Design of experiment characterization of microneedle fabrication processes based on dry silicon etching

Journal of Micromechanics and Microengineering

Volumn 20, Issue 2, 2010, Pages

  Held, J ^a   Gaspar, J ^a   Ruther, P ^a   Hagner, M ^b   Cismak, A ^c   Heilmann, A ^c   Paul, O ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

^b UNIVERSITY OF KONSTANZ   (Germany)

^c FRAUNHOFER INSTITUTE FOR MECHANICS OF MATERIALS IWM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

D-OPTIMAL; ETCH MASK; ETCH PROCESS; ETCHING PARAMETERS; ETCHING TECHNIQUE; EXPERIMENTAL DESIGN; FABRICATION PROCESS; FULLY-ISOTROPIC; GEOMETRY FEATURES; INTRACELLULAR POTENTIALS; MICRONEEDLES; NEEDLE SHAPE; PROCESS PARAMETERS; RADII OF CURVATURE; SCANNING ELECTRON MICROGRAPHS; SILICON ETCHING; SILICON MICRONEEDLES; SINGLE ETCH; SUBMICROMETERS; SYSTEMATIC ANALYSIS;

ANISOTROPIC ETCHING; DESIGN OF EXPERIMENTS; FABRICATION; MICROELECTRODES; NEEDLES; PLASMA ETCHING; SCANNING ELECTRON MICROSCOPY;

DRY ETCHING;

EID: 77950282480     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/2/025024     Document Type: Article

References (33)

1. Campbell P K, Jones K E, Huber R J, Horch K W and Normann R A 1991 A silicon-based, three-dimensional neural interface: manufacturing processes for an intracortical electrode array IEEE Trans. Biomed. Eng. 38 758-68
2. Trautmann A, Denfeld R, Heuck F, Ruther P and Paul O 2006 Novel silicon microneedle stamps for allergy skin prick testing Tech. Dig. 19th IEEE MEMS Conf. pp 434-7
3. Roxhed N, Giss P and Stemme G 2008 Membrane-sealed hollow microneedles and related administration schemes for transdermal drug delivery Biomed. Microdevices 12 271-9
4. Held J, Gaspar J, Koester P J, Tautorat C, Cismak A, Heilmann A, Baumann W, Trautmann A, Ruther P and Paul O 2008 Microneedle arrays for intracellular recording applications Tech. Dig. 21st IEEE MEMS Conf. pp 268-71
5. Herwik S, Kisban S, Seidl K, Girardeau G, Benchenane K, Zugaro M B, Wiener S I, Paul O and Ruther P 2009 Fabrication technology for silicon based microprobe arrays used in acute and sub-chronic neural recording J. Micromech. Microeng. 19 074008
6. Bai Q, Wise K D and Anderson D A 2000 A high-yield microassembly structure for three-dimensional microelectrode arrays IEEE Trans. Biomed. Eng. 47 pp 281-9
7. Heuschkel M O, Fejtl M, Raggenbass M, Bertrand D and Renaud P 2002 A three-dimensional multi-electrode array for multi-site stimulation and recording in acute brain slices J. Neurosci. Methods 114 135-48
8. Trautmann A, Ruther P, Baumann W, Lehmann M and Paul O 2004 Three-dimensional nanoelectrodes for biomedical investigations on living cell networks Proc. Eurosensors XVIII pp 140-1
9. Held J, Gaspar J, Koester P J, Tautorat C, Hagner M, Cismak A, Heilmann A, Baumann W, Ruther P and Paul O 2009 Hollow microneedle electrode arrays for intracellular recording applications Tech. Dig. 22nd IEEE MEMS Conf. pp 220-3
10. Koester P J, Tautorat C, Held J, Gaspar J, Ruther P, Paul O, Cismak A, Heilmann A, Gimsa J and Baumann W 2008 Local micro-invasive needle electroporation (LOMINE) of single cells attached on silicon chips Proc. IBS'08 Conf. p 462
11. Tautorat C, et al. 2008 Intracellular potential measurements of adherently growing cells using microneedle arrays Proc. νTAS'08 Conf. pp 1777-80
12. Held J, Gaspar J, Ruther P, Hagner M, Cismak A, Heilmann A and Paul O 2007 Systematic characterization of DRIE-based fabrication process of silicon microneedles Mat. Res. Soc. Symp. Proc. 1052-DD07-07
13. Shikida M, Hasada T and Sato K 2006 Fabrication of densely arrayed micro-needles with flow channels by mechanical dicing and anisotropic wet etching J. Micromech. Microeng. 16 1740-7
14. Hanein Y, Schabmueller C G J, Holman G, Lucke P, Denton D D and Bohringer K F 2003 High-aspect ratio submicrometer needles for intracellular applications J. Micromech. Microeng. 13 S91-5
15. Joye N, Schmid A and Leblebici Y 2008 Three-dimensional silicon-based MEA with high spatial resolution Proc. 6th Int. Meeting on Substrate-Integrated Micro Electrode Arrays (MEA) pp 312-6
16. Shikida M, Hasada T and Sato K 2006 Fabrication of a hollow needle structure by dicing, wet etching and metal deposition J. Micromech. Microeng. 16 2230-9
17. Trautmann A, Heuck F, Mueller C, Ruther P and Paul O 2005 Replication of microneedle arrays using vacuum casting and hot embossing Dig. Tech. Papers Transducers'05 pp 1420-3
18. Moon S J and Lee S S 2005 A novel fabrication method of a microneedle array using inclined deep x-ray exposure J. Micromech. Microeng. 15 903-11
19. Khumpuang S, Horade M, Fujioka K and Sugiyama S 2006 Microneedle fabrication using the plane pattern to cross-section transfer method Smart Mater. Struct. 15 600-6
20. Hamil O P, Marty A, Neher E, Sakmann B and Sigworth F J 1981 Improved patch-clamp techniques for high-resolution current recording from cells and cell-free membranes patches Pflugers Arch.-Eur. J. Physiol. 391 85-100
21. Matthews B and Judy J W 2006 Design and fabrication of a micromachined planar patch-clamp substrate with integrated microfluidics for single-cell measurements J. Micromech. Microeng. 15 214-22
22. Baumann W, Schreiber E, Krause G, Stüwe S, Podssun A, Homma S, Anlauf H, Freund I, Rosner R and Lehmann M 2002 Multiparametric neurosensor microchip Proc. Eurosensors XVI 1169-72
23. Frey U, Heer F, Pedron R, Greve F, Hafizovic S, Kirstein K U and Hierlemann A 2007 11 000 electrode-,126 channel-CMOS microelectrode array for electrogenic cells Tech. Dig. 20th IEEE MEMS Conf. pp 541-4
24. Berdondini L, et al. 2006 A microelectrode array (MEA) integrated with clustering structures for investigating in vitro neurodynamics in confined interconnected sub-populations of neurons Sensors Actuators B 114 530-41
25. Baumann W, Ehret R, Lehmann M, Igel G, Gahle H J, Wolf B, Sieben U, Freund I and Brischwein M Apparatus and method for transforming living cells US Patent No 6,645,757
26. Baumann W, Ehret R, Lehmann M, Igel G, Gahle H J, Wolf B, Sieben U, Freund I and Brischwein M Method for intracellular manipulation of biological cells US Patent No 6,475,760
27. Tsong T Y 1991 Electroporation of cell membranes Biophys. J. 60 297-306
28. Rols M P and Teissié J 1998 Electropermeabilization of cells to macro-molecules Biophys. J. 75 1415-23
29. See, for example Montgomery D C 2005 Design and Analysis of Experiments (Hoboken, NJ: Wiley)
30. Jansen H V, de Boer M J, Unnikrishnan S, Louwerse M C and Elwenspoek M C 2009 Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment J. Micromech. Microeng. 19 033001
31. Process improvement NIST/SEMATECH e-Handbook of Statistical Methods chapter 5, 2009 http://www.itl.nist.gov/ div898/handbook
32. Larsen K P, Ravnkilde J T and Hansen O 2005 Investigations of the isotropic etch of an ICP source for silicon microlens mold fabrication J. Micromech. Microeng. 15 873-82
33. Craigie C J D, Sheehan T, Johnson V N, Burkett S L, Moll A J and Knowlton W B 2002 Polymer thickness effects on Bosch etch profiles J. Vac. Sci. Technol. B 20 2229-32