Method of controlling coupling coefficient of Aluminum Scandium Nitride deposition in high volume production

2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013

Volumn , Issue , 2013, Pages 126-128

  Mishin, Sergey ^a   Gutkin, Michael ^a   Bizyukov, Alexander ^b   Sleptsov, Vladimir ^c  

^a Advanced Modular Systems Inc   (United States)

^b V N KARAZIN KHARKIV NATIONAL UNIVERSITY   (Ukraine)

^c MOSCOW AVIATION INSTITUTE NATIONAL RESEARCH UNIVERSITY   (Russian Federation)

Author keywords

Aluminum Nitride; coupling coefficient; Scandium; stress

Indexed keywords

ALUMINUM NITRIDE (ALN); BULK ACOUSTIC RESONATORS; COUPLING COEFFICIENT; DUAL MAGNETRONS; HIGH-VOLUME PRODUCTION; NITRIDE DEPOSITION; SPUTTERING TARGET;

ALUMINUM COATINGS; MAGNETRONS; SCANDIUM; STRESSES;

ALUMINUM NITRIDE;

EID: 84893293581     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EFTF-IFC.2013.6702105     Document Type: Conference Paper

References (7)

1. Milena Moeira, et al., "Aluminum scandium nitride thin-film bulk acoustic resonators for wide band applications", Vacuum, July 2011, Issue 1, pp. 23-26
2. Morito Akiyama, "Influence of temperature and scandium concentration on piezoelectic response of scandium aluminum nitride alloy thin films", Applied Physics Letters, Oct. 2009, Vol. 95, Iss. 16, pp. 2107-2107-3
3. H. P. Lobl, et al.. "Piezoelectric materials for BAW resonator and filters", 2001 IEEE International Ultrasonics Symposium, Atlanta, GA, Oct. 7-10, pp. 807-811.
4. Pau Muralt, et al.. "Electromechanical properties of AlScN thin films evaluated at 2.5 GJz film bulk acoustic resonators", Applied Physics Letters 99, 2011
5. Keiichi Umeda1, et al.. "PIEZOELECTRIC PROPERTIES OF ScAlN THIN FILMS FOR PIEZO-MEMS DEVICES", MEMS 2013, Taipei, Taiwan, January 20-24, 2013
6. Sergey Mishin, "Improving Manufacturability of Bulk Acoustic Wave and Surface Acoustic Wave Devices", IEEE SAWDA 2011
7. Sergey Mishin, Rich Ruby John Larson, Yury Oshmyansky, "Sputtering Process for Bulk Acoustic Wave Filters", Semiconductor International, 2003