Structural evolution of platinum thin films grown by atomic layer deposition

Journal of Applied Physics

Volumn 116, Issue 6, 2014, Pages

  Geyer, Scott M ^a   Methaapanon, Rungthiwa ^a   Johnson, Richard ^a   Brennan, Sean ^b,c   Toney, Mike F ^b   Clemens, Bruce ^a   Bent, Stacey ^a  

^a Stanford University   (United States)

^b SLAC NATIONAL ACCELERATOR LABORATORY   (United States)

^c Fairview Associates   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; PLATINUM; TENSILE STRAIN; X RAY DIFFRACTION;

DEPOSITION TEMPERATURES; GRAZING INCIDENCE SMALL ANGLE SCATTERINGS; GRAZING INCIDENCE X-RAY DIFFRACTION; HIGH RESOLUTION X RAY DIFFRACTION; LATERAL GROWTH RATES; LATTICE ORIENTATIONS; RANDOMLY ORIENTED GRAINS; X-RAY DIFFRACTION TECHNIQUES;

ATOMIC LAYER DEPOSITION;

EID: 84906308974     PISSN: 00218979     EISSN: 10897550     Source Type: Journal    
DOI: 10.1063/1.4892104     Document Type: Article

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