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Volumn 558, Issue , 2014, Pages 443-448

Influence of thickness on the structural properties of radio-frequency and direct-current magnetron sputtered TiO2 anatase thin films

(6) Mukherjee, S K a Nebatti, A a Mohtascham, F a Schipporeit, S a Notthoff, C a Mergel, D a

a UNIVERSITY OF DUISBURG ESSEN (Germany)

Author keywords

Anatase; Lattice distortion; Sputtering; Thin films; Titanium dioxide

Indexed keywords

AMORPHOUS FILMS; FILM THICKNESS; MAGNETRONS; SPUTTERING; THIN FILMS; X RAY DIFFRACTION;

DIRECT-CURRENT MAGNETRONS; GRANULAR STRUCTURESS; LATTICE DISTORTIONS; LATTICE-PARAMETER RATIO; RADIO FREQUENCIES; SPUTTERED FILMS; UNHEATED SUBSTRATES; X-RAY AMORPHOUS;

TITANIUM DIOXIDE;

EID: 84898783925 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2014.02.048 Document Type: Article

Times cited : (15)

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