Optimization of variable-capacitance micromotor using genetic algorithm

Journal of Microelectromechanical Systems

Volumn 20, Issue 2, 2011, Pages 497-504

  Ketabi, Abbas ^a   Navardi, Mohammad Javad ^b  

^a UNIVERSITY OF KASHAN   (Iran)

^b ISLAMIC AZAD UNIVERSITY   (Iran)

Author keywords

Finite element method (FEM); genetic algorithm (GA); micromotor optimization; variable capacitance micromotor (VCM)

Indexed keywords

FEM ANALYSIS; FITNESS VALUES; GEOMETRIC PARAMETER; MAXIMUM TORQUE; MICROMOTOR; MICROMOTOR OPTIMIZATION; OPTIMIZATION PROCESS; SAMPLING METHOD; TORQUE RIPPLES; VARIABLE-CAPACITANCE MICROMOTOR; VARIABLE-CAPACITANCE MICROMOTOR (VCM);

CAPACITANCE; FINITE ELEMENT METHOD; POLYSILICON; SHAPE OPTIMIZATION; TORQUE;

GENETIC ALGORITHMS;

EID: 79953757804     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2105247     Document Type: Article

References (23)

1. S. F. Bart, M. Mehregany, L. S. Tavrow, J. H. Lang, and S. D. Senturia, "Electric micromotor dynamics," IEEE Trans. Electron Devices, vol. 39, no. 3, pp. 566-575, Mar. 1992.
2. T. C. Neugebauer, D. J. Perreault, J. H. Lang, and C. Livermore, "A six-phase multilevel inverter for MEMS electrostatic induction micro-motors," IEEE Trans. Circuits Syst. II, Exp. Briefs, vol. 51, no. 2, pp. 49-56, Feb. 2004.
3. W. Zhang, G. Meng, and H. Li, "Electrostatic micromotor and its reliability," Microelectron. Reliab., vol. 45, no. 7/8, pp. 1230-1242, Jul./Aug. 2005. (Pubitemid 40786573)
4. S. F. Nagle, C. Livermore, L. G. Frechette, R. Ghodssi, and J. H. Lang, "An electric induction micromotor," J. Microelectromech. Syst., vol. 14, no. 5, pp. 1127-1143, Oct. 2005. (Pubitemid 41555303)
5. N. Ghalichechian, A. Moadafe, and R. Ghodssi, "Dynamic characterization of a linear electrostatic micromotor supported on microball bearings," Sens. Actuators A, Phys., vol. 136, no. 2, pp. 496-503, May 2007. (Pubitemid 46678723)
6. N. Ghalichechian, A. Modafe, M. I. Beyaz, and R. Ghodssi, "Design, fabrication, and characterization of a rotary micromotor supported on microball bearings," J. Microelectromech. Syst., vol. 17, no. 3, pp. 632-642, Jun. 2008.
7. V. Bahjat and A. Vahedi, "Minimizing the torque ripple of variable capacitance electrostatic micromotors," J. Electrostat., vol. 64, no. 6, pp. 361-367, Jun. 2005.
8. T. B. Johansson, M. Van Dessel, R. Belmans, and W. Geysen, "Technique for finding the optimum geometry of electrostatic micromotors," IEEE Trans. Ind. Appl., vol. 30, no. 4, pp. 912-919, Jul./Aug. 1994.
9. R. Sarker, M. Mohammadian, and X. Yao, Evolutionary Optimization. Norwell, MA: Kluwer, 2002, pp. 229-248.
10. R. L. Haupt and D. H. Werner, Genetic Algorithms in Electromagnetics. Piscataway, NJ: IEEE Press, 2007, ch. 2.
11. W. K. S. Pao, W. S. H. Wong, and A. M. K. Lai, "An explicit drive algorithm for aiding the design of firing sequence in side-drive micromotor," Commun. Numerical Methods Eng., vol. 24, no. 12, pp. 2131-2136, Dec. 2008.
12. S. S. Irudayaraj and A. Emadi, "Micromachines: Principles of operation, dynamics, and control," in Proc. IEEE Int. Conf. Elect. Mach. Drives, 2005, pp. 1108-1115. (Pubitemid 44461444)
13. F. Delfino and M. Rossi, "A new FEM approach for field and torque simulation of electrostatic micro actuators," J. Microelectromech. Syst., vol. 11, no. 4, pp. 362-371, Aug. 2002. (Pubitemid 34950044)
14. L. S. Fan, Y. C. Tai, and R. S. Muller, "IC-processed electrostatic micro-motors," in Proc. IEEE Int. Conf. Electron Devices Meet., 1988, pp. 666-669.
15. A. Jindal, M. Krishnamurthy, and B. Fahimi, "Micromachines: Principles of operation, dynamics, and control," in Proc. IEEE Int. Conf. Power Electron., Elect. Drives, Autom., 2005, pp. 358-365.
16. S. Wiak, P. D. Barba, and A. Savini, "3-D computer aided analysis of the "Berely" electrostatic micromotor," IEEE Trans. Magn., vol. 31, no. 3, pp. 2108-2111, May 1995.
17. V. Behjat and A. Vahedi, "Analysis and optimization of MEMS electrostatic microactuator," in Proc. IEEE Int. Conf. Perspective Technol. Methods MEMS Design, 2007, pp. 20-25.
18. L. Schumaker, Spline Functions: Basic Theory. Cambridge, U.K.: Cambridge Univ. Press, 2007, ch. 1.
19. N. G. Milne, S. J. E. Yang, A. J. Sangster, H. Ziad, and S. Spirkovitch, "Determination of the forces present in an electrostatic micromotor," in Proc. IEEE Int. Conf. Elect. Mach. Drives, 1993, pp. 9-14.
20. Y. S. Zhou and L. Y. Lai, "Optimal design for fuzzy controllers by genetic algorithms," IEEE Trans. Ind. Appl., vol. 36, no. 1, pp. 93-97, Jan./Feb. 2000.
21. G. Stumberger, D. Dolinar, U. Palmer, and K. Hameyer, "Optimization of radial active magnetic bearings using the finite element technique and the differential evolution algorithm," IEEE Trans. Magn., vol. 36, no. 4, pp. 1009-1013, Jul. 2000. (Pubitemid 32019942)
22. Z. Michalewicz, Genetic Algorithms + Data Structures = Evolution Programs. New York: Springer, 1996, ch. 1.
23. V. Bahjat and A. Vahedi, "Study the influence of geometric parameters on the torque of electrostatic micromotors," J. Elect. Eng., vol. 89, no. 1, pp. 61-65, Oct. 2006. (Pubitemid 44273759)