A reduced-size silicon micromachined high-Q resonator at 5.7 GHz

IEEE Transactions on Microwave Theory and Techniques

Volumn 50, Issue 10, 2002, Pages 2305-2314

  Tavernier, Christophe A ^b   Henderson, Rashaunda M ^a,c   Papapolymerou, John ^a,d  

^a IEEE

^b University of Arizona   (United States)

^c MOTOROLA INC   (United States)

^d GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

High Q resonators; Micromachining; Planar circuit; Small size

Indexed keywords

BONDING; COMPUTER SIMULATION; DIELECTRIC LOSSES; DIELECTRIC MATERIALS; INTEGRATED CIRCUIT LAYOUT; LITHOGRAPHY; MATHEMATICAL MODELS; MICROMACHINING; MICROSTRIP LINES; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; PERMITTIVITY; SILICON WAFERS;

HIGH QUALITY RESONATORS; MINIATURIZED RESONATORS; PERFECT ELECTRIC CONDUCTOR; PERFECT MAGNETIC CONDUCTORS; PLANAR CIRCUITS;

CAVITY RESONATORS;

EID: 0036772142     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2002.80342     Document Type: Article

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