메뉴 건너뛰기




Volumn 30, Issue 3, 2014, Pages 758-765

Robotic probing of nanostructures inside scanning electron microscopy

Author keywords

Automated nanoprobing; drift compensation; image denoising; nanomanipulation system; scanning electron microscope (SEM)

Indexed keywords

IMAGE DENOISING; MICROMANIPULATORS; NANOSTRUCTURES; SCANNING ELECTRON MICROSCOPY; TRACKING (POSITION);

EID: 84902173525     PISSN: 15523098     EISSN: None     Source Type: Journal    
DOI: 10.1109/TRO.2014.2298551     Document Type: Article
Times cited : (31)

References (35)
  • 1
    • 0034723247 scopus 로고    scopus 로고
    • Strength and breaking mechanism of multiwalled carbon nanotubes under tensile load
    • M. Yu, O. Lourie, M. Dyer, K. Moloni, T. Kelly, and R. Ruoff, "Strength and breaking mechanism of multiwalled carbon nanotubes under tensile load, " Science, vol. 287, no. 5453, pp. 637-640, 2000.
    • (2000) Science , vol.287 , Issue.5453 , pp. 637-640
    • Yu, M.1    Lourie, O.2    Dyer, M.3    Moloni, K.4    Kelly, T.5    Ruoff, R.6
  • 2
    • 3142736736 scopus 로고    scopus 로고
    • Assembly of nanodevices with carbon nanotubes through nanorobotic manipulations
    • Nov
    • T. Fukuda, F. Arai, and L. Dong, "Assembly of nanodevices with carbon nanotubes through nanorobotic manipulations, " Proc. IEEE, vol. 91, no. 11, pp. 1803-1818, Nov. 2003.
    • (2003) Proc. IEEE , vol.91 , Issue.11 , pp. 1803-1818
    • Fukuda, T.1    Arai, F.2    Dong, L.3
  • 5
    • 0029911943 scopus 로고    scopus 로고
    • Nanotubes as nanoprobes in scanning probe microscopy
    • H. Dai, J. Hafner, A. Rinzler, D. Colbert, and R. Smalley, "Nanotubes as nanoprobes in scanning probe microscopy, " Nature, vol. 384, no. 6605, pp. 147-150, 1996.
    • (1996) Nature , vol.384 , Issue.6605 , pp. 147-150
    • Dai, H.1    Hafner, J.2    Rinzler, A.3    Colbert, D.4    Smalley, R.5
  • 6
    • 80052056328 scopus 로고    scopus 로고
    • Effect of nanowire number, diameter, and doping density on nano-fet biosensor sensitivity
    • J. Li, Y. Zhang, S. To, L. You, and Y. Sun, "Effect of nanowire number, diameter, and doping density on nano-fet biosensor sensitivity, " ACS Nano, vol. 5, no. 8, pp. 6661-6668, 2011.
    • (2011) ACS Nano , vol.5 , Issue.8 , pp. 6661-6668
    • Li, J.1    Zhang, Y.2    To, S.3    You, L.4    Sun, Y.5
  • 8
    • 80054979884 scopus 로고    scopus 로고
    • Far-field optical imaging of a linear array of coupled gold nanocubes: Direct visualization of dark plasmon propagating modes
    • H. Chen, C. He, C. Wang, M. Lin, D. Mitsui, M. Eguchi, T. Teranishi, and S. Gwo, "Far-field optical imaging of a linear array of coupled gold nanocubes: Direct visualization of dark plasmon propagating modes, " ACS Nano, vol. 5, no. 10, pp. 8223-8229, 2011.
    • (2011) ACS Nano , vol.5 , Issue.10 , pp. 8223-8229
    • Chen, H.1    He, C.2    Wang, C.3    Lin, M.4    Mitsui, D.5    Eguchi, M.6    Teranishi, T.7    Gwo, S.8
  • 9
    • 84858967062 scopus 로고    scopus 로고
    • Nanofork for single cells adhesion measurement via ESEM-nanomanipulator system
    • Mar
    • M. Ahmad, M. Nakajima, M. Kojima, S. Kojima, M. Homma, and T. Fukuda, "Nanofork for single cells adhesion measurement via ESEM-nanomanipulator system, " IEEE Trans. NanoBioscience, vol. 11, no. 1, pp. 70-78, Mar. 2012.
    • (2012) IEEE Trans. NanoBioscience , vol.11 , Issue.1 , pp. 70-78
    • Ahmad, M.1    Nakajima, M.2    Kojima, M.3    Kojima, S.4    Homma, M.5    Fukuda, T.6
  • 10
    • 77950167895 scopus 로고    scopus 로고
    • Nanoprobing sram bit cells with high-speed pulses
    • R. Stallcup and K. Inoue, "Nanoprobing sram bit cells with high-speed pulses, " Electron. Device Failure Anal., vol. 11, no. 4, pp. 22-27, 2009.
    • (2009) Electron. Device Failure Anal. , vol.11 , Issue.4 , pp. 22-27
    • Stallcup, R.1    Inoue, K.2
  • 11
    • 4544252941 scopus 로고    scopus 로고
    • Automated diagnosis and probing flow for fast fault localization inIC
    • D. Martin, R. Desplats, G. Haller, P. Nouet, and F. Azäis, "Automated diagnosis and probing flow for fast fault localization inIC, " Microelectron. Rel., vol. 44, no. 911, pp. 1553-1558, 2004.
    • (2004) Microelectron. Rel. , vol.44 , Issue.911 , pp. 1553-1558
    • Martin, D.1    Desplats, R.2    Haller, G.3    Nouet, P.4    Azäis, F.5
  • 13
    • 69249221302 scopus 로고    scopus 로고
    • A study of electrical characteristic changes in MOSFET by electron beam irradiation
    • Y. Mitsui, T. Sunaoshi, and J. C. Lee, "A study of electrical characteristic changes in MOSFET by electron beam irradiation, " Microelectron. Rel., vol. 49, no. 9, pp. 1182-1187, 2009.
    • (2009) Microelectron. Rel. , vol.49 , Issue.9 , pp. 1182-1187
    • Mitsui, Y.1    Sunaoshi, T.2    Lee, J.C.3
  • 16
    • 84872938458 scopus 로고    scopus 로고
    • Nanorobotic strategies for handling and characterization of metal-assisted etched silicon nanowires
    • Jun
    • C. Stolle, M. Bartenwerfer, C. Celle, J. Simonato, and S. Fatikow, "Nanorobotic strategies for handling and characterization of metal-assisted etched silicon nanowires, " IEEE/ASME Trans. Mechatronics, vol. 18, no. 3, pp. 887-894, Jun. 2013.
    • (2013) IEEE/ASME Trans. Mechatronics , vol.18 , Issue.3 , pp. 887-894
    • Stolle, C.1    Bartenwerfer, M.2    Celle, C.3    Simonato, J.4    Fatikow, S.5
  • 17
    • 84862929917 scopus 로고    scopus 로고
    • Automated nanomanipulation for nanodevice construction
    • Y. L. Zhang, J. Li, S. To, Y. Zhang, X. Ye, L. You, and Y. Sun, "Automated nanomanipulation for nanodevice construction, " Nanotechnology, vol. 23, no. 6, p. 065304, 2012. Available: http://iopscience. iop.org/0957-4484/23/6/065304/pdf/0957-4484-23-6-065304.pdf.
    • (2012) Nanotechnology , vol.23 , Issue.6 , pp. 065304
    • Zhang, Y.L.1    Li, J.2    To, S.3    Zhang, Y.4    Ye, X.5    You, L.6    Sun, Y.7
  • 18
    • 84864435918 scopus 로고    scopus 로고
    • Development of the auto manipulation system towards the single cell automatic analysis inside an environmental sem
    • Y. Shen, M. Nakajima, P. Di, T. Yue, S. Kojima, M. Homma, andT. Fukuda, "Development of the auto manipulation system towards the single cell automatic analysis inside an environmental sem, " in Proc. IEEE Int. Conf. Robot. Autom., 2012, pp. 4594-4599.
    • (2012) Proc. IEEE Int. Conf. Robot. Autom , pp. 4594-4599
    • Shen, Y.1    Nakajima, M.2    Di, P.3    Yue, T.4    Kojima, S.5    Homma M. Fukuda, T.6
  • 19
    • 0242636409 scopus 로고    scopus 로고
    • Image denoising using scale mixtures of Gaussians in the wavelet domain
    • Nov
    • J. Portilla, V. Strela, M. Wainwright, and E. Simoncelli, "Image denoising using scale mixtures of Gaussians in the wavelet domain, " IEEE Trans. Image Process., vol. 12, no. 11, pp. 1338-1351, Nov. 2003.
    • (2003) IEEE Trans. Image Process. , vol.12 , Issue.11 , pp. 1338-1351
    • Portilla, J.1    Strela, V.2    Wainwright, M.3    Simoncelli, E.4
  • 20
    • 0031141035 scopus 로고    scopus 로고
    • Susana new approach to low level image processing
    • S. M. Smith and J. M. Brady, "Susana new approach to low level image processing, " Int. J. Comput. Vis., vol. 23, no. 1, pp. 45-78, 1997.
    • (1997) Int. J. Comput. Vis. , vol.23 , Issue.1 , pp. 45-78
    • Smith, S.M.1    Brady, J.M.2
  • 21
    • 0026821645 scopus 로고
    • Image selective smoothing and edge detection by nonlinear diffusion
    • F. Catté, P.-L. Lions, J.-M. Morel, and T. Coll, "Image selective smoothing and edge detection by nonlinear diffusion, " SIAM J. Numer. Anal., vol. 29, no. 1, pp. 182-193, 1992.
    • (1992) SIAM J. Numer. Anal. , vol.29 , Issue.1 , pp. 182-193
    • Catté, F.1    Lions, P.-L.2    Morel, J.-M.3    Coll, T.4
  • 22
    • 0001556589 scopus 로고    scopus 로고
    • Iterative methods for total variation de-noising
    • C. R. Vogel and M. E. Oman, "Iterative methods for total variation de-noising, " SIAM J. Sci. Comput., vol. 17, no. 1, pp. 227-238, 1996.
    • (1996) SIAM J. Sci. Comput. , vol.17 , Issue.1 , pp. 227-238
    • Vogel, C.R.1    Oman, M.E.2
  • 23
    • 84862327589 scopus 로고    scopus 로고
    • High quality real-time video with scanning electron microscope using total variation algorithm on a graphics processing unit
    • N. Ouarti, B. Sauvet, and S. Régnier, "High quality real-time video with scanning electron microscope using total variation algorithm on a graphics processing unit, " Int. J. Optomechatronics, vol. 6, no. 2, pp. 163-178, 2012.
    • (2012) Int. J. Optomechatronics , vol.6 , Issue.2 , pp. 163-178
    • Ouarti, N.1    Sauvet, B.2    Régnier, S.3
  • 25
    • 79957527131 scopus 로고    scopus 로고
    • Real-time scanning charged-particle microscope image composition with correction of drift
    • P. Cizmar, A. E. Vladár, and M. T. Postek, "Real-time scanning charged-particle microscope image composition with correction of drift, " Microscopy Microanal., vol. 17, no. 2, pp. 302-308, 2011.
    • Microscopy Microanal. , vol.17 , Issue.2 , pp. 302-308
    • Cizmar, P.1    Vladár, A.E.2    Postek, M.T.3
  • 26
    • 36948998570 scopus 로고    scopus 로고
    • Scanning electron microscopy for quantitative small and large deformation measurements part i: Sem imaging at magnifications from 200 to 10, 000
    • M. Sutton, N. Li, D. Joy, A. Reynolds, and X. Li, "Scanning electron microscopy for quantitative small and large deformation measurements part i: Sem imaging at magnifications from 200 to 10, 000, " Exp. Mech., vol. 47, no. 6, pp. 775-787, 2007.
    • (2007) Exp. Mech. , vol.47 , Issue.6 , pp. 775-787
    • Sutton, M.1    Li, N.2    Joy, D.3    Reynolds, A.4    Li, X.5
  • 27
    • 52449094470 scopus 로고    scopus 로고
    • AFM image based pattern detection for adaptive drift compensation and positioning at the nanometer scale
    • S. Belikov, J. Shi, and C. Su, "AFM image based pattern detection for adaptive drift compensation and positioning at the nanometer scale, " in Proc. Am. Control Conf., 2008, pp. 2046-2051.
    • (2008) Proc. Am. Control Conf , pp. 2046-2051
    • Belikov, S.1    Shi, J.2    Su, C.3
  • 28
    • 24144435293 scopus 로고    scopus 로고
    • Nanoscale in-plane displacement evaluation by AFM scanning and digital image correlation processing
    • S. Chang, C. S. Wang, C. Y. Xiong, and J. Fang, "Nanoscale in-plane displacement evaluation by AFM scanning and digital image correlation processing, " Nanotechnology, vol. 16, no. 4, pp. 344-349, 2005.
    • (2005) Nanotechnology , vol.16 , Issue.4 , pp. 344-349
    • Chang, S.1    Wang, C.S.2    Xiong, C.Y.3    Fang, J.4
  • 29
    • 84887263853 scopus 로고    scopus 로고
    • Automated nanoprobing under scanning electron microscopy
    • May
    • Z. Gong, B. K. Chen, J. Liu, and Y. Sun, "Automated nanoprobing under scanning electron microscopy, " in Proc. IEEE Int. Conf. Robot. Autom., May 2013, pp. 1433-1438.
    • (2013) Proc. IEEE Int. Conf. Robot. Autom , pp. 1433-1438
    • Gong, Z.1    Chen, B.K.2    Liu, J.3    Sun, Y.4
  • 30
    • 84866490793 scopus 로고    scopus 로고
    • A load-lock-compatible nanomanipulation system for scanning electron microscope
    • Y. L. Zhang, Y. Zhang, C. Ru, B. K. Chen, and Y. Sun, "A load-lock-compatible nanomanipulation system for scanning electron microscope, " IEEE/ASME Trans. Mechatronics, vol. 18, no. 1, pp. 230-237, 2011.
    • (2011) IEEE/ASME Trans. Mechatronics , vol.18 , Issue.1 , pp. 230-237
    • Zhang, Y.L.1    Zhang, Y.2    Ru, C.3    Chen, B.K.4    Sun, Y.5
  • 31
    • 79960265713 scopus 로고    scopus 로고
    • Automated four-point probe measurement of nanowires inside a scanning electron microscope
    • Jul
    • C. Ru, Y. Zhang, Y. Sun, Y. Zhong, X. Sun, D. Hoyle, and I. Cotton, "Automated four-point probe measurement of nanowires inside a scanning electron microscope, " IEEE Trans. Nanotechnol., vol. 10, no. 4, pp. 674-681, Jul. 2011.
    • (2011) IEEE Trans. Nanotechnol. , vol.10 , Issue.4 , pp. 674-681
    • Ru, C.1    Zhang, Y.2    Sun, Y.3    Zhong, Y.4    Sun, X.5    Hoyle, D.6    Cotton, I.7
  • 32
    • 0019647180 scopus 로고
    • An iterative image registration technique with an application to stereo vision
    • B. D. Lucas and T. Kanade, "An iterative image registration technique with an application to stereo vision, " in Proc. 7th Int. Joint Conf. Artif. Intell., 1981, vol. 2, pp. 674-679.
    • (1981) Proc. 7th Int. Joint Conf. Artif. Intell , vol.2 , pp. 674-679
    • Lucas, B.D.1    Kanade, T.2
  • 33
    • 33645653318 scopus 로고    scopus 로고
    • A review of image denoising algorithms, with a new one
    • A. Buades, B. Coll, and J. M. Morel, "A review of image denoising algorithms, with a new one, " Multiscale Modeling Simul., vol. 4, no. 2, pp. 490-530, 2005.
    • (2005) Multiscale Modeling Simul. , vol.4 , Issue.2 , pp. 490-530
    • Buades, A.1    Coll, B.2    Morel, J.M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.