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Volumn 65, Issue 3, 2014, Pages 417-420

Comparative studies of nonpolar (10-10) ZnO films grown by using atomic layer deposition and radio-frequency magnetron sputtering

Author keywords

ALD; LED; Sputter; TCO; ZnO

Indexed keywords


EID: 84907322140     PISSN: 03744884     EISSN: 19768524     Source Type: Journal    
DOI: 10.3938/jkps.65.417     Document Type: Article
Times cited : (4)

References (21)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.