Suspended honeycomb nanowire ISFETs for improved stiction-free performance

Nanotechnology

Volumn 25, Issue 34, 2014, Pages

  Kim, Kihyun ^a   Rim, Taiuk ^a   Park, Chanoh ^a   Kim, Donghoon ^a   Meyyappan, M ^a,b   Lee, Jeong Soo ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b NASA AMES RESEARCH CENTER   (United States)

Author keywords

gate all around (GAA); honeycomb structure; ion sensitive field effect transistor; pH sensing; stiction; suspended nanowire; top down

Indexed keywords

BIOSENSORS; HONEYCOMB STRUCTURES; ION SENSITIVE FIELD EFFECT TRANSISTORS; PH SENSORS; STICTION;

BIOSENSOR APPLICATIONS; ELECTRICAL CHARACTERISTIC; ELECTRICAL PERFORMANCE; GATE-ALL-AROUND; INTRINSIC PERFORMANCE; PH SENSING; SUSPENDED NANOWIRES; TOPDOWN;

NANOWIRES;

EID: 84905845247     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/25/34/345501     Document Type: Article

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