Deposition-temperature effects on AZO thin films prepared by RF magnetron sputtering and their physical properties

Journal of the Korean Physical Society

Volumn 49, Issue SUPPL. 2, 2006, Pages

  Park, Jeung Hun ^a   Shin, Jong Moon ^a   Cha, Su Young ^a   Park, Jin Woo ^a   Jeong, Se Young ^a   Pak, Hyuk K ^a,b   Cho, Chae Ryung ^a  

^a Pusan National University   (South Korea)

^b Korea Basic Science Institute (KBSI)   (South Korea)

Author keywords

Al doped ZnO; AZO; RF magnetron sputtering; Transparent electrode; ZnO

Indexed keywords

EID: 33846400449     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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