K and Ka-band silicon micromachined evanescent mode resonators

Proceedings of the 37th European Microwave Conference, EUMC

Volumn , Issue , 2007, Pages 446-449

  Margomenos, Alexandros ^a   Lee, Yongshik ^b   Kuo, Andrew ^a   Jain, Alok ^a   Munn, Jiyun ^a   Sabet, Kazem ^a   Katehi, Linda P B ^c  

^a EMAG Technologies Inc   (United States)

^b Yonsei University   (South Korea)

^c UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

DRIE etching; Evanescent mode filters; Silicon micromachining

Indexed keywords

COMPOSITE MICROMECHANICS; ETCHING; MACHINING; MICROMACHINING; MICROWAVES; NATURAL FREQUENCIES; RESONATORS; SILICON SENSORS;

DESIGN METHODS; DRIE ETCHING; EVANESCENT MODE FILTERS; FULL-WAVE ANALYSIS; KA BANDS; MICROMACHINED; MODE RESONATORS; MODELING RESULTS; POLE FILTERS; RESONANT CAVITIES; RESONANT FREQUENCIES; SILICON MICROMACHINING; UNLOADED QUALITY FACTORS; WAVEGUIDE CAVITIES;

MICROWAVE FILTERS;

EID: 48349113053     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMC.2007.4405223     Document Type: Conference Paper

References (4)

1. Richard V. Snyder, Ralph Levy, and George Matthaei, "Design of microwave filters" , IEEE Trans. on MTT, vol. 50, pp 783-793, no.5, May 2002.
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3. George F. Craven, and C.K.Mok, "The design of evanescent mode waveguide bandpass filters for a prescribed insertion loss characteristic", IEEE Trans. on MTT, vol. 19, pp 295-308, no.3, March 1971.
4. L. Harle and L.P.B. Katehi, "A silicon micromachined four pole linear phase filter", IEEE Trans. on MTT, vol. 52, pp 1598-1607, no.6, June 2004.