A high-Q magnetostatically-tunable all-silicon evanescent cavity resonator

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2011, Pages

  Arif, Muhammad Shoaib ^a   Irshad, Wasim ^a   Liu, Xiaoguang ^a   Chappell, William J ^a   Peroulis, Dimitrios ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

Evanescent mode cavity; magnetostatic; MEMS; silicon; tunable filter; tunable resonator

Indexed keywords

ANALOG TUNING; EVANESCENT-MODE CAVITY; MODELING RESULTS; SILICON MICROMACHINING; SIMULATED RESULTS; SINGLE CRYSTAL SILICON; THERMO COMPRESSION BONDING; TUNABLE FILTERS; TUNABLE RESONATORS; TUNING MECHANISM; UNLOADED QUALITY FACTORS;

CAVITY RESONATORS; DIAPHRAGMS; GOLD; MAGNETOSTATICS;

MICROWAVE DEVICES;

EID: 80052324131     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2011.5972966     Document Type: Conference Paper

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