Microneedle-based electrodes with integrated through-silicon via for biopotential recording

Sensors and Actuators, A: Physical

Volumn 186, Issue , 2012, Pages 130-136

  O'Mahony, Conor ^a   Pini, Francesco ^a,b   Blake, Alan ^a   Webster, Carlo ^a   O'Brien, Joe ^a   McCarthy, Kevin G ^b  

^a UNIVERSITY COLLEGE CORK   (Ireland)

^b UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

Biopotential; Dry electrode; Electrocardiography (ECG); Electromyography (EMG); Microneedle; Potassium hydroxide

Indexed keywords

BIOPOTENTIALS; DRY ELECTRODE; ELECTRICAL CONTACTS; METAL DEPOSITION; MICRONEEDLE ARRAYS; MICRONEEDLES; PHYSIOLOGICAL SIGNALS; WAFER PATTERNING;

AUTOMOBILE MANUFACTURE; ELECTRIC CONTACTS; ELECTROCARDIOGRAPHY; ELECTROMYOGRAPHY; POTASSIUM HYDROXIDE; SILICON WAFERS; WET ETCHING;

NEEDLES;

EID: 84867335332     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.04.037     Document Type: Conference Paper

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