011 5897 5902
37. G. Haacke New figure of merit for transparent conductors J Appl Phys 47 1976 4086 4089