High-Q tunable microwave cavity resonators and filters using SOI-based RF MEMS tuners

Journal of Microelectromechanical Systems

Volumn 19, Issue 4, 2010, Pages 774-784

  Liu, Xiaoguang ^a   Katehi, Linda P B ^b   Chappell, William J ^a   Peroulis, Dimitrios ^a  

^a PURDUE UNIVERSITY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Electrostatic actuation; evanescent mode cavity; microelectromechanical systems (MEMS); quality factor; tunable filter; tunable resonator; tuning

Indexed keywords

ELECTROSTATIC ACTUATION; MICROELECTROMECHANICAL SYSTEMS; QUALITY FACTORS; TUNABLE FILTER; TUNABLE FILTERS; TUNABLE RESONATORS;

BANDPASS FILTERS; CAVITY RESONATORS; COMPOSITE MICROMECHANICS; DAMPING; ELECTRIC FURNACES; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; MECHANICAL STABILITY; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; TUNING;

MICROWAVE FILTERS;

EID: 77955421447     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2055544     Document Type: Article

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