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Volumn 546, Issue , 2013, Pages 114-117

Growth and characterization of polar and nonpolar ZnO film grown on sapphire substrates by using atomic layer deposition

Author keywords

ALD; Nonpolar; Semipolar; ZnO

Indexed keywords

ATOMIC LAYER DEPOSITION; DEPOSITION; FILM GROWTH; METALLIC FILMS; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; SAPPHIRE; SINGLE CRYSTALS; SURFACE ROUGHNESS; THIN FILMS; ZINC OXIDE;

EID: 84885293286     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2013.03.071     Document Type: Conference Paper
Times cited : (20)

References (20)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.