Characterization on pH sensing performance and structural properties of gadolinium oxide post-treated by nitrogen rapid thermal annealing

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 32, Issue 3, 2014, Pages

  Yang, Chia Ming ^a   Wang, Chih Yao ^a   Lai, Chao Sung ^a  

^a CHANG GUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; PH SENSORS; SEMICONDUCTING SILICON;

DRIFT COEFFICIENT; EIS STRUCTURES; GADOLINIUM OXIDE; POST-DEPOSITION; RAPID THERMAL ANNEALING (RTA); REACTIVE RADIO FREQUENCY SPUTTERING; TESTING PLATFORMS; X-RAY PHOTOEMISSIONS;

RAPID THERMAL ANNEALING;

EID: 84914702605     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.4865479     Document Type: Article

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