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Volumn 21, Issue 17, 2013, Pages 19555-19567

Sub-pg mass sensing and measurement with an optomechanical oscillator

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC EXCITATION; HIGH QUALITY FACTORS; MECHANICAL DEFORMATION; MECHANICAL OSCILLATIONS; MECHANICAL OSCILLATORS; OPTICAL MICRORESONATORS; PRECISE MONITORING; STRONG INTERACTION;

EID: 84883208582     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.21.019555     Document Type: Article
Times cited : (138)

References (38)
  • 3
    • 34748835764 scopus 로고    scopus 로고
    • Micro- and nanomechanical sensors for environmental, chemical, and biological detection
    • P. S. Waggoner and H. G. Craighead, "Micro- and nanomechanical sensors for environmental, chemical, and biological detection," Lab Chip 7(10), 1238-1255 (2007).
    • (2007) Lab Chip , vol.7 , Issue.10 , pp. 1238-1255
    • Waggoner, P.S.1    Craighead, H.G.2
  • 4
    • 3843119792 scopus 로고    scopus 로고
    • Cantilever transducers as a platform for chemical and biological sensors
    • N. V. Lavrik, M. J. Sepaniak, and P. G. Datskos, "Cantilever transducers as a platform for chemical and biological sensors," Rev. Sci. Instrum. 75(7), 2229-2253 (2004).
    • (2004) Rev. Sci. Instrum. , vol.75 , Issue.7 , pp. 2229-2253
    • Lavrik, N.V.1    Sepaniak, M.J.2    Datskos, P.G.3
  • 5
    • 0037545846 scopus 로고    scopus 로고
    • Femtogram mass detection using photothermally actuated nanomechanical resonators
    • N. V. Lavrik and P. G. Datskos, "Femtogram mass detection using photothermally actuated nanomechanical resonators," Appl. Phys. Lett. 82(16), 2697-2699 (2003).
    • (2003) Appl. Phys. Lett. , vol.82 , Issue.16 , pp. 2697-2699
    • Lavrik, N.V.1    Datskos, P.G.2
  • 6
    • 79953646974 scopus 로고    scopus 로고
    • Ultrasensitive bulk disk microresonator-based sensor for distributed mass sensing
    • 045016
    • A. Cagliani and Z. J. Davis, "Ultrasensitive bulk disk microresonator-based sensor for distributed mass sensing," J. Micromech. Microeng. 21(045016), 1-6 (2011).
    • (2011) J. Micromech. Microeng. , vol.21 , pp. 1-6
    • Cagliani, A.1    Davis, Z.J.2
  • 8
    • 33846876588 scopus 로고    scopus 로고
    • Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications
    • M. Li, H. X. Tang, and M. L. Roukes, "Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications," Nat. Nanotechnol. 2(2), 114-120 (2007).
    • (2007) Nat. Nanotechnol. , vol.2 , Issue.2 , pp. 114-120
    • Li, M.1    Tang, H.X.2    Roukes, M.L.3
  • 10
    • 79959667845 scopus 로고    scopus 로고
    • Resonant cantilever sensors operated in a high-Q in-plane mode for real-time bio/chemical detection in liquids
    • Y. H. Tao, X. X. Li, T. G. Xu, H. T. Yu, P. C. Xu, B. Xiong, and C. Z. Wei, "Resonant cantilever sensors operated in a high-Q in-plane mode for real-time bio/chemical detection in liquids," Sens. Actuators B Chem. 157(2), 606-614 (2011).
    • (2011) Sens. Actuators B Chem. , vol.157 , Issue.2 , pp. 606-614
    • Tao, Y.H.1    Li, X.X.2    Xu, T.G.3    Yu, H.T.4    Xu, P.C.5    Xiong, B.6    Wei, C.Z.7
  • 11
    • 33745831898 scopus 로고    scopus 로고
    • A self-excited micro cantilever biosensor actuated by PZT using the mass micro balancing technique
    • Y. Lee, G. Lim, and W. Moon, "A self-excited micro cantilever biosensor actuated by PZT using the mass micro balancing technique," Sens. Actuators A Phys. 130-131, 105-110 (2006).
    • (2006) Sens. Actuators A Phys. , vol.130-131 , pp. 105-110
    • Lee, Y.1    Lim, G.2    Moon, W.3
  • 12
    • 0036470714 scopus 로고    scopus 로고
    • Effect of length, width, and mode on the mass detection sensitivity of piezoelectric unimorph cantilevers
    • J. W. Yi, W. Y. Shih, and W.-H. Shih, "Effect of length, width, and mode on the mass detection sensitivity of piezoelectric unimorph cantilevers," J. Appl. Phys. 91(3), 1680-1686 (2002).
    • (2002) J. Appl. Phys. , vol.91 , Issue.3 , pp. 1680-1686
    • Yi, J.W.1    Shih, W.Y.2    Shih, W.-H.3
  • 13
    • 84872296105 scopus 로고    scopus 로고
    • Mass sensing with optomechanical oscillation
    • F. Liu and M. Hossein-Zadeh, "Mass Sensing with Optomechanical Oscillation," IEEE Sensors 13(1), 146-147 (2013).
    • (2013) IEEE Sensors , vol.13 , Issue.1 , pp. 146-147
    • Liu, F.1    Hossein-Zadeh, M.2
  • 14
    • 37149049283 scopus 로고    scopus 로고
    • Cavity opto-mechanics
    • T. J. Kippenberg and K. J. Vahala, "Cavity Opto-Mechanics," Opt. Express 15(25), 17172-17205 (2007).
    • (2007) Opt. Express , vol.15 , Issue.25 , pp. 17172-17205
    • Kippenberg, T.J.1    Vahala, K.J.2
  • 15
    • 22744456445 scopus 로고    scopus 로고
    • Radiation-pressure-driven micro-mechanical oscillator
    • H. Rokhsari, T. J. Kippenberg, T. Carmon, and K. J. Vahala, "Radiation-pressure-driven micro-mechanical oscillator," Opt. Express 13(14), 5293-5301 (2005).
    • (2005) Opt. Express , vol.13 , Issue.14 , pp. 5293-5301
    • Rokhsari, H.1    Kippenberg, T.J.2    Carmon, T.3    Vahala, K.J.4
  • 16
    • 33747708725 scopus 로고    scopus 로고
    • Characterization of a radiation-pressure-driven micromechanical oscillator
    • M. Hossein-Zadeh, H. Rokhsari, A. Hajimiri, and K. J. Vahala, "Characterization of a radiation-pressure-driven micromechanical oscillator," Phys. Rev. A 74(2), 023813 (2006).
    • (2006) Phys. Rev. A , vol.74 , Issue.2 , pp. 023813
    • Hossein-Zadeh, M.1    Rokhsari, H.2    Hajimiri, A.3    Vahala, K.J.4
  • 17
    • 32944462709 scopus 로고    scopus 로고
    • Theoretical and Experimental Study of Radiation Pressure-Induced Mechanical Oscillations (Parametric Instability) in Optical Microcavities
    • H. Rokhsari, T. J. Kippenberg, T. Carmon, and K. J. Vahala, "Theoretical and Experimental Study of Radiation Pressure-Induced Mechanical Oscillations (Parametric Instability) in Optical Microcavities," IEEE J. Sel. Top. Quantum Electron. 12(1), 96-107 (2006).
    • (2006) IEEE J. Sel. Top. Quantum Electron. , vol.12 , Issue.1 , pp. 96-107
    • Rokhsari, H.1    Kippenberg, T.J.2    Carmon, T.3    Vahala, K.J.4
  • 19
    • 33846110412 scopus 로고    scopus 로고
    • Brownian noise in radiation-pressure-driven micromechanical oscillators
    • H. Rokhsari, M. Hossein-Zadeh, A. Hajimiri, and K. J. Vahala, "Brownian noise in radiation-pressure-driven micromechanical oscillators," Appl. Phys. Lett. 89(6), 261109 (2006).
    • (2006) Appl. Phys. Lett. , vol.89 , Issue.6 , pp. 261109
    • Rokhsari, H.1    Hossein-Zadeh, M.2    Hajimiri, A.3    Vahala, K.J.4
  • 20
    • 46249089703 scopus 로고    scopus 로고
    • Whispering-gallery-mode biosensing: Label-free detection down to single molecules
    • F. Vollmer and S. Arnold, "Whispering-gallery-mode biosensing: label-free detection down to single molecules," Nat. Methods 5(7), 591-596 (2008).
    • (2008) Nat. Methods , vol.5 , Issue.7 , pp. 591-596
    • Vollmer, F.1    Arnold, S.2
  • 21
    • 84863738774 scopus 로고    scopus 로고
    • High-frequency silicon optomechanical oscillator with an ultralow threshold
    • W. C. Jiang, X. Y. Lu, J. D. Zhang, and Q. Lin, "High-frequency silicon optomechanical oscillator with an ultralow threshold," Opt. Express 20(14), 15991-15996 (2012).
    • (2012) Opt. Express , vol.20 , Issue.14 , pp. 15991-15996
    • Jiang, W.C.1    Lu, X.Y.2    Zhang, J.D.3    Lin, Q.4
  • 22
    • 82155195429 scopus 로고    scopus 로고
    • A monolithic radiation-pressure driven, low phase noise silicon nitride opto-mechanical oscillator
    • S. Tallur, S. Sridaran, and S. A. Bhave, "A monolithic radiation-pressure driven, low phase noise silicon nitride opto-mechanical oscillator," Opt. Express 19(24), 24522-24529 (2011).
    • (2011) Opt. Express , vol.19 , Issue.24 , pp. 24522-24529
    • Tallur, S.1    Sridaran, S.2    Bhave, S.A.3
  • 23
    • 67349158605 scopus 로고    scopus 로고
    • A picogram- and nanometre-scale photoniccrystal optomechanical cavity
    • M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, "A picogram- and nanometre-scale photoniccrystal optomechanical cavity," Nature 459(7246), 550-555 (2009).
    • (2009) Nature , vol.459 , Issue.7246 , pp. 550-555
    • Eichenfield, M.1    Camacho, R.2    Chan, J.3    Vahala, K.J.4    Painter, O.5
  • 24
    • 78649276604 scopus 로고    scopus 로고
    • Ultra-high-frequency nano-optomechanical resonators in slot waveguide ring cavities
    • M. Li, W. H. P. Pernice, and H. X. Tang, "Ultra-high-frequency nano-optomechanical resonators in slot waveguide ring cavities," Appl. Phys. Lett. 97(18), 183110 (2010).
    • (2010) Appl. Phys. Lett. , vol.97 , Issue.18 , pp. 183110
    • Li, M.1    Pernice, W.H.P.2    Tang, H.X.3
  • 25
    • 80054917323 scopus 로고    scopus 로고
    • Integrated waveguide-DBR microcavity opto-mechanical system
    • M. W. Pruessner, T. H. Stievater, J. B. Khurgin, and W. S. Rabinovich, "Integrated waveguide-DBR microcavity opto-mechanical system," Opt. Express 19(22), 21904-21918 (2011).
    • (2011) Opt. Express , vol.19 , Issue.22 , pp. 21904-21918
    • Pruessner, M.W.1    Stievater, T.H.2    Khurgin, J.B.3    Rabinovich, W.S.4
  • 26
    • 54249136894 scopus 로고    scopus 로고
    • High-sensitivity monitoring of micromechanical vibration using optical whispering gallery mode resonators
    • A. Schliesser, G. Anetsberger, R. Riviere, O. Arcizet, and T. J. Kippenberg, "High-sensitivity monitoring of micromechanical vibration using optical whispering gallery mode resonators," New J. Phys. 10(9), 095015 (2008).
    • (2008) New J. Phys. , vol.10 , Issue.9 , pp. 095015
    • Schliesser, A.1    Anetsberger, G.2    Riviere, R.3    Arcizet, O.4    Kippenberg, T.J.5
  • 27
    • 0037468209 scopus 로고    scopus 로고
    • Ultra-high-Q toroid microcavity on a chip
    • D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, "Ultra-high-Q toroid microcavity on a chip," Nature 421(6926), 925-928 (2003).
    • (2003) Nature , vol.421 , Issue.6926 , pp. 925-928
    • Armani, D.K.1    Kippenberg, T.J.2    Spillane, S.M.3    Vahala, K.J.4
  • 28
    • 84875655760 scopus 로고    scopus 로고
    • On the spectrum of the radiation-pressure-driven optomechanical oscillator and its application in sensing
    • F. Liu and M. Hossein-Zadeh, "On the spectrum of the radiation-pressure-driven optomechanical oscillator and its application in sensing," Opt. Commun. 294, 338-343 (2013).
    • (2013) Opt. Commun. , vol.294 , pp. 338-343
    • Liu, F.1    Hossein-Zadeh, M.2
  • 29
    • 36048999842 scopus 로고    scopus 로고
    • Mass and position determination of attached particles on cantilever based mass sensors
    • S. Dohn, W. Svendsen, A. Boisen, and O. Hansen, "Mass and position determination of attached particles on cantilever based mass sensors," Rev. Sci. Instrum. 78(10), 103303 (2007).
    • (2007) Rev. Sci. Instrum. , vol.78 , Issue.10 , pp. 103303
    • Dohn, S.1    Svendsen, W.2    Boisen, A.3    Hansen, O.4
  • 30
    • 21244440321 scopus 로고    scopus 로고
    • Enhanced functionality of cantilever based mass sensors using higher modes
    • S. Dohn, R. Sandberg, W. Svendsen, and A. Boisen, "Enhanced functionality of cantilever based mass sensors using higher modes," Appl. Phys. Lett. 86(23), 233501 (2005).
    • (2005) Appl. Phys. Lett. , vol.86 , Issue.23 , pp. 233501
    • Dohn, S.1    Sandberg, R.2    Svendsen, W.3    Boisen, A.4
  • 31
    • 0001280373 scopus 로고    scopus 로고
    • Cryogenic optical resonators: A new tool for laser frequency stabilization at the 1 Hz level
    • S. Seel, R. Storz, G. Ruoso, J. Mlynek, and S. Schiller, "Cryogenic Optical Resonators: A New Tool for Laser Frequency Stabilization at the 1 Hz Level," Phys. Rev. Lett. 78(25), 4741-4744 (1997).
    • (1997) Phys. Rev. Lett. , vol.78 , Issue.25 , pp. 4741-4744
    • Seel, S.1    Storz, R.2    Ruoso, G.3    Mlynek, J.4    Schiller, S.5
  • 32
    • 0019286881 scopus 로고
    • Laser frequency stabilization by polarization spectroscopy of a reflecting reference cavity
    • T. W. Hansch and B. Couillaud, "Laser Frequency Stabilization by Polarization Spectroscopy of a Reflecting Reference Cavity," Opt. Commun. 35(3), 441-444 (1980).
    • (1980) Opt. Commun. , vol.35 , Issue.3 , pp. 441-444
    • Hansch, T.W.1    Couillaud, B.2
  • 34
    • 84883233280 scopus 로고    scopus 로고
    • Brillouin cavity optomechanics with microfluidic devices
    • G. Bahl, K.-H. Kim, W. Lee, J. Liu, X. Fan, and T. Carmon, "Brillouin cavity optomechanics with microfluidic devices," Nat Commun 4, 1994 (2013).
    • (2013) Nat Commun , vol.4 , pp. 1994
    • Bahl, G.1    Kim, K.-H.2    Lee, W.3    Liu, J.4    Fan, X.5    Carmon, T.6
  • 36
    • 7544230375 scopus 로고    scopus 로고
    • Virus detection using nanoelectromechanical devices
    • B. Ilic, Y. Yang, and H. G. Craighead, "Virus detection using nanoelectromechanical devices," Appl. Phys. Lett. 85(13), 2604-2606 (2004).
    • (2004) Appl. Phys. Lett. , vol.85 , Issue.13 , pp. 2604-2606
    • Ilic, B.1    Yang, Y.2    Craighead, H.G.3
  • 37
    • 27944502014 scopus 로고    scopus 로고
    • Effect of gold coating on the Q-factor of a resonant cantilever
    • R. Sandberg, K. Molhave, A. Boisen, and W. Svendsen, "Effect of gold coating on the Q-factor of a resonant cantilever," J. Micromech. Microeng. 15(12), 2249-2253 (2005).
    • (2005) J. Micromech. Microeng. , vol.15 , Issue.12 , pp. 2249-2253
    • Sandberg, R.1    Molhave, K.2    Boisen, A.3    Svendsen, W.4
  • 38
    • 77949880813 scopus 로고    scopus 로고
    • Dynamic range enhancement of nonlinear nanomechanical resonant cantilevers for highly sensitive NEMS gas/mass sensor applications
    • N. Kacem, J. Arcamone, F. Perez-Murano, and S. Hentz, "Dynamic range enhancement of nonlinear nanomechanical resonant cantilevers for highly sensitive NEMS gas/mass sensor applications," J. Micromech. Microeng. 20(4), 045023 (2010).
    • (2010) J. Micromech. Microeng. , vol.20 , Issue.4 , pp. 045023
    • Kacem, N.1    Arcamone, J.2    Perez-Murano, F.3    Hentz, S.4


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