All-silicon technology for high-Q evanescent mode cavity tunable resonators and filters

Journal of Microelectromechanical Systems

Volumn 23, Issue 3, 2014, Pages 727-739

  Arif, Muhammad Shoaib ^a   Peroulis, Dimitrios ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

Electrostatic; Evanescent mode cavity; High Q.; MEMS; Silicon; Tunable filter; Tunable resonator

Indexed keywords

APPLICATION SPECIFIC INTEGRATED CIRCUITS; BATCH DATA PROCESSING; ELECTROSTATICS; FABRICATION; MEMS; RESONATORS; SILICON; SYSTEM-ON-CHIP;

EVANESCENT-MODE CAVITY; FABRICATION TECHNOLOGIES; HIGH-Q; MICRO-FABRICATION TECHNIQUES; MILLIMETER-WAVE REGIONS; TUNABLE FILTERS; TUNABLE RESONATORS; UNLOADED QUALITY FACTORS;

TECHNOLOGY;

EID: 84901981840     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2013.2281119     Document Type: Article

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