Femtogram dispersive L3-nanobeam optomechanical cavities: Design and experimental comparison

Optics Express

Volumn 20, Issue 24, 2012, Pages 26486-26498

  Zheng, Jiangjun ^a   Sun, Xiankai ^b   Li, Ying ^a   Poot, Menno ^b   Dadgar, Ali ^a   Shi, Norman Nan ^a   Pernice, Wolfram H P ^b   Tang, Hong X ^b   Wong, Chee Wei ^a  

^a Och Spine at New York Presbyterian Hospitals   (United States)

^b Yale University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR SLOT; COUPLING RATE; EXPERIMENTAL COMPARISON; MECHANICAL FREQUENCY; MODAL MASS; OPTICAL QUALITY FACTOR; OPTOMECHANICAL; PHOTONIC CRYSTAL CAVITIES; SILICON PHOTONIC CRYSTALS; ULTRA-SMALL; ULTRASENSITIVE SENSORS;

OPTICAL RESONATORS;

NANOWIRES;

SILICON;

ARTICLE; COMPARATIVE STUDY; COMPUTER AIDED DESIGN; CRYSTALLIZATION; EQUIPMENT; EQUIPMENT DESIGN; HUMAN; NANOTECHNOLOGY; OPTICS; PHOTON;

COMPUTER-AIDED DESIGN; CRYSTALLIZATION; EQUIPMENT DESIGN; HUMANS; NANOTECHNOLOGY; OPTICS AND PHOTONICS; PHOTONS; SILICON;

EID: 84870610988     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.026486     Document Type: Conference Paper

References (54)

1. T. J. Kippenberg and K. J. Vahala, "Cavity optomechanics: back-action at the mesoscale", Science 321(5893), 1172-1176 (2008).
2. I. Favero and K. Karrai, "Optomechanics of deformable optical devices", Nat. Photonics 3(4), 201-205 (2009).
3. D. Van Thourhout and J. Roels, "Optomechanical device actuation through the optical gradient force", Nat. Photonics 4(4), 211-217 (2010).
4. F. Marquardt, "Optomechanics: push towards the quantum limit", Nat. Phys. 4(7), 513-514 (2008).
5. E. Verhagen, S. Deléglise, S. Weis, A. Schliesser, and T. J. Kippenberg, "Quantum-coherent coupling of a mechanical oscillator to an optical cavity mode", Nature 482(7383), 63-67 (2012).
6. J. Chan, T. P. M. Alegre, A. H. Safavi-Naeini, J. T. Hill, A. Krause, S. Gröblacher, M. Aspelmeyer, and O. Painter, "Laser cooling of a nanomechanical oscillator into its quantum ground state", Nature 478(7367), 89-92 (2011).
7. J. D. Teufel, T. Donner, D. Li, J. W. Harlow, M. S. Allman, K. Cicak, A. J. Sirois, J. D. Whittaker, K. W. Lehnert, and R. W. Simmonds, "Sideband cooling of micromechanical motion to the quantum ground state", Nature 475(7356), 359-363 (2011).
8. J. C. Sankey, C. Yang, B. M. Zwickl, A. M. Jayich, and J. G. E. Harris, "Strong and tunable nonlinear optomechanical coupling in a low-loss system", Nat. Phys. 6(9), 707-712 (2010).
9. A. D. O'Connell, M. Hofheinz, M. Ansmann, R. C. Bialczak, M. Lenander, E. Lucero, M. Neeley, D. Sank, H. Wang, M. Weides, J. Wenner, J. M. Martinis, and A. N. Cleland, "Quantum ground state and single-phonon control of a mechanical resonator", Nature 464(7289), 697-703 (2010).
10. Y.-S. Park and H. Wang, "Resolved-sideband and cryogenic cooling of an optomechanical resonator", Nat. Phys. 5(7), 489-493 (2009).
11. S. Gröblacher, J. B. Hertzberg, M. R. Vanner, G. D. Cole, S. Gigan, K. C. Schwab, and M. Aspelmeyer, "Demonstration of an ultracold micro-optomechanical oscillator in a cryogenic cavity", Nat. Phys. 5(7), 485-488 (2009).
12. A. Schliesser, R. Rivière, G. Anetsberger, O. Arcizet, and T. J. Kippenberg, "Resolved-sideband cooling of a micromechanical oscillator", Nat. Phys. 4(5), 415-419 (2008).
13. I. Wilson-Rae, P. Zoller, and A. Imamoǧlu, "Laser cooling of a nanomechanical resonator mode to its quantum ground state", Phys. Rev. Lett. 92(7), 075507 (2004).
14. S. Weis, R. Rivière, S. Deléglise, E. Gavartin, O. Arcizet, A. Schliesser, and T. J. Kippenberg, "Optomechanically induced transparency", Science 330(6010), 1520-1523 (2010).
15. A. H. Safavi-Naeini, T. P. Mayer Alegre, J. Chan, M. Eichenfield, M. Winger, Q. Lin, J. T. Hill, D. E. Chang, and O. Painter, " Electromagnetically induced transparency and slow light with optomechanics", Nature 472(7341), 69-73 (2011).
16. G. Bahl, M. Tomes, F. Marquardt, and T. Carmon, "Observation of spontaneous Brillouin cooling", Nat. Phys. 8(3), 203-207 (2012).
17. C. A. Regal, J. D. Teufel, and K. W. Lehnert, "Measuring nanomechanical motion with a resonant microwave cavity interferometer", Nat. Phys. 4(7), 555-560 (2008).
18. V. Fiore, Y. Yang, M. C. Kuzyk, R. Barbour, L. Tian, and H. Wang, "Storing optical information as a mechanical excitation in a silica optomechanical resonator", Phys. Rev. Lett. 107(13), 133601 (2011).
19. G. Anetsberger, E. Gavartin, O. Arcizet, Q. P. Unterreithmeier, E. M. Weig, M. L. Gorodetsky, J. P. Kotthaus, and T. J. Kippenberg, "Measuring nanomechanical motion with an imprecision far below the standard quantum limit", Phys. Rev. A 82, 061804 (R) (2010).
20. G. Khitrova, H. M. Gibbs, M. Kira, S. W. Koch, and A. Scherer, "Vacuum Rabi splitting in semiconductors", Nat. Phys. 2(2), 81-90 (2006). (Pubitemid 43731376)
21. I. Fushman, D. Englund, A. Faraon, N. Stoltz, P. Petroff, and J. Vuckovic, "Controlled phase shifts with a single quantum dot", Science 320(5877), 769-772 (2008). (Pubitemid 351929621)
22. P. Colman, C. Husko, S. Combrie, I. Sagnes, C. W. Wong, and A. De Rossi, "Temporal solitons and pulse compression in photonic crystal waveguides", Nat. Photonics 4(12), 862-868 (2010).
23. J. F. McMillan, M. Yu, D.-L. Kwong, and C. W. Wong, "Observation of four-wave mixing in slow-light silicon photonic crystal waveguides", Opt. Express 18(15), 15484-15497 (2010).
24. J. F. McMillan, M. Yu, D.-L. Kwong, and C. W. Wong, "Observations of spontaneous Raman scattering in silicon slow-light photonic crystal waveguides", Appl. Phys. Lett. 93(25), 251105 (2008).
25. M. Notomi, H. Taniyama, S. Mitsugi, and E. Kuramochi, "Optomechanical wavelength and energy conversion in high-Q double-layer cavities of photonic crystal slabs", Phys. Rev. Lett. 97(2), 023903 (2006).
26. Y. Li, J. Zheng, J. Gao, J. Shu, M. S. Aras, and C. W. Wong, "Design of dispersive optomechanical coupling and cooling in ultrahigh-Q/V slot-type photonic crystal cavities", Opt. Express 18(23), 23844-23856 (2010).
27. M. Li, W. H. P. Pernice, C. Xiong, T. Baehr-Jones, M. Hochberg, and H. X. Tang, "Harnessing optical forces in integrated photonic circuits", Nature 456(7221), 480-484 (2008). (Pubitemid 352759015)
28. M. Bagheri, M. Poot, M. Li, W. P. H. Pernice, and H. X. Tang, "Dynamic manipulation of nanomechanical resonators in the high-amplitude regime and non-volatile mechanical memory operation", Nat. Nanotechnol. 6(11), 726-732 (2011).
29. G. S. Wiederhecker, L. Chen, A. Gondarenko, and M. Lipson, "Controlling photonic structures using optical forces", Nature 462(7273), 633-636 (2009).
30. M. Eichenfield, R. Camacho, J. Chan, K. J. Vahala, and O. Painter, "A picogram-and nanometre-scale photoniccrystal optomechanical cavity", Nature 459(7246), 550-555 (2009).
31. J. Zheng, Y. Li, M. S. Aras, A. Stein, K. L. Shepard, and C. W. Wong, "Parametric optomechanical oscillations in two-dimensional slot-type high-Q photonic crystal cavities", Appl. Phys. Lett. 100(21), 211908 (2012).
32. A. H. Safavi-Naeini, T. P. M. Alegre, M. Winger, and O. Painter, "Optomechanics in an ultrahigh-Q two-dimensional photonic crystal cavity", Appl. Phys. Lett. 97(18), 181106 (2010).
33. E. Gavartin, R. Braive, I. Sagnes, O. Arcizet, A. Beveratos, T. J. Kippenberg, and I. Robert-Philip, "Optomechanical coupling in a two-dimensional photonic crystal defect cavity", Phys. Rev. Lett. 106(20), 203902 (2011).
34. X. Sun, J. Zheng, M. Poot, C. W. Wong, and H. X. Tang, "Femtogram doubly clamped nanomechanical resonators embedded in a high-Q two-dimensional photonic crystal nanocavity", Nano Lett. 12(5), 2299-2305(2012), doi:10.1021/nl300142t
35. D. Bindel and S. Govindjee, "Elastic PMLs for resonator anchor loss simulation", Tech report UCB/SEMM-2005/01.
36. U. Basu and A. K. Chopra, "Perfectly matched layers for time-harmonic elastodynamics of unbounded domains: theory and finite-element implementation", Comput. Methods Appl. Mech. Eng. 192(11-12), 1337-1375 (2003). (Pubitemid 36333625)
37. A. K. Naik, M. S. Hanay, W. K. Hiebert, X. L. Feng, and M. L. Roukes, "Towards single-molecule nanomechanical mass spectrometry", Nat. Nanotechnol. 4(7), 445-450 (2009).
38. M. Li, H. X. Tang, and M. L. Roukes, "Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications", Nat. Nanotechnol. 2(2), 114-120 (2007). (Pubitemid 46226371)
39. M. Poot and H. S. J. Van Der Zant, "Mechanical systems in the quantum regime", Phys. Rep. 511(5), 273-335 (2012).
40. Y. Akahane, T. Asano, B.-S. Song, and S. Noda, "Fine-tuned high-Q photonic-crystal nanocavity", Opt. Express 13(4), 1202-1214 (2005). (Pubitemid 40334848)
41. X. Yang, M. Yu, D.-L. Kwong, and C. W. Wong, "All-optical analog to electromagnetically induced transparency in multiple coupled photonic crystal cavities", Phys. Rev. Lett. 102(17), 173902 (2009).
42. T. Asano, B.-S. Song, and S. Noda, "Analysis of the experimental Q factors (∼1 million) of photonic crystal nanocavities", Opt. Express 14(5), 1996-2002 (2006). (Pubitemid 43345406)
43. S. G. Johnson and J. D. Joannopoulos, "Block-iterative frequency-domain methods for Maxwell's equations in a planewave basis", Opt. Express 8(3), 173-190 (2001).
44. J. Gao, J. F. McMillan, M.-C. Wu, J. Zheng, S. Assefa, and C. W. Wong, "Demonstration of an air-slot modegap confined photonic crystal slab nanocavity with ultrasmall mode volumes", Appl. Phys. Lett. 96(5), 051123 (2010).
45. B.-S. Song, T. Asano, Y. Akahane, Y. Tanaka, and S. Noda, "Transmission and reflection characteristics of inplane hetero-photonic crystals", Appl. Phys. Lett. 85(20), 4591-4593 (2004). (Pubitemid 40009632)
46. A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, "MEEP: A flexible free-software package for electromagnetic simulations by the FDTD method", Comput. Phys. Commun. 181(3), 687-702 (2010).
47. K. Srinivasan and O. Painter, "Momentum space design of high-Q photonic crystal optical cavities", Opt. Express 10(15), 670-684 (2002).
48. G. Anetsberger, R. Rivière, A. Schliesser, O. Arcizet, and T. J. Kippenberg, "Ultralow-dissipation optomechanical resonators on a chip", Nat. Photonics 2(10), 627-633 (2008).
49. COMSOL Group, http://www.comsol.com
50. M. Eichenfield, J. Chan, A. H. Safavi-Naeini, K. J. Vahala, and O. Painter, "Modeling dispersive coupling and losses of localized optical and mechanical modes in optomechanical crystals", Opt. Express 17(22), 20078-20098 (2009).
51. S. G. Johnson, M. Ibanescu, M. A. Skorobogatiy, O. Weisberg, J. D. Joannopoulos, and Y. Fink, "Perturbation theory for Maxwell's equations with shifting material boundaries", Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 65(6), 066611 (2002).
52. C. W. Wong, P. T. Rakich, S. G. Johnson, M. Qi, H. I. Smith, E. P. Ippen, L. C. Kimerling, Y. Jeon, G. Barbastathis, and S.-G. Kim, "Strain-tunable silicon photonic band gap microcavities in optical waveguides", Appl. Phys. Lett. 84(8), 1242-1244 (2004).
53. K. Y. Yasumura, T. D. Stowe, E. M. Chow, T. Pfafman, T. W. Kenny, B. C. Stipe, and D. Rugar, "Quality factors in micron-and submicron-thick cantilevers", J. Microelectromech. Syst. 9(1), 117-125 (2000). (Pubitemid 30581703)
54. Y. Takahashi, Y. Tanaka, H. Hagino, T. Sugiya, Y. Sato, T. Asano, and S. Noda, "Design and demonstration of high-Q photonic heterostructure nanocavities suitable for integration", Opt. Express 17(20), 18093-18102 (2009).