A highly long-term stable silicon-based pH sensor fabricated by pulsed laser deposition technique

Sensors and Actuators, B: Chemical

Volumn 35, Issue 1-3, 1996, Pages 228-233

  Schoning M J ^a   Tsarouchas, D ^a   Beckers, L ^a   Schubert, J ^a   Zander, W ^a   Kordos P ^a   Luth H ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Capacitive EIS heterostructure; Long term stability; pH sensor; Pulsed laser deposition

Indexed keywords

ALUMINA; CAPACITANCE MEASUREMENT; DEPOSITION; HETEROJUNCTIONS; PULSED LASER APPLICATIONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON SENSORS; STOICHIOMETRY; TRANSMISSION ELECTRON MICROSCOPY; VOLTAGE MEASUREMENT;

PULSED LASER DEPOSITION;

PH SENSORS;

EID: 0030233697     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)80060-3     Document Type: Article

References (20)

1. Y.G. Vlasov and A.V. Bratov, Practical applications of pH-ISFETs, Sensors and Actuators B, 10 (1992) 1-6.
2. P. Bergveld and A. Sibbald, Analytical and Biomedical Applications of Ion-selective Field Effect Transistors, Elsevier, Amsterdam, 1988, pp. 172.
3. 3-gate ISFETs, Sensors and Actuators B, 2 (1990) 103-110.
4. 4 pH-sensing insulators, Sensors and Actuators B, 17 (1994) 157-164.
5. T. Matsuo, M. Esashi, Methods of ISFET fabrication, Sensors and Actuators, 1 (1981) 77-96.
6. 2 gate insulator, Sensors and Actuators B, 13-14 (1993) 655-656.
7. P. Giramel, K.D. Schierbaum, W. Göpel, H.H. van den Vlekkert and N.F. de Rooij, Microstructured solid-state ion-sensitive membrane by thermal oxidation of Ta, Sensors and Actuators B, 1 (1990) 345-349.
8. M. Thust, M.J. Schöning, J. Vetter, P. Kordos and H. Lüth, A long-term stable penicillin-sensitive potentiometric biosensor with enzyme immobilized by heterobifunctional cross-linking, Anal. Chim. Acta, 323 (1996) 115-121.
9. P. Bergveld, Development of an ion-sensitive solid-state device for neurophysiological measurements, IEEE Trans. Biomed. Eng., 17 (1970) 70-71.
10. J. Cheung and J. Horwitz, Pulsed laser deposition history and laser-target interactions, MRS Bull., (1992) 30-36.
11. K.L. Saenger, Pulsed laser deposition: Part I, A review of process characteristics and capabilities, Proc. Adv. Mater., 3 (1993) 1-24.
12. B. Stritzker, J. Schubert, U. Poppe, W. Zander, U. Krüger, A. Lubig and C. Buchal, Comparison of YBCO films prepared by laser ablation and sputtering, J. Less-Common Met., 164&165 (1990) 279-291.
13. G.K. Hubler, Pulsed laser deposition, MRS Bull., (1992) 26-27.
14. M.J. Schöning, A. Steffen, M. Sauke, P. Kordos, H. Lüth, A. Zundel and M. Müller-Veggian, Improved pH sensitivity of PECVD silicon nitride as gate material for ISFETs, SEE Proc. Sensors for the environment, Grenoble, France, 1995, pp. 55-59.
15. A.P. Soldatkin, A.V. El'skaya, A.A. Shul'ga, L.I. Netchiporouk, A.M. Nyamsi Hendji, N. Jaffrezic-Renault and C. Martelet, Glucose-sensitive field-effect transistor with additional Nafion membrane, Anal. Chim. Acta, 283 (1993) 695-701.
16. M.J. Schöning, A. Schaub, A. Zundel, L. Beckers, J. Schubert, W. Zander, P. Kordos and H. Lüth, Pulsed laser deposition as a novel thin film preparation method for silicon-based sensors, in H.C. de Graaf and H. van Kranenburg (eds.), Proc. ESSDERC' 95, The Hague, The Netherlands, 1995, pp. 601-604,
17. D.L. Harame, L.J. Bousse, J.D. Shott and J.D. Meindl, Ion-sensing devices with borosilicate glass insulators, IEEE Trans. Electron. Devices, 34 (1987) 1700-1707.
18. H. Abe, M. Esashi and T. Matsuo, ISFETs using inorganic gate thin films, IEEE Trans. Electron. Devices, 26 (1979) 1939-1944.
19. F. Chauvet, A. Amari and A. Martinez, Stability of silicon-nitride silicon-dioxide silicon electrodes used in pH microelectronic sensors, Sensors and Actuators, 6 (1984) 255-267.
20. M.J. Schöning, M. Sauke, A. Steffen, M. Marso, P. Kordos, H. Lüth, F. Kauffmann, R. Erbach and B. Hoffmann, Ion-sensitive field-effect transistors with ultrathin Langmuir-Blodgett membranes, Sensors and Actuators B, 26-27 (1995) 325.