Ultrasensitive nanomechanical mass sensor using hybrid opto- electromechanical systems

Optics Express

Volumn 22, Issue 11, 2014, Pages 13773-13783

  Jiang, Cheng ^a   Cui, Yuanshun ^a   Zhu, Ka Di ^b  

^a HUAIYIN NORMAL UNIVERSITY   (China)

^b SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

NATURAL FREQUENCIES; PROBES; SENSORS; VIRUSES;

ELECTROMECHANICAL SYSTEMS; GOLD NANOPARTICLES; MASS SENSITIVITY; MECHANICAL RESONATORS; MICROWAVE CAVITY; NANOMECHANICAL RESONATORS; RESONANCE FREQUENCY SHIFT; TRANSMISSION SPECTRUMS;

FOUR WAVE MIXING;

EID: 84901821845     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.22.013773     Document Type: Article

References (52)

1. K. C. Schwab and M. L. Roukes, "Putting mechanics into quantum mechanics," Phys. Today 58, 36-42 (2005).
2. J. L. Arlett, E. B. Myers, and M.L. Roukes, "Comparative advantages of mechanical biosensors," Nature Nanotech. 6, 203-215 (2011).
3. K. L. Ekinci, Y. T. Tang, and M. L. Roukes, "Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems," J. Appl. Phys. 95, 2682-2689 (2004).
4. N. V. Lavrik and P. G. Datskos, "Femtogram mass detection using photothermally actuated nanomechanical resonators," Appl. Phys. Lett. 82, 2697-2699 (2003).
5. B. Ilic, H. G. Craighead, S. Krylov, W. Senaratne, C. Ober, and P. Neuzil, "Attogram detection using nanoelectromechanical oscillators," J. Appl. Phys. 95, 3694-3703 (2004).
6. Y. T. Yang, C. Callegari, X. L. Feng, K. L. Ekinci, and M. L. Roukes, "Zeptogram-scale nanomechanical mass sensing," Nano Lett. 6, 583-586 (2006).
7. J. Chaste, A. Eichler, J. Moser, G. Ceballos, R. Rurali, and A. Bachtold, "A nanomechanical mass sensor with yoctogram resolution," Nature Nanotech. 7, 301-304 (2012).
8. A. Gupta, D. Akin, and R. Bashir, "Single virus particle mass detection using microresonators with nanoscale thickness," Appl. Phys. Lett. 84, 1976-1978 (2004).
9. M. Li, H. X. Tang, and M. L. Roukes, "Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications," Nature Nanotech. 2, 114-120 (2007).
10. X. L. Feng, R. He, P. D. Yang, and M. L. Roukes, "Very high frequency silicon nanowire electromechanical resonators," Nano Lett. 7, 1953-1959 (2007).
11. A. K. Naik, M. S. Hanay, W. K. Hiebert, X. L. Feng, and M. L. Roukes, "Towards single-molecule nanomechanical mass spectrometry," Nature Nanotech. 4, 445-450 (2009).
12. E. Gil-Santos, D. Ramos, J. Martínez, M. Fernández- Regúlez, R. García, Á. S. Paulo, M. Calleja, and J. Tamayo, "Nanomechanical mass sensing and stiffness spectrometry based on two-dimensional vibrations of resonant nanowires," Nature Nanotech. 5, 641-645 (2010).
13. T. P. Burg, M. Godin, S. M. Knudsen,W. Shen, G. Carlson, J. S. Foster, K. Babcock, and S. R. Manalis, "Weighing of biomolecules, single cells and single nanoparticles in fluid," Nature (London) 446, 1066-1069 (2007).
14. S. Olcuma, N. Cermak, S. C.Wasserman, K. S. Christine, H. Atsumi, K. R. Payer,W. Shen, J. Lee, A. M. Belcher, S. N. Bhati, and S. R. Manalis, "Weighing nanoparticles in solution at the attogram scale," Proc. Natl. Acd. Sci. U.S.A. 111, 1310-1315 (2014).
15. B. Lassagne, D. Garcia-Sanchez, A. Aguasca, and A. Bachtold, "Ultrasensitive mass sensing with a nanotube electromechanical resonator," Nano Lett. 8, 3735-3738 (2008).
16. K. Jensen, K. Kim, and A. Zettl, "An atomic-resolution nanomechanical mass sensor," Nature Nanotech. 3, 533-537 (2008).
17. F. Liu and M. Hossein-Zadeh, "Mass sensing with optomechanical oscillation," IEEE Sensors 13, 146-147 (2013).
18. F. Liu, S. Alaie, Z. C. Leseman, and M. Hossein-Zadeh, "Sub-pg mass sensing and measurement with an optomechanical oscillator," Opt. Express 21, 19555-19567 (2013).
19. L. Shao, X.-F. Jiang, X.-C. Yu, B.-B. Li, W. R. Clements, F. Vollmer, W. Wang, Y.-F. Xiao, and Q. Gong, "Detection of single nanoparticles and lentiviruses using microcavity resonance broadening," Adv. Mater. 25 (39), 5616-5620 (2013).
20. J.-J. Li and K.-D. Zhu, "Nonlinear optical mass sensor with an optomechanical microresonator," Appl. Phys. Lett. 101, 141905 (2012).
21. J.-J. Li and K.-D. Zhu, "All-optical mass sensing with coupled mechanical resonator systems," Phys. Rep. 525, 223-254 (2013).
22. T. J. Kippenberg and K. J. Vahala, "Cavity optomechanics: back-action at the mesoscale," Science 321, 1172-1176 (2008).
23. F. Marquardt and S. M. Girvin, "Optomechanics," Physics 2, 40 (2009).
24. M. Aspelmeyer, P. Meystre, and K. Schwab, "Quantum optomechanics," Phys. Today 65, 29-35 (2012).
25. S. Gröblacher, K. Hammerer, M. R. Vanner, and M. Aspelmeyer, "Observation of strong coupling between a micromechanical resonator and an optical cavity field," Nature (London) 460, 724-727 (2009).
26. S. Weis, R. Rivière, S. Deléglise, E. Gavartin, O. Arcizet, A. Schliesser, and T. J. Kippenberg, "Optomechanically induced transparency," Science 330, 1520-1523 (2010).
27. A. H. Safavi-Naeini, T. P. Mayer Alegre, J. Chan, M. Eichenfield, M. Winger, Q. Lin, J. T.Hill, D. E. Chang, and O. Painter, " Electromagnetically induced transparency and slow light with optomechanics," Nature (London) 472, 69-73 (2011).
28. J. D. Teufel, D. Li, M. S. Allman, K. Cicak, A. J. Sirois, J. D. Whittaker, and R. W. Simmonds, "Circuit cavity electromechanics in the strong-coupling regime," Nature (London) 471, 204-208 (2011).
29. O. Arcizet, P.-F. Cohadon, T. Briant, M. Pinard, A. Heidmann, J.-M. Mackowski, C. Michel, L. Pinard, O. Francais, and L. Rousseau, "High-sensitivity optical monitoring of a micromechanical resonator with a quantumlimited optomechanical sensor," Phys. Rev. Lett. 97, 133601 (2006).
30. J. D. Teufel, T. Donner, M. A. Castellanos-Beltran, J. W. Harlow, and K. W. Lehnert, "Nanomechanical motion measured with an imprecision below that at the standard quantum limit," Nature Nanotech. 4, 820-823 (2009).
31. J. D. Teufel, T. Donner, D. Li, J. W. Harlow, M. S. Allman, K. Cicak, A. J. Sirois, J. D. Whittaker, K. W. Lehnert, and R. W. Simmonds, "Sideband cooling of micromechanical motion to the quantum ground state," Nature (London) 475, 359-363 (2011).
32. J. Chan, T. P. Alegre, A. H. Safavi-Naeini, J. T. Hill, A. Krause, S. Gröblacher, M. Aspelmeyer, and O. Painter, "Laser cooling of a nanomechanical oscillator into its quantum ground state," Nature (London) 478, 89-92 (2011).
33. E. Verhagen, S. Deléglise, S. Weis, A. Schliesser, and T. J. Kippenberg, "Quantum-coherent coupling of a mechanical oscillator to an optical cavity mode," Nature (London) 482, 63-67 (2012).
34. T. A. Palomaki, J.W. Harlow, J. D. Teufel, R.W. Simmonds, and K.W. Lehnert, "Coherent state transfer between itinerant microwave fields and a mechanical oscillator," Nature (London) 495, 210-214 (2013).
35. R. W. Andrews, R. W. Peterson, T. P. Purdy, K. Cicak, R. W. Simmonds, C. A. Regal, and K. W. Lehnert, "Bidirectional and efficient conversion between microwave and optical light," Nature Phys. 10, 321-326 (2014).
36. C. A. Regal and K. W. Lehnert, "From cavity electromechanics to cavity optomechanics," J. Phys. Conf. Ser. 264, 012025 (2011).
37. X.-Y. Lü, W.-M. Zhang, S. Ashhab, Y. Wu, and F. Nori, "Quantum-criticality-induced strong Kerr nonlinearities in optomechanical systems," Sci. Rep. 3, 2943 (2013).
38. K. N. Qu and G. S. Agarwal, "Phonon-mediated electromagnetically induced absorption in hybrid optoelectromechanical systems," Phys. Rev. A 87, 031802(R) (2013).
39. J. D. Thompson, B. M. Zwickl, A. M. Jayich, Florian Marquardt, S. M. Girvin, and J. G. E. Harris, "Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane," Nature (London) 452, 72-75 (2008).
40. C. Genes, D. Vitali, P. Tombesi, S. Gigan, and M. Aspelmeyer, "Ground-state cooling of a micromechanical oscillator: Comparing cold damping and cavity-assisted cooling schemes," Phys. Rev. A 77, 033804 (2008).
41. H. Xiong, L.-G. Si, A.-S. Zheng, X. X. Yang, and Y. Wu, "Higher-order sidebands in optomechanically induced transparency," Phys. Rev. A 86, 013815 (2012).
42. R. W. Boyd Nonlinear Optics (Academic, 2008).
43. C. W. Gardiner and P. Zoller Quantum Noise (Springer) (2004).
44. T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, "Kerr- nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity," Phys. Rev. Lett. 93, 083904 (2004).
45. S. Huang and G. S. Agarwal, "Normal-mode splitting and antibunching in Stokes and anti-Stokes processes in cavity optomechanics: Radiation-pressure-induced four-wave-mixing cavity optomechanics," Phys. Rev. A 81, 033830 (2010).
46. B. Ilic, Y. Yang, and H. G. Craighead, "Virus detection using nanoelectromechanical devices," Appl. Phys. Lett. 85, 2604-2606 (2004).
47. X. Sun, J. Zheng, M. Poot, C.W.Wong, and H. X. Tang, "Femtogram doubly clamped nanomechanical resonators embedded in a high-Q two-dimensional photonic crystal nanocavity," Nano Lett. 12, 2299 (2012).
48. J. Zheng, X. Sun, M. Poot, Y. Li, A. Dadgar, H. X. Tang, and C.W.Wong, "Dispersive coupling and optimization of femtogram L3-nanobeam optomechanical cavities," Frontiers in Optics (2012).
49. J. Zheng, X. Sun, Y. Li, M. Poot, A. Dadgar, N. N. Shi, W. H. P. Pernice, H. X. Tang, and C. W. Wong, "Femtogram dispersive L3-nanobeam optomechanical cavities: design and experimental comparison," Opt. Express 20, 26486-26498 (2012).
50. A. Boisen, "Nanoelectromechanical systems: Mass spec goes nanomechanical," Nature Nanotech. 4, 404-405 (2009).
51. Z. Yie, M. A. Zielke, C. B. Burgner, and K. L. Turner, "Comparison of parametric and linear mass detection in the presence of detection noise," J. Micromech. Microeng. 21, 025027 (2011).
52. A. N. Cleland and M. L. Roukes, "Noise processes in nanomechanical resonators," J. Appl. Phys. 92, 2758-2769 (2002).