SCOPUS 정보 검색 플랫폼

Applied Physics Letters

Volumn 105, Issue 12, 2014, Pages

Characterization of SiO2/SiNx gate insulators for graphene based nanoelectromechanical systems

(5) Tovari E a Csontos, M a Krivachy T a Furjes P b Csonka, S a

a BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS (Hungary)

b INSTITUTE OF EXPERIMENTAL MEDICINE (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

GATE INSULATOR;

EID: 84907494222 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.4896515 Document Type: Article

Times cited : (3)

References (33)

1
- 0034711368
- H. G. Craighead, Science 290, 1532 (2000). 10.1126/science.290.5496.1532
- (2000) Science , vol.290 , pp. 1532
- Craighead, H.G.¹

2
- 20544475443
- K. L. Ekinci and M. L. Roukes, Rev. Sci. Instrum. 76, 061101 (2005). 10.1063/1.1927327
- (2005) Rev. Sci. Instrum. , vol.76 , pp. 061101
- Ekinci, K.L.¹ Roukes, M.L.²

3
- 84864663907
- M. K. Zalalutdinov, J. T. Robinson, C. E. Junkermeier, J. C. Culbertson, T. L. Reinecke, R. Stine, P. E. Sheehan, B. H. Houston, and E. S. Snow, Nano Lett. 12, 4212 (2012). 10.1021/nl3018059
- (2012) Nano Lett. , vol.12 , pp. 4212
- Zalalutdinov, M.K.¹ Robinson, J.T.² Junkermeier, C.E.³ Culbertson, J.C.⁴ Reinecke, T.L.⁵ Stine, R.⁶ Sheehan, P.E.⁷ Houston, B.H.⁸ Snow, E.S.⁹

4
- 79960125858
- A. Eichler, J. Moser, J. Chaste, M. Zdrojek, I. Wilson-Rae, and A. Bachtold, Nat. Nanotechnol. 6, 339 (2011). 10.1038/nnano.2011.71
- (2011) Nat. Nanotechnol. , vol.6 , pp. 339
- Eichler, A.¹ Moser, J.² Chaste, J.³ Zdrojek, M.⁴ Wilson-Rae, I.⁵ Bachtold, A.⁶

5
- 0034711359
- R. K. Soong, G. D. Bachand, H. P. Neves, A. G. Olkhovets, H. G. Craighead, and C. D. Montemagno, Science 290, 1555 (2000). 10.1126/science.290.5496.1555
- (2000) Science , vol.290 , pp. 1555
- Soong, R.K.¹ Bachand, G.D.² Neves, H.P.³ Olkhovets, A.G.⁴ Craighead, H.G.⁵ Montemagno, C.D.⁶

6
- 67649961448
- R. Datar, S. Kim, S. Jeon, P. Hesketh, S. Manalis, A. Boisen, and T. Thundat, MRS Bull. 34, 449 (2009). 10.1557/mrs2009.121
- (2009) MRS Bull. , vol.34 , pp. 449
- Datar, R.¹ Kim, S.² Jeon, S.³ Hesketh, P.⁴ Manalis, S.⁵ Boisen, A.⁶ Thundat, T.⁷

7
- 79955821190
- J. L. Arlett, E. B. Myers, and M. L. Roukes, Nat. Nanotechnol. 6, 203 (2011). 10.1038/nnano.2011.44
- (2011) Nat. Nanotechnol. , vol.6 , pp. 203
- Arlett, J.L.¹ Myers, E.B.² Roukes, M.L.³

8
- 0034177819
- D. Deamer and M. Akeson, Trends Biotechnol. 18, 147 (2000). 10.1016/S0167-7799(00)01426-8
- (2000) Trends Biotechnol. , vol.18 , pp. 147
- Deamer, D.¹ Akeson, M.²

9
- 77956556804
- S. Garaj, W. Hubbard, A. Reina, J. Kong, D. Branton, and J. A. Golovchenko, Nature 467, 190 (2010). 10.1038/nature09379
- (2010) Nature , vol.467 , pp. 190
- Garaj, S.¹ Hubbard, W.² Reina, A.³ Kong, J.⁴ Branton, D.⁵ Golovchenko, J.A.⁶

10
- 77955580114
- C. A. Merchant, K. Healy, M. Wanunu, V. Ray, N. Peterman, J. Bartel, M. D. Fischbein, K. Venta, Z. Luo, A. T. C. Johnson, and M. Drndic, Nano Lett. 10, 2915 (2010). 10.1021/nl101046t
- (2010) Nano Lett. , vol.10 , pp. 2915
- Merchant, C.A.¹ Healy, K.² Wanunu, M.³ Ray, V.⁴ Peterman, N.⁵ Bartel, J.⁶ Fischbein, M.D.⁷ Venta, K.⁸ Luo, Z.⁹ Johnson, A.T.C.¹⁰ Drndic, M.¹¹

11
- 77955569305
- G. F. Schneider, S. W. Kowalczyk, V. E. Calado, G. Pandraud, H. W. Zandbergen, L. M. K. Vandersypen, and C. Dekker, Nano Lett. 10, 3163 (2010). 10.1021/nl102069z
- (2010) Nano Lett. , vol.10 , pp. 3163
- Schneider, G.F.¹ Kowalczyk, S.W.² Calado, V.E.³ Pandraud, G.⁴ Zandbergen, H.W.⁵ Vandersypen, L.M.K.⁶ Dekker, C.⁷

12
- 0032024519
- T. P. Ma, IEEE Trans. Electron Devices 45, 680 (1998). 10.1109/16.661229
- (1998) IEEE Trans. Electron Devices , vol.45 , pp. 680
- Ma, T.P.¹

13
- 14944341573
- X. S. Wang, G. J. Zhai, J. S. Yang, and N. Cui, Phys. Rev. B 60, R2146 (1999). 10.1103/PhysRevB.60.R2146
- (1999) Phys. Rev. B , vol.60 , pp. R2146
- Wang, X.S.¹ Zhai, G.J.² Yang, J.S.³ Cui, N.⁴

14
- 59349104188
- M. Yang, R. Q. Wu, W. S. Deng, L. Shen, Z. D. Sha, Y. Q. Cai, Y. P. Feng, and S. J. Wang, J. Appl. Phys. 105, 024108 (2009). 10.1063/1.3072625
- (2009) J. Appl. Phys. , vol.105 , pp. 024108
- Yang, M.¹ Wu, R.Q.² Deng, W.S.³ Shen, L.⁴ Sha, Z.D.⁵ Cai, Y.Q.⁶ Feng, Y.P.⁷ Wang, S.J.⁸

15
- 0030487321
- J. G. E. Gardeniers, H. A. C. Tilmans, and C. C. G. Visser, J. Vac. Sci. Technol., A 14, 2879 (1996). 10.1116/1.580239
- (1996) J. Vac. Sci. Technol., A , vol.14 , pp. 2879
- Gardeniers, J.G.E.¹ Tilmans, H.A.C.² Visser, C.C.G.³

16
- 34247517313
- O. Zohni, G. Buckner, T. Kim, A. Kingon, J. Maranchi, and R. Siergiej, J. Micromech. Microeng. 17, 1042 (2007). 10.1088/0960-1317/17/5/026
- (2007) J. Micromech. Microeng. , vol.17 , pp. 1042
- Zohni, O.¹ Buckner, G.² Kim, T.³ Kingon, A.⁴ Maranchi, J.⁵ Siergiej, R.⁶

17
- 84862277776
- Y. Wu, K. A. Jenkins, A. Valdes-Garcia, D. B. Farmer, Y. Zhu, A. A. Bol, C. Dimitrakopoulos, W. Zhu, F. Xia, P. Avouris, and Y. M. Lin, Nano Lett. 12, 3062 (2012). 10.1021/nl300904k
- (2012) Nano Lett. , vol.12 , pp. 3062
- Wu, Y.¹ Jenkins, K.A.² Valdes-Garcia, A.³ Farmer, D.B.⁴ Zhu, Y.⁵ Bol, A.A.⁶ Dimitrakopoulos, C.⁷ Zhu, W.⁸ Xia, F.⁹ Avouris, P.¹⁰ Lin, Y.M.¹¹

18
- 83655164347
- J. K. Park, S. M. Song, J. H. Mun, and B. J. Cho, Nano Lett. 11, 5383 (2011). 10.1021/nl202983x
- (2011) Nano Lett. , vol.11 , pp. 5383
- Park, J.K.¹ Song, S.M.² Mun, J.H.³ Cho, B.J.⁴

19
- 84884263023
- S. Lee, V. P. Adiga, R. A. Barton, A. van der Zande, G.-H. Lee, B. R. Ilic, A. Gondarenko, J. M. Parpia, H. G. Craighead, and J. Hone, Nano Lett. 13, 4275 (2013). 10.1021/nl4020414
- (2013) Nano Lett. , vol.13 , pp. 4275
- Lee, S.¹ Adiga, V.P.² Barton, R.A.³ Van Der Zande, A.⁴ Lee, G.-H.⁵ Ilic, B.R.⁶ Gondarenko, A.⁷ Parpia, J.M.⁸ Craighead, H.G.⁹ Hone, J.¹⁰

20
- 84881628853
- W. Yuan and G. Shi, J. Mater. Chem. A 1, 10078 (2013). 10.1039/c3ta11774j
- (2013) J. Mater. Chem. A , vol.1 , pp. 10078
- Yuan, W.¹ Shi, G.²

21
- 37849044972
- I. Jung, M. Pelton, R. Piner, D. A. Dikin, S. Stankovich, S. Watcharotone, M. Hausner, and R. S. Ruoff, Nano Lett. 7, 3569 (2007). 10.1021/nl0714177
- (2007) Nano Lett. , vol.7 , pp. 3569
- Jung, I.¹ Pelton, M.² Piner, R.³ Dikin, D.A.⁴ Stankovich, S.⁵ Watcharotone, S.⁶ Hausner, M.⁷ Ruoff, R.S.⁸

22
- 77956356344
- J. W. Weber, V. E. Calado, and M. C. M. van de Sanden, Appl. Phys. Lett. 97, 091904 (2010). 10.1063/1.3475393
- (2010) Appl. Phys. Lett. , vol.97 , pp. 091904
- Weber, J.W.¹ Calado, V.E.² Van De Sanden, M.C.M.³

23
- 0031997432
- J. Leng, J. Opsal, H. Chu, M. Senko, and D. E. Aspnes, Thin Solid Films 313-314, 132 (1998). 10.1016/S0040-6090(97)00799-2
- (1998) Thin Solid Films , vol.313-314 , pp. 132
- Leng, J.¹ Opsal, J.² Chu, H.³ Senko, M.⁴ Aspnes, D.E.⁵

24
- 49349095015
- P. Nemes-Incze, Z. Osváth, K. Kamarás, and L. P. Biró, Carbon 46, 1435 (2008). 10.1016/j.carbon.2008.06.022
- (2008) Carbon , vol.46 , pp. 1435
- Nemes-Incze, P.¹ Osváth, Z.² Kamarás, K.³ Biró, L.P.⁴

25
- 33847762932
- D. Graf, F. Molitor, K. Ensslin, C. Stampfer, A. Jungen, C. Hierold, and L. Wirtz, Nano Lett. 7, 238 (2007). 10.1021/nl061702a
- (2007) Nano Lett. , vol.7 , pp. 238
- Graf, D.¹ Molitor, F.² Ensslin, K.³ Stampfer, C.⁴ Jungen, A.⁵ Hierold, C.⁶ Wirtz, L.⁷

26
- 0029323656
- S. V. Deshpande, E. Gulari, S. W. Brown, and S. C. Rand, J. Appl. Phys. 77, 6534 (1995). 10.1063/1.359062
- (1995) J. Appl. Phys. , vol.77 , pp. 6534
- Deshpande, S.V.¹ Gulari, E.² Brown, S.W.³ Rand, S.C.⁴

27
- 80053506004
- M. Yang, C. Zhang, S. Wang, Y. Feng, and Ariando, AIP Adv. 1, 032111 (2011). 10.1063/1.3623567
- (2011) AIP Adv. , vol.1 , pp. 032111
- Yang, M.¹ Zhang, C.² Wang, S.³ Feng, Y.⁴ Ariando⁵

28
- 80052421086
- S. A. Imam, T. Deshpande, A. Guermoune, M. Siaj, and T. Szkopek, Appl. Phys. Lett. 99, 082109 (2011). 10.1063/1.3630227
- (2011) Appl. Phys. Lett. , vol.99 , pp. 082109
- Imam, S.A.¹ Deshpande, T.² Guermoune, A.³ Siaj, M.⁴ Szkopek, T.⁵

29
- 43049170468
- K. I. Bolotin, K. J. Sikes, Z. Jiang, M. Klima, G. Fudenberg, J. Hone, P. Kim, and H. Stormer, Solid State Commun. 146, 351 (2008). 10.1016/j.ssc.2008.02.024
- (2008) Solid State Commun. , vol.146 , pp. 351
- Bolotin, K.I.¹ Sikes, K.J.² Jiang, Z.³ Klima, M.⁴ Fudenberg, G.⁵ Hone, J.⁶ Kim, P.⁷ Stormer, H.⁸

30
- 79959518735
- N. Tombros, A. Veligura, J. Junesch, J. J. van den Berg, P. J. Zomer, M. Wojtaszek, I. J. V. Marun, H. T. Jonkman, and B. J. van Wees, J. Appl. Phys. 109, 093702 (2011). 10.1063/1.3579997
- (2011) J. Appl. Phys. , vol.109 , pp. 093702
- Tombros, N.¹ Veligura, A.² Junesch, J.³ Berg, J.J.V.D.⁴ Zomer, P.J.⁵ Wojtaszek, M.⁶ Marun, I.J.V.⁷ Jonkman, H.T.⁸ Van Wees, B.J.⁹

31
- 84897978196
- D.-K. Ki, V. I. Fal'ko, D. A. Abanin, and A. F. Morpurgo, Nano Lett. 14, 2135 (2014). 10.1021/nl5003922
- (2014) Nano Lett. , vol.14 , pp. 2135
- Ki, D.-K.¹ Fal'Ko, V.I.² Abanin, D.A.³ Morpurgo, A.F.⁴

32
- 84894263260
- J. Baringhaus, M. Ruan, F. Edler, A. Tejeda, M. Sicot, A. Taleb-Ibrahimi, A.-P. Li, Z. Jiang, E. H. Conrad, C. Berger, C. Tegenkamp, and W. A. de Heer, Nature 506, 349 (2014). 10.1038/nature12952
- (2014) Nature , vol.506 , pp. 349
- Baringhaus, J.¹ Ruan, M.² Edler, F.³ Tejeda, A.⁴ Sicot, M.⁵ Taleb-Ibrahimi, A.⁶ Li, A.-P.⁷ Jiang, Z.⁸ Conrad, E.H.⁹ Berger, C.¹⁰ Tegenkamp, C.¹¹ Heer, W.A.D.¹²

33
- 84893103469
- V. E. Calado, S.-E. Zhu, S. Goswami, Q. Xu, K. Watanabe, T. Taniguchi, G. C. A. M. Janssen, and L. M. K. Vandersypen, Appl. Phys. Lett. 104, 023103 (2014). 10.1063/1.4861627
- (2014) Appl. Phys. Lett. , vol.104 , pp. 023103
- Calado, V.E.¹ Zhu, S.-E.² Goswami, S.³ Xu, Q.⁴ Watanabe, K.⁵ Taniguchi, T.⁶ Janssen, G.C.A.M.⁷ Vandersypen, L.M.K.⁸

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.