Effect of Mg and Zr co-doping on piezoelectric AlN thin films for bulk acoustic wave resonators

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 61, Issue 8, 2014, Pages 1322-1328

  Yokoyama, Tsuyoshi ^a   Iwazaki, Yoshiki ^a   Onda, Yosuke ^a   Nishihara, Tokihiro ^a   Sasajima, Yuichi ^a   Ueda, Masanori ^a  

^a TAIYO YUDEN CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE FILTERS; CALCULATIONS; CRYSTAL ATOMIC STRUCTURE; ELECTROMECHANICAL COUPLING; MAGNETRONS; PIEZOELECTRICITY; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; ZINC SULFIDE;

BULK ACOUSTIC WAVE RESONATOR; ELECTROMECHANICAL COUPLING COEFFICIENTS; FIRST-PRINCIPLES CALCULATION; PIEZOELECTRIC CONSTANT; PIEZOELECTRIC PROPERTY; PIEZOELECTRIC THIN FILMS; REACTIVE CO-SPUTTERING; THIN-FILM BULK ACOUSTIC WAVE RESONATOR;

ZIRCONIUM;

EID: 84905217925     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2014.3039     Document Type: Article

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