Low-temperature deposited Titanium-doped zinc oxide thin films on the flexible PET substrate by DC magnetron sputtering

Vacuum

Volumn 86, Issue 4, 2011, Pages 483-486

  Liu, Hanfa ^a   Lei, Chengxin ^a  

^a SHANDONG UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Magnetron sputtering; Stress; Thin films; Titanium doped zinc oxide thin films

Indexed keywords

DC MAGNETRON SPUTTERING; DEPOSITED FILMS; ELECTRICAL RESISTIVITY; HEXAGONAL STRUCTURES; HIGH TRANSMITTANCE; HIGH TRANSPARENCY; LOW RESISTIVITY; LOW TEMPERATURES; OPTICAL AND ELECTRICAL PROPERTIES; PET SUBSTRATE; POLYCRYSTALLINE; PREFERRED ORIENTATIONS; ROOM TEMPERATURE; SPUTTERING POWER; TITANIUM-DOPED ZINC OXIDE THIN FILMS; VISIBLE RANGE; XRD PATTERNS; ZINC OXIDE THIN FILMS;

CONDUCTIVE FILMS; DC POWER TRANSMISSION; ELECTRIC CONDUCTIVITY; MAGNETRON SPUTTERING; POLYETHYLENE TEREPHTHALATES; STRESSES; SUBSTRATES; THIN FILMS; TITANIUM; TITANIUM OXIDES; ZINC; ZINC OXIDE;

OXIDE FILMS;

EID: 81855166872     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2011.10.006     Document Type: Article

References (8)

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