Developing barbed microtip-based electrode arrays for biopotential measurement

Sensors (Switzerland)

Volumn 14, Issue 7, 2014, Pages 12370-12386

  Hsu, Li Sheng ^a   Tung, Shu Wei ^a   Kuo, Che Hsi ^a   Yang, Yao Joe ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Barbed microtips; Contact impedance; Detaching force; Dry electrode; Electrocardiography (ECG); Electroencephalogram (EEG); Silicon wet etching

Indexed keywords

BIOELECTRIC POTENTIALS; ELECTRIC CONTACTS; ELECTROCARDIOGRAPHY; ELECTROENCEPHALOGRAPHY; POLYVINYL CHLORIDES; SILICON; SILICON WAFERS; SILICONES; SINGLE CRYSTALS; WET ETCHING;

CONTACT IMPEDANCE; DETACHING FORCE; DRY ELECTRODE; ELECTRO-ENCEPHALOGRAM (EEG); MICROTIPS; SILICON WET ETCHING;

ELECTRODES;

EID: 84904165918     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s140712370     Document Type: Article

References (37)

1. Klimesch, W. EEG alpha and theta oscillations reflect cognitive and memory performance: A review and analysis. Brain Res. Rev. 1999, 29, 169-195.
2. Chang, C.L.; Chang, C.W.; Huang, H.Y.; Hsu, C.M.; Huang, C.H.; Huang, C.H.; Luo, C.H. A Power-Efficient Bio-Potential Acquisition Device with DS-MDE Sensors for Long-Term Healthcare Monitoring Applications. Sensors 2013, 10, 4777-4793.
3. El-Sherif, N.; Ursell, S.N.; Bekheit, S.; Fontaine, J.; Turitto, G.; Henkin, R.; Caref, E.B. Prognostic significance of the signal-averaged ECG depends on the time of recording in the postinfarction period. Am. Heart J. 1989, 118, 256-264.
4. Lofhede, J.; Seoane, F.; Thordstein, M. Textile Electrodes for EEG Recording-A Pilot Study. Sensors 2012, 12, 16907-16919.
5. De Luca, C.J. The use of surface electromyography in biomechanics. J. Appl. Biomech. 1997, 13, 135-163.
6. Searle, A.; Kirkup, L. A direct comparison of wet, dry and insulating bioelectric recording electrodes. Physiol. Meas. 2000, 21, 271-283.
7. Liao, L.D.; Lin C.T.; McDowell, K.; Wickenden, A.; Gramann., K.; Jung, T.P.; Ko, L.W.; Chang, J.Y. Biosensor Technologies for the Augmented Brain-Computer Interface in the Next Decades. Proc. IEEE 2012, 100, 1553-1566.
8. Ferree, T.C.; Luu, P.; Russell, S.G.; Tucker, D.M. Scalp electrode impedance, infection risk, and EEG data quality. Clin. Neurophysiol. 2001, 112, 536-544.
9. Ruffini, G.; Dunne, S.; Fuentemilla, L.; Grau, C.; Farrés, E.; Marco-Pallarés, J.; Watts, P.C.P.; Silva, S.R.P. First human trials of a dry electrophysiology sensor using a carbon nanotube array interface. Sens. Actuator A Phys. 2008, 144, 275-279.
10. Lin, C.T.; Liao, L.D.; Liu, Y.H.; Wang, I.J.; Lin, B.S.; Chang, J.Y. Novel dry polymer foam electrodes for long-term EEG measurement. IEEE Trans. Biomed. Eng. 2011, 58, 1200-1207.
11. O'Mahonya, C.; Pini, F.; Blakea, A.; Webstera, C.; O'Briena, J.; McCarthy, K.G. Microneedle-based electrodes with integrated through-silicon via for biopotential recording. Sens. Actuator A Phys. 2012, 186, 130-136.
12. Chen, C.Y.; Chang, C.L.; Chang, C.W.; Lai, S.C.; Chien, T.F.; Huang, H.Y.; Chiou, J.C.; Luo, C.H. A Low-Power Bio-Potential Acquisition System with Flexible PDMS Dry Electrodes for Portable Ubiquitous Healthcare Applications. Sensors 2013, 13, 3077-3091.
13. Gargiulo, G.; Calvo, R.A.; Bifulco, P.; Cesarelli, M.; Jin, C.; Mohamed, A.; van Schaik, A. A new EEG recording system for passive dry electrodes. Clin. Neurophysiol. 2010, 121, 686-693.
14. Liao, L.D.; Wang, I.J.; Chen, S.F.; Chang, J.Y.; Lin, C.T. Design, Fabrication and Experimental Validation of a Novel Dry-Contact Sensor for Measuring Electroencephalography Signals without Skin Preparation. Sensors 2011, 11, 5819-5834.
15. Forvi, E.; Bedoni, M.; Carabalona, R.; Soncini, M.; Mazzoleni, P.; Rizzo, F.; O'Mahony, C.; Morasso, C.; Cassarà, D.G.; Gramatica, F. Preliminary technology assessment of microneedles-based dry electrodes for biopotential monitoring in clinical examinations. Sens. Actuator A Phys. 2012, 180, 177-189.
16. Ng, W.C.; Seet, H.L.; Lee, K.S.; Ning, N.; Tai, W.X.; Sutedja, M.; Fuh, J.Y.H.; Li, X.P. Micro-spike EEG electrode and the vacuum-casting technology for mass production J. Mater. Process. Technol. 2009, 209, 4434-4438.
17. Dias, N.S.; Carmo, J.P.; Ferreira da Silva, A.; Mendes, P.M.; Correia, J.H. New dry electrodes based on iridium oxide (IrO) for non-invasive biopotential recordings and stimulation. Sens. Actuator A Phys. 2010, 164, 28-34.
18. Rajaraman, S.; Bragg, J.A.; Ross, J.D.; Allen, M.G. Micromachined three-dimensional electrode arrays for transcutaneous nerve tracking. J. Micromech. Microeng. 2011, doi:10.1088/ 0960-1317/21/8/085014.
19. Matteucci, M.; Carabalona, R.; Casella, M.; Di Fabrizio, E.; Gramatica, F.; Di Rienzo, M.; Snidero, E.; Gavioli, L.; Sancrotti, M. Micropatterned dry electrodes for brain-computer interface. Microelectron. Eng. 2007, 84, 1737-1740.
20. Radjenovic, B.; Radmilovic-Radjenovic, M.; Mitric, M. Level Set Approach to Anisotropic Wet Etching of Silicon. Sensors 2010, 10, 4950-4967.
21. Held, J.; Gaspar, J.; Ruther, P.; Hagner, M.; Cismak, A.; Heilmann, A.; Paul, O. Design of experiment characterization of microneedle fabrication processes based on dry silicon etching. J. Micromech. Microeng. 2010, doi:10.1088/0960-1317/20/2/025024.
22. Gassend, B.L.P.; Velásquez-García, L.F.; Akinwande, A.I. Design and fabrication of DRIE-patterned complex needlelike silicon structures. J. Microelectromech. Syst. 2010, 19, 589-598.
23. Yu, L.M.; Tay, F.E.H.; Guo, D.G.; Xu, L.; Yap, K.L. A microfabricated electrode with hollow microneedles for ECG measurement. Sens. Actuator A Phys. 2002, 151, 17-22.
24. Griss, P.; Enoksson, P.; Stemme, G. Micromachined barbed spikes for mechanical chip attachment. Sens. Actuator A Phys. 2002, 95, 94-99.
25. Byun, S.; Lim, J.M.; Paik, S.J.; Lee, A.; Koo, K.; Park, S.; Park, J.; Choi, B.D.; Seo, J.M.; Kim, K.; Chung, H.; Song, S.Y.; Jeon, D.; Cho, D. Barbed micro-spikes for micro-scale biopsy. J. Micromech. Microeng. 2005, 15, 1279-1284.
26. Tung, S.W.; Kuo, C.H.; Hsu, L.S.; Yang, Y.J. Fabricating Barbed Microtip Arrays by Low-Cost Silicon Wet Etching Techiques. In Technical digest of the 17th International Conference on Solid-State Sensors and Actuators, Transducers, Barcelona, Spain, 16-20 June 2013; pp. 1028-1031.
27. Wilke, N.; Reed, M.L.; Morrissey, A. The evolution from convex corner undercut towards microneedle formation: theory and experimental verification. J. Micromech. Microeng. 2006, 16, 808-814.
28. Wilke, N.; Morrissey, A. Silicon microneedle formation using modified mask designs based on convex corner undercut. J. Micromech. Microeng. 2007, 17, 238-244.
29. 3mixtures. J. Electrochem. Soc. 2005, 152, C843-C850.
30. Steinert, M.; Acker, J.; Oswald, S.; Wetzig, K. Study on the mechanism of silicon etching in HNO3-rich HF/HNO3 mixtures. J. Phys. Chem. C 2007, 111, 2133-2140.
31. Enfield, J.; O'Connell, M.L.; Lawlor, K.; Jonathan, E.; O'Mahony, C.; Leahy, M. In vivo dynamic characterization of microneedle skin penetration using optical coherence tomography (OCT). J. Biomed. Opt. 2010, doi:10.1117/1.3463002.
32. Griss, P.; Enoksson, P.; Tolvanen-Laakso, H.K.; Meriläinen, P.; Ollmar, S.; Stemme, G. Micromachined electrodes for biopotential measurements. J. Microelectromech. Syst. 2001, 10, 10-16.
33. Grimnes, S. Impedance measurement of individual skin surface electrodes. Med. Biol. Eng. Comput. 1983, 21, 750-755.
34. Wang, L.F.; Liu, J.Q.; Yang, B.; Yang, C.S. PDMS-based low cost flexible dry electrode for long-term eeg measurement. IEEE Sens. J. 2012, 12, 2898-2904.
35. Delorme, A.; Makeig, S. EEGLAB: An open source toolbox for analysis of single-trial EEG dynamics including independent component analysis. J. Neurosci. Methods 2004, 134, 9-21.
36. Silipo, R.; Marchesi, C. Artificial neural networks for automatic ECG analysis. IEEE Trans. Signal Process. 1998, 46, 1417-1425.
37. Liu, S.H.; Cheng, D.C.; Lin, C.M. Arrhythmia Identification with Two-Lead Electrocardiograms Using Artificial Neural Networks and Support Vector Machines for a Portable ECG Monitor System. Sensors 2013, 13, 813-828.