Oxide semiconductor thin film transistors on thin solution-cast flexible substrates

IEEE Electron Device Letters

Volumn 36, Issue 1, 2015, Pages 35-37

  Li, Haoyu U ^a   Jackson, Thomas N ^a  

^a The Pennsylvania State University   (United States)

Author keywords

Flexible electronics; GIZO; IGZO; oxide thin film transistors (TFTs); plasma enhanced atomic layer deposition (PEALD); polymer substrates; thin film transistors (TFTs); ZnO

Indexed keywords

ATOMIC LAYER DEPOSITION; DEPOSITION; ELECTRIC FIELDS; FABRICATION; FLEXIBLE ELECTRONICS; POLYIMIDES; PROCESSING; SEMICONDUCTING ORGANIC COMPOUNDS; SUBSTRATES; THIN FILMS; TRANSISTORS; ZINC OXIDE;

GIZO; IGZO; OXIDE THINFILM TRANSISTORS (TFTS); PLASMA-ENHANCED ATOMIC LAYER DEPOSITION; POLYMER SUBSTRATE; THIN-FILM TRANSISTOR (TFTS); ZNO;

THIN FILM TRANSISTORS;

EID: 84920158042     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2014.2371011     Document Type: Article

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