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Vacuum

Volumn 99, Issue , 2014, Pages 160-165

Structural and opto-electrical properties of Cu-Al-O thin films prepared by magnetron sputtering method

(4) Zhang, Yongjian a Liu, Zhengtang a Zang, Duyang b Feng, Liping a

a NORTHWESTERN POLYTECHNICAL UNIVERSITY (China)

b NORTHWESTERN POLYTECHNICAL UNIVERSITY (China)

Author keywords

Antireflection effect; Band gap; Cu Al O; Optical transmittance; Wettability

Indexed keywords

ANTI-REFLECTION EFFECTS; AS-DEPOSITED FILMS; CU-AL-O; MAGNETRON SPUTTERING METHOD; P-TYPE CONDUCTIVITY; POST ANNEALING TREATMENT; RADIO FREQUENCY MAGNETRON SPUTTERING; STRUCTURAL CHARACTERISTICS;

ALUMINUM; AMORPHOUS FILMS; ANNEALING; ENERGY GAP; MAGNETRON SPUTTERING; OPACITY; QUARTZ; SURFACE ROUGHNESS; THIN FILMS; WETTING; X RAY DIFFRACTION;

ELECTRIC PROPERTIES;

EID: 84879476733 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/j.vacuum.2013.05.019 Document Type: Article

Times cited : (30)

References (40)

1
- 33947291362
- R.D. Shannon, D.B. Rogers, and C.T. Prewitt Inorg Chem 10 1971 713 718
- (1971) Inorg Chem , vol.10 , pp. 713-718
- Shannon, R.D.¹ Rogers, D.B.² Prewitt, C.T.³

2
- 0031236902
- A. Jacob, C. Parent, P. Boutinaud, G. Le Flem, J.P. Doumerc, and A. Ammar Solid State Commun 103 1997 529 532
- (1997) Solid State Commun , vol.103 , pp. 529-532
- Jacob, A.¹ Parent, C.² Boutinaud, P.³ Le Flem, G.⁴ Doumerc, J.P.⁵ Ammar, A.⁶

3
- 23944525867
- J.L. Cai, and H. Gong J Appl Phys 98 2005 033707
- (2005) J Appl Phys , vol.98 , pp. 033707
- Cai, J.L.¹ Gong, H.²

4
- 0037157433
- K. Tonooka, K. Shimokawa, and O. Nishimura Thin Solid Films 411 2002 129 133
- (2002) Thin Solid Films , vol.411 , pp. 129-133
- Tonooka, K.¹ Shimokawa, K.² Nishimura, O.³

5
- 0038781830
- S.M. Gao, Y. Zhao, P.P. Gou, N. Chen, and Y. Xie Nanotechnology 14 2003 538 541
- (2003) Nanotechnology , vol.14 , pp. 538-541
- Gao, S.M.¹ Zhao, Y.² Gou, P.P.³ Chen, N.⁴ Xie, Y.⁵

6
- 0038362743
- K. Nomura, H. Ohta, K. Ueda, T. Kamiya, M. Hirano, and H. Hosono Science 300 2003 1269 1272
- (2003) Science , vol.300 , pp. 1269-1272
- Nomura, K.¹ Ohta, H.² Ueda, K.³ Kamiya, T.⁴ Hirano, M.⁵ Hosono, H.⁶

7
- 0031258719
- H. Kawazoe, M. Yasukawa, H. Hyodo, M. Kurita, H. Yanagi, and H. Hosono Nature 389 1997 939 942
- (1997) Nature , vol.389 , pp. 939-942
- Kawazoe, H.¹ Yasukawa, M.² Hyodo, H.³ Kurita, M.⁴ Yanagi, H.⁵ Hosono, H.⁶

8
- 70350726015
- J.C. Lee, S.Y. Um, Y.W. Heo, J.H. Lee, and J.J. Kim J Eur Ceram Soc 30 2010 509 512
- (2010) J Eur Ceram Soc , vol.30 , pp. 509-512
- Lee, J.C.¹ Um, S.Y.² Heo, Y.W.³ Lee, J.H.⁴ Kim, J.J.⁵

9
- 29844439583
- L. Liu, K. Bai, H. Gong, and P. Wu Phys Rev B 72 2005 125204
- (2005) Phys Rev B , vol.72 , pp. 125204
- Liu, L.¹ Bai, K.² Gong, H.³ Wu, P.⁴

10
- 0021142035
- F.A. Benko, and F.P. Koffyberg J Phys Chem Solids 45 1984 57 59
- (1984) J Phys Chem Solids , vol.45 , pp. 57-59
- Benko, F.A.¹ Koffyberg, F.P.²

11
- 82755194766
- M. Neumann-Spallart, and R. Pinto Thin Solid Films 520 2011 1299 1302
- (2011) Thin Solid Films , vol.520 , pp. 1299-1302
- Neumann-Spallart, M.¹ Pinto, R.²

12
- 0035934353
- Y. Wang, H. Gong, F. Zhu, L. Liu, L. Huang, and A.C.H. Huan Mater Sci Eng B 85 2001 131 134
- (2001) Mater Sci Eng B , vol.85 , pp. 131-134
- Wang, Y.¹ Gong, H.² Zhu, F.³ Liu, L.⁴ Huang, L.⁵ Huan, A.C.H.⁶

13
- 78649518907
- A. Banerjee, K.K. Chattopadhyay, and S.W. Joo Physica B 406 2011 220 224
- (2011) Physica B , vol.406 , pp. 220-224
- Banerjee, A.¹ Chattopadhyay, K.K.² Joo, S.W.³

14
- 61649121590
- A.S. Reddy, H.H. Park, G.M. Rao, S. Uthanna, and P.S. Reddy J Alloys Compd 474 2009 401 405
- (2009) J Alloys Compd , vol.474 , pp. 401-405
- Reddy, A.S.¹ Park, H.H.² Rao, G.M.³ Uthanna, S.⁴ Reddy, P.S.⁵

15
- 84862812349
- Y.J. Zhang, Z.T. Liu, L.P. Feng, and D.Y. Zang Appl Surf Sci 258 2012 5354 5359
- (2012) Appl Surf Sci , vol.258 , pp. 5354-5359
- Zhang, Y.J.¹ Liu, Z.T.² Feng, L.P.³ Zang, D.Y.⁴

16
- 0035813247
- D.Y. Shahriari, A. Barnabè, T.O. Mason, and K.R. Poeppelmeier Inorg Chem 40 2001 5734 5735
- (2001) Inorg Chem , vol.40 , pp. 5734-5735
- Shahriari, D.Y.¹ Barnabè, A.² Mason, T.O.³ Poeppelmeier, K.R.⁴

17
- 1642390695
- K. Tonooka, H. Bando, and Y. Aiura Thin Solid Films 445 2003 327 331
- (2003) Thin Solid Films , vol.445 , pp. 327-331
- Tonooka, K.¹ Bando, H.² Aiura, Y.³

18
- 1342347326
- A.N. Banerjee, and K.K. Chattopadhyay Appl Surf Sci 225 2004 243 249
- (2004) Appl Surf Sci , vol.225 , pp. 243-249
- Banerjee, A.N.¹ Chattopadhyay, K.K.²

19
- 10844280644
- A.N. Banerjee, R. Maity, P.K. Ghosh, and K.K. Chattopadhyay Thin Solid Films 474 2005 261 266
- (2005) Thin Solid Films , vol.474 , pp. 261-266
- Banerjee, A.N.¹ Maity, R.² Ghosh, P.K.³ Chattopadhyay, K.K.⁴

20
- 20444483698
- K. Park, K.Y. Ko, and W.-S. Seo J Eur Ceram Soc 25 2005 2219 2222
- (2005) J Eur Ceram Soc , vol.25 , pp. 2219-2222
- Park, K.¹ Ko, K.Y.² Seo, W.-S.³

21
- 78651089418
- W. Lan, J.Q. Pan, C.Q. Zhu, G.Q. Wang, Q. Su, and X.Q. Liu J Cryst Growth 314 2011 370 373
- (2011) J Cryst Growth , vol.314 , pp. 370-373
- Lan, W.¹ Pan, J.Q.² Zhu, C.Q.³ Wang, G.Q.⁴ Su, Q.⁵ Liu, X.Q.⁶

22
- 0001616655
- H. Yanagi, S. Inoue, K. Ueda, H. Kawazoe, H. Hosono, and N. Hamada J Appl Phys 88 2000 4159 4163
- (2000) J Appl Phys , vol.88 , pp. 4159-4163
- Yanagi, H.¹ Inoue, S.² Ueda, K.³ Kawazoe, H.⁴ Hosono, H.⁵ Hamada, N.⁶

23
- 36248932612
- H. Luo, M. Jain, T.M. McCleskey, E. Bauer, A.K. Burrell, and Q. Jia Adv Mater 19 2007 3604 3607
- (2007) Adv Mater , vol.19 , pp. 3604-3607
- Luo, H.¹ Jain, M.² McCleskey, T.M.³ Bauer, E.⁴ Burrell, A.K.⁵ Jia, Q.⁶

24
- 74349113452
- C.L. Chu, H.C. Lu, C.Y. Lo, C.Y. Lai, and Y.H. Wang Physica B 404 2009 4831 4834
- (2009) Physica B , vol.404 , pp. 4831-4834
- Chu, C.L.¹ Lu, H.C.² Lo, C.Y.³ Lai, C.Y.⁴ Wang, Y.H.⁵

25
- 79954626810
- J.Y. Park, T.H. Kwon, S.W. Koh, and Y.C. Kang Bull Korean Chem Soc 32 2011 1331 1335
- (2011) Bull Korean Chem Soc , vol.32 , pp. 1331-1335
- Park, J.Y.¹ Kwon, T.H.² Koh, S.W.³ Kang, Y.C.⁴

26
- 34247623619
- W. Lan, M. Zhang, G.B. Dong, P.M. Dong, Y.Y. Wang, and H. Yan Mater Sci Eng B 139 2007 155 159
- (2007) Mater Sci Eng B , vol.139 , pp. 155-159
- Lan, W.¹ Zhang, M.² Dong, G.B.³ Dong, P.M.⁴ Wang, Y.Y.⁵ Yan, H.⁶

27
- 0035887413
- B.J. Ingram, T.O. Mason, R. Asahi, K.T. Park, and A.J. Freeman Phys Rev B 64 2001 155114
- (2001) Phys Rev B , vol.64 , pp. 155114
- Ingram, B.J.¹ Mason, T.O.² Asahi, R.³ Park, K.T.⁴ Freeman, A.J.⁵

28
- 0035943824
- M.S. Lee, T.Y. Kim, and D. Kim Appl Phys Lett 79 2001 2028 2030
- (2001) Appl Phys Lett , vol.79 , pp. 2028-2030
- Lee, M.S.¹ Kim, T.Y.² Kim, D.³

29
- 77951666513
- G. Li, X. Zhu, H. Lei, H. Jiang, W. Song, and Z. Yang J Sol-gel Sci Technol 53 2010 641 646
- (2010) J Sol-gel Sci Technol , vol.53 , pp. 641-646
- Li, G.¹ Zhu, X.² Lei, H.³ Jiang, H.⁴ Song, W.⁵ Yang, Z.⁶

30
- 42449156352
- L. Feng, Y. Zhang, J. Xi, Y. Zhu, N. Wang, and F. Xia Langmuir 24 2008 4114 4119
- (2008) Langmuir , vol.24 , pp. 4114-4119
- Feng, L.¹ Zhang, Y.² Xi, J.³ Zhu, Y.⁴ Wang, N.⁵ Xia, F.⁶

31
- 84856057582
- F. Li, X.G. Geng, Z. Chen, and L. Zhao Appl Phys A 106 2012 35 40
- (2012) Appl Phys A , vol.106 , pp. 35-40
- Li, F.¹ Geng, X.G.² Chen, Z.³ Zhao, L.⁴

32
- 77954818700
- G. Shete, V. Puri, L. Kumar, and A.K. Bansal AAPS Pharm Sci Tech 11 2010 598 609
- (2010) AAPS Pharm Sci Tech , vol.11 , pp. 598-609
- Shete, G.¹ Puri, V.² Kumar, L.³ Bansal, A.K.⁴

33
- 35648975505
- A.B.D. Cassie, and S. Baxter Trans Faraday Soc 40 1944 546 551
- (1944) Trans Faraday Soc , vol.40 , pp. 546-551
- Cassie, A.B.D.¹ Baxter, S.²

34
- 0017017243
- J.C. Manifacier, J. Gasiot, and J.P. Fillard J Phys E 9 1976 1002 1004
- (1976) J Phys e , vol.9 , pp. 1002-1004
- Manifacier, J.C.¹ Gasiot, J.² Fillard, J.P.³

35
- 0035948160
- I. Costina, and R. Franchy Appl Phys Lett 78 2001 4139 4141
- (2001) Appl Phys Lett , vol.78 , pp. 4139-4141
- Costina, I.¹ Franchy, R.²

36
- 21444461406
- A.N. Banerjee, and K.K. Chattopadhyay J Appl Phys 97 2005 084308
- (2005) J Appl Phys , vol.97 , pp. 084308
- Banerjee, A.N.¹ Chattopadhyay, K.K.²

37
- 4243136628
- T.S. Moss Proc Phys Soc B 63 1950 167 176
- (1950) Proc Phys Soc B , vol.63 , pp. 167-176
- Moss, T.S.¹

38
- 0011122088
- C.D. Salzberg, and J.J. Villa J Opt Soc Am 47 1957 244 246
- (1957) J Opt Soc Am , vol.47 , pp. 244-246
- Salzberg, C.D.¹ Villa, J.J.²

39
- 0038388718
- M. Herzberger, and C.D. Salzberg J Opt Soc Am 52 1962 420 427
- (1962) J Opt Soc Am , vol.52 , pp. 420-427
- Herzberger, M.¹ Salzberg, C.D.²

40
- 0003868574
- Shanghai Scientific and Technical Publishers
- J.F. Tang, and Q. Zheng Applied film optics 1984 Shanghai Scientific and Technical Publishers
- (1984) Applied Film Optics
- Tang, J.F.¹ Zheng, Q.²

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