A vertically integrated micromachined filter

IEEE Transactions on Microwave Theory and Techniques

Volumn 50, Issue 9, 2002, Pages 2063-2068

  Harle, Lee ^b   Katehi, Linda P B ^a,b,c  

^a IEEE

^b UNIVERSITY OF MICHIGAN   (United States)

^c PURDUE UNIVERSITY   (United States)

Author keywords

Filter; Micromachined cavity; Microwave

Indexed keywords

CAVITY RESONATORS; COMPUTER SIMULATION; ELECTRIC NETWORK SYNTHESIS; FINITE ELEMENT METHOD; MICROMACHINING; MICROSTRIP LINES; MICROWAVES; WAVEGUIDES;

MICROMACHINED CAVITY; VERTICALLY INTEGRATED MICROMACHINED FILTER;

MICROWAVE FILTERS;

EID: 0036736273     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2002.802317     Document Type: Article

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