Tensile stress generation during island coalescence for variable island-substrate contact angle

Journal of Applied Physics

Volumn 93, Issue 11, 2003, Pages 9038-9042

  Seel, Steven C ^a,b   Thompson, Carl V ^a  

^a USA   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; COALESCENCE; FINITE ELEMENT METHOD; GRAIN BOUNDARIES; NUCLEATION; SEMICONDUCTOR MATERIALS; TENSILE STRESS; WETTING;

STRESS GENERATION;

POLYCRYSTALLINE MATERIALS;

EID: 0037636413     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1571964     Document Type: Article

References (19)

1. R. W. Hoffman, Thin Solid Films 34, 185 (1976).
2. W. D. Nix and B. M. Clemens, J. Mater. Res. 14, 3467 (1999).
3. K. Maki, Y. Nakjima, and K. Kinosita, J. Vac. Sci. Technol. 6, 622 (1969).
4. J. D. Wilcock, D. S. Campbell, and J. C. Andersen, Thin Solid Films 3, 13 (1969).
5. R. Abermann, R. Kramer and J. Mäser, Thin Solid Films 52, 215 (1978).
6. R. Abermann and R. Koch, Thin Solid Films 129, 71 (1985).
7. R. Koch and R. Abermann, Thin Solid Films 140, 217 (1986).
8. R. Abermann, Vacuum 41, 1279 (1990).
9. A. L. Shull and F. Spaepen, J. Appl. Phys. 80, 6243 (1996).
10. J. A. Floro, S. J. Hearne, J. A. Hunter, P. Kotula, E. Chason, S. C. Seel. and C. V. Thompson, J. Appl. Phys. 89, 4886 (2001).
11. B. W. Sheldon, K. H. A. Lau, and A. Rajamani, J. Appl. Phys. 90, 5097 (2001).
12. A. Rajamani, B. W. Sheldon, E. Chason, and A. F. Bower, Appl. Phys. Lett. 81, 1204 (2002).
13. U. Geyer, U. von Hülsen, and H. Kopf. J. Appl. Phys. 83, 3065 (1998).
14. S. G. Mayr and K. Samwer, Phys. Rev. Lett. 87, 036105 (2001).
15. L. B. Freund and E. Chason, J. Appl. Phys. 89, 4866 (2001).
16. S. C. Seel, C. V. Thompson, S. J. Hearne, and J. A. Floro, J. Appl. Phys. 88, 7079 (2000).
17. M. A. Phillips, V. Rawaswamy, B. M. Clemens, and W. D. Nix, J. Mater. Res. 15, 2540 (2000).
18. J. G. Amar and F. Family, Thin Solid Films 272, 208 (1996).
19. R. F. Voss, R. B. Laibowitz, and E. I. Allessandrini, Phys. Rev. Lett. 49, 1441 (1982).