Functional testing and characterisation of (bio-)chemical sensors on wafer level

Sensors and Actuators, B: Chemical

Volumn 154, Issue 2, 2011, Pages 169-173

  Poghossian, Arshak ^a,b   Wagner, Holger ^a   Schöning, Michael J ^a,b  

^a AACHEN UNIVERSITY OF APPLIED SCIENCES   (Germany)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

(Bio )chemical sensor; Capacitive EIS sensor; Field effect: pH ISFET; Microcell; Wafer level testing

Indexed keywords

(BIO-)CHEMICAL SENSOR; CAPACITIVE EIS SENSOR; FIELD-EFFECT: PH ISFET; MICRO CELL; WAFER-LEVEL TESTING;

CHEMICAL SENSORS; ECONOMIC ANALYSIS; ELECTROCHEMICAL CORROSION; FIELD EFFECT TRANSISTORS; ION SENSITIVE FIELD EFFECT TRANSISTORS; PH EFFECTS; SILICON WAFERS; WAFER BONDING;

ELECTRONICS PACKAGING;

EID: 79955665885     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2009.11.024     Document Type: Conference Paper

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