A study on Ti-doped ZnO transparent conducting thin films fabricated by pulsed laser deposition

Applied Surface Science

Volumn 305, Issue , 2014, Pages 481-486

  Zhao, Wenda ^a   Zhou, Qianfei ^a   Zhang, Xin ^a   Wu, Xiaojing ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

Pulsed laser deposition; Ti doped ZnO; Transparent conducting oxide

Indexed keywords

CONDUCTIVE FILMS; FABRICATION; II-VI SEMICONDUCTORS; OPTICAL PROPERTIES; OXYGEN; PULSED LASER DEPOSITION; PULSED LASERS; SEMICONDUCTOR DOPING; SUBSTRATES; TITANIUM OXIDES; TRANSPARENT CONDUCTING OXIDES; ZINC OXIDE; ZINC SULFIDE;

CRYSTALLINITIES; ELECTRICAL AND OPTICAL PROPERTIES; GLASS SUBSTRATES; OPTIMIZED DEPOSITION CONDITIONS; PREFERRED ORIENTATIONS; SUBSTRATE TEMPERATURE; TI-DOPED ZNO; WURTZITE STRUCTURE;

THIN FILMS;

EID: 84899947333     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2014.03.119     Document Type: Article

References (24)

1. H. Ma, J.S. Cho, and C.H. Park Surf. Coat. Technol. 153 2002 131 137
2. Z.Y. Ye, H.L. Lu, Y. Geng, Y.Z. Gu, Z.Y. Xie, Y. Zhang, Q.Q. Sun, S.J. Ding, and D.W. Zhang Nanoscale Res. Lett. 8 2013 108
3. T. Minami Thin Solid Films 516 2008 5822 5828
4. N.J. Begum, and K. Ravichandran J. Phys. Chem. Solids 74 2013 841 848
5. G. Kim, J. Bang, Y. Kim, S.K. Rout, and S.I. Woo Appl. Phys. A 97 2009 821 828
6. W. Yang, Z. Liu, D.L. Peng, F. Zhang, H. Huang, Y. Xie, and Z. Wu Appl. Surf. Sci. 255 2009 5669 5673
7. F. Wu, L. Fang, Y.J. Pan, K. Zhou, H.B. Ruan, G.B. Liu, and C.Y. Kong Thin Solid Films 520 2011 703 707
8. M.S. Wang, Y.P. Zhang, H.Y. Yu, Q.H. Li, S.H. Hahn, and E.J. Kim J. Alloys Compd. 561 2013 211 213
9. H.W. Lee, B.G. Choi, K.B. Shim, and Y.J. Oh J. Ceramic Process. Res. 6 2005 52 56
10. S.J. Henley, M.N.R. Ashfold, and D. Cherns Surf. Coat. Technol. 177-178 2004 271 276
11. W.S. Liu, Y.H. Liu, W.K. Chen, and K.P. Hsueh J. Alloys Compd. 564 2013 105 113
12. J.H. Kim, K.J. Lee, J.H. Roh, S.W. Song, J.H. Park, I.H. Yer, and B.M. Moon J. Korean Phys. Soc. 60 2012 2025 2028
13. V.V. Atuchin, V.G. Kesler, N.V. Pervukhina, and Z. Zhang J. Electron Spectrosc. Relat. Phenom. 152 2006 18 24
14. C.H. Hsu, W.S. Chen, C.H. Lai, and S.F. Yan Adv. Mater. Res. 194-196 2011 2254 2258
15. J. Liu, S.Y. Ma, X.L. Huang, L.G. Ma, F.M. Li, F.C. Yang, Q. Zhao, and X.L. Zhang Superlattices Microstruct. 52 2012 765 773
16. H.F. Liu, and C.X. Lei Vacuum 86 2011 483 486
17. C.C. Huang, F.H. Wang, C.C. Wu, H.H. Huang, and C.F. Yang Nanoscale Res. Lett. 8 2013 206
18. H. Kim, A. Piqué, J.S. Horwitz, H. Murata, Z.H. Kafafi, C.M. Gilmore, and D.B. Chrisey Thin Solid Films 377/378 2000 798 802
19. T. Yamada, A. Miyake, S. Kishimoto, H. Makino, N. Yamamoto, and T. Yamamoto Surf. Coat. Technol. 202 2007 973 976
20. H. Kim, C.M. Gilmore, A. Pique, J.S. Horwitz, H. Mattoussi, H. Murata, Z.H. Kafafi, and D.B. Chrisey J. Appl. Phys. 86 1999 6451 6461
21. Y. Shigesato, and D.C. Paine Thin Solid Films 238 1994 44 50
22. D.H. Zhang, T.L. Yang, J. Ma, Q.P. Wang, R.W. Gao, and H.L. Ma Appl. Surf. Sci. 158 2000 43 48
23. E. Fortunato, V. Assuncao, A. Goncalves, A. Marques, H. Aguas, L. Pereira, I. Ferreira, P. Vilarnho, and R. Martins Thin Solid Films 451/452 2004 443 447
24. H.F. Liu, H.F. Zhang, C.X. Lei, and C.K. Yuan J. Semicond 30 2009 023001