Particle swarm optimization for design of slotted MEMS resonators with low thermoelastic dissipation

Journal of Microelectromechanical Systems

Volumn 23, Issue 2, 2014, Pages 364-371

  Lake, Jonathan James ^a   Duwel, Amy Elizabeth ^b   Candler, Rob N ^a,c  

^a Engineering IV   (United States)

^b CHARLES STARK DRAPER LABORATORY   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Design optimization; MEMS resonators; particle swarm optimization; quality factor; thermoelastic dissipation

Indexed keywords

ALGORITHMS; ENERGY DISSIPATION; MICROELECTROMECHANICAL DEVICES; PARTICLE SWARM OPTIMIZATION (PSO); THERMOELASTICITY;

BINARY PARTICLE SWARM OPTIMIZATION; BIO-INSPIRED ALGORITHMS; DESIGN OPTIMIZATION; MEMS RESONATORS; OPTIMIZATION TECHNIQUES; QUALITY FACTORS; THERMOELASTIC DISSIPATION; THERMOMECHANICAL SIMULATION;

DESIGN;

EID: 84898466105     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2013.2275999     Document Type: Article

References (32)

1. Y. T. Yang, C. Callegari, X. L. Feng, K. L. Ekinci, and M. L. Roukes, "Zeptogram-scale nanomechanical mass sensing," Nano Lett., vol. 6, no. 4, pp. 583-586, Mar. 2006.
2. S. P. Beeby, M. J. Tudor, and N. M. White, "Energy harvesting vibration sources for microsystems applications," Meas. Sci. Technol., vol. 17, no. 12, pp. 175-195, Dec. 2006.
3. E. P. Quévy and R. T. Howe, "Redundant MEMS resonators for precise reference oscillators," in Proc. RFIC Symp. 2005, pp. 113-116. (Pubitemid 41570253)
4. R. Melamud, S. A. Chandorkar, S. F. Lord, and T. W. Kenny, "Realtime temperature compensation of MEMS oscillators using an integrated micro-oven and a phase-locked loop," J. Microelectromech. Syst., vol. 19, no. 1, pp. 192-201, Feb. 2010.
5. C. T.-C. Nguyen, "MEMS technology for timing and frequency control," IEEE Trans. Ultrason., Ferroelectr. Freq. Control, vol. 54, no. 2, pp. 251-270, Feb. 2007.
6. K. Sundaresan, G. Ho, S. Pourkamali, and F. Ayazi, "Electronically temperature compensated silicon bulk acoustic resonator reference osil-lators," IEEE J. Solid-State Circuits, vol. 42, no. 6, pp. 1425-1434, Jun. 2007. (Pubitemid 46853250)
7. D. Weinstein and S. Bhave, "The resonant body transistor," Nano Lett., vol. 10, no. 4, pp. 1234-1237, Feb. 2010.
8. M. Bao and H. Yang, "Squeeze film air damping in MEMS," Sens. Actuators, vol. 136, no. 1, pp. 3-27, May 2007. (Pubitemid 46590692)
9. D. Bindel, E. Quévy, T. Koyama, S. Govindjee, J. W. Demmel, and R. T. Howe, "Elastic PMLs for resonator anchor loss simulation," Int. J. Numer. Methods Eng., vol. 64, no. 6, pp. 789-818, Aug. 2005. (Pubitemid 41444698)
10. Y. Wang, J. A. Henry, A. T. Zehender, and M. A. Hines, "Surface chemical control of mechanical energy losses in micromachined silicon structures," J. Phys. Chem B, vol. 107, no. 51, pp. 14270-14277, Dec. 2003.
11. S. Chandorkar, M. Agarwal, R. Melamud, R. Candler, K. Goodson, and T. Kenny, "Limits of quality factor in bulk-mode micromechanical resonators," in Proc. Int. Conf. MEMS, Tucson, AZ, USA, 2008, pp. 13-17.
12. J. Hasson and A. Many, "Observation of Akhiezer and Landau-Rumer regimes in the frequency dependence of shear-wave lattice attenuation in CdS," Phys. Rev. Let., vol. 35, no. 12, pp. 792-795, Sep. 1975.
13. C. Zener, "Internal friction in solids. I. Theory of internal friction in reeds," Phys. Rev., vol. 52, no. 3, pp. 230-235, Apr. 1937.
14. S. Chandorkar, R. N. Candler, A. Duwel, R. Melamud, M. Agarwal, K. E. Goodson, and T. W. Kenny, "Multimode thermoelastic dissipation," J. Appl. Phys., vol. 105, no. 4, pp. 1-13, Feb. 2009.
15. A. Duwel, R. N. Candler, T. W. Kenny, and M. Varghese, "Engineering MEMS resonators with low thermoelastic damping," J. Microelectro-mech. Syst., vol. 15, no. 6, pp. 1437-1445, Dec. 2006. (Pubitemid 44921761)
16. J. Robinson and Y. Rahmat-Samii, "Particle swarm optimization in electromagnetism," IEEE Trans. Antennas Propag., vol. 52, no. 2, pp. 397-407, Feb. 2004.
17. A. Ketabi and M. J. Navardi, "Optimization of variable-capacitance micromotor using genetic algorithm," J. Microelectromech. Syst., vol. 20, no. 2, pp. 497-504, Apr. 2011.
18. C. H. Ko and J. C. Chiou, "Optimal design of the magnetic microactuator using the genetic algorithm," J. Magn. Mater., vol. 263, pp. 38-46, Jul. 2003.
19. M. Allen, M. Raulli, K. Maute, and D. Frangopol, "Reliability-based analysis and design optimization of electrostatically acutated MEMS," Comput. Struct., vol. 82, nos. 13-14, pp. 1007-1020, May 2004.
20. F. Peano and T. Tambosso, "Design and optimization of a MEMS electret-based capacitive energy scavenger," J. Microelectromech. Syst., vol. 14, no. 3, pp. 429-435, Jun. 2005. (Pubitemid 41005061)
21. M. P. Bendsøe, "Optimal shape design as a material distribution problem," Struct. Optim., vol. 1, pp. 193-202, May 1989.
22. D. Peng, B. Merriman, S. Osher, H. Zhao, and M. Kang, "A PDE-based fast local level set method," J. Comput. Phys., vol. 155, no. 2, pp. 410-438, Nov. 1999.
23. K. Deb, A. Pratap, S. Agarwal, and T. Meyarivan, "A fast and elitist multiobjective genetic algorithm: NSGA-II," IEEE Trans. Evol. Comput., vol. 6, no. 2, pp. 182-197, Apr. 2002. (Pubitemid 34555372)
24. R. S. Parpinelli, H. Lopes, and A. Frietas, "Data mining with an ant colony optimization algorithm," IEEE Trans. Evol. Comput., vol. 6, no. 4, pp. 321-332, Aug. 2002. (Pubitemid 35032734)
25. S. Kirkpatrick, "Optimization by simulated annealing: Quantitative studies," J. Stat. Phys., vol. 34, no. 5, pp. 975-986, Mar. 1984.
26. J. Kennedy and R. Eberhart, "Particle swarm optimization," in Proc. IEEE Int. Conf. Neural Netw., Nov./Dec. 1995, pp. 1942-1948.
27. N. Jin and Y. Rahmat-Samii, "Advances in particle swarm optimization for antenna Designs: Real number, Binary, single objective and Multi objective implementations," IEEE Trans. Antennas Propag., vol. 55, no. 3, pp. 556-567, Mar. 2007. (Pubitemid 46534658)
28. R. N. Candler, A. Duwel, M. Varghese, S. A. Chandorkar, M. A. Hopcroft, W. T. Park, K. Bongsang, G. Yama, A. Partridge, M. Lutz, and T. W. Kenny, "Impact of geometry on thermoelastic dissipation in micromechanical resonant beams," J. Microelectromech. Syst., vol. 15, pp. 927-934, Aug. 2006. (Pubitemid 44251400)
29. Y. Mochida, M. Tamura, and K. Ohwada, "A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes," Sens. Actuators, vol. 80, no. 2, pp. 170-178, Mar. 2000. (Pubitemid 30559024)
30. S. Yoneoka, "High-cyclic fatigue experiments of single crystal silicon in an oxygen-free environment," in Proc. Int. Conf. MEMS, 2010, pp. 224-227.
31. C. L. Muhlstein, E. A. Stach, and R. O. Ritchie, "Mechanism of fatigue in micron-scale films of plycrystalline silicon for microeleectro- mechanical systems," Appl. Phys. Lett., vol. 80, no. 9, pp. 1532-1534, Mar. 2002.
32. S. Prabhakar and S. Vengallatore, "Thermoelastic damping in hollow and slotted microresonator," J. Microelectromech. Syst., vol. 18, no. 3, pp. 725-735, Jun. 2009.