The growth and conductivity of nanostructured ZnO films grown on Al-doped ZnO precursor layers by pulsed laser deposition

Ceramics International

Volumn 40, Issue 6, 2014, Pages 8389-8395

  Kumarakuru, Haridas ^a,b   Cherns, David ^a   Collins, Andrew M ^a  

^a UNIVERSITY OF BRISTOL   (United Kingdom)

^b NELSON MANDELA METROPOLITAN UNIVERSITY   (South Africa)

Author keywords

Al doped ZnO (AZO) and ZnO thin films; Pulsed laser deposition (PLD); Scanning electron microscopy (SEM); Transmission electron microscopy (TEM); Tunnelling atomic force microscopy (TUNA)

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC PROPERTIES; METALLIC FILMS; NANOSTRUCTURES; PULSED LASER DEPOSITION; SAPPHIRE; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; ZINC OXIDE;

ELECTRICAL CONDUCTIVITY; FILM RESISTIVITY; NANOSTRUCTURED ZNO; SAPPHIRE SUBSTRATES; SOLAR CELL ELECTRODES; SUBSTRATE TEMPERATURE; TEMPERATURE WINDOW; ZNO THIN FILM;

ALUMINUM;

EID: 84897396657     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2014.01.045     Document Type: Article

References (31)

1. V. Gupta, and A. Mansingh Influence of postdeposition annealing on the structural and optical properties of sputtered zinc oxide film J. Appl. Phys. 80 1996 1063 1073
2. M. Aoki, K. Tada, and T. Murai A new technique for the vapour phase epitaxial growth of ZnO as a guided-wave optical material Thin Solid Films 83 1981 283 288
3. H. Kumarakuru, D. Cherns, and G.M. Fuge The growth of Al-doped ZnO nanorods on c-axis sapphire by pulsed laser deposition Surf. Coat. Technol. 205 21-22 2011 5083 5087
4. M.N.R. Ashfold, F. Claeyssens, G.M. Fuge, and S.J. Henley Pulsed laser ablation and deposition of thin films Chem. Soc. Rev. 23 2004 23 31
5. Qiang Peng, Yuancheng Qin, ZnO Nanowires, and Their-Application-for-Solar Cells Abbass Hashim, Nanowires - Implementations and Applications 2011 Nanotechnology and Nanomaterials, InTech 157 178 10.5772/17923
6. M. Law, L.E. Greene, J.C. Johnson, R. Saykally, and P. Yang Nanowire dye-sensitized solar cells Nat. Mater. 4 2005 455 459
7. B.L. Zhu, X.H. Sun, X.Z. Zhao, F.H. Su, G.H. Li, X.G. Wu, J. Wu, R. Wu, and J. Liu The effects of substrate temperature on the structure and properties of ZnO films prepared by pulsed laser deposition Vacuum 82 2008 495 500
8. Y. Zhao, Y. Jiang, and Y. Fang The influence of substrate temperature on ZnO thin films prepared by PLD technique J. Cryst. Growth 307 2007 278 282
9. X.Q. Wei, J.Z. Huang, M.Y. Zhang, Y. Du, and B.Y. Man Effects of substrate parameters on structure and optical properties of ZnO thin films fabricated by pulsed laser deposition Mater. Sci. Eng. B 116 2010 141 146
10. A.K. Yousif, and A.J. Haider Effect of substrate temperature on the structural and morphological properties of nano-structure ZnO films by pulsed laser deposition Eng. Technol. J. 29 2011 58 64
11. W. Zhaoyang, S. Liyuan, and H. Lizhong Effect of laser repetition frequency on the structural and optical properties of ZnO thin films by PLD Vacuum 85 2010 397 399
12. F.K. Shan, B.C. Shin, S.W. Jang, and Y.S. Yu Substrate effects of ZnO thin films prepared by PLD technique J. Eur. Ceram. Soc. 24 2004 1015 1018
13. C. Liu, S.H. Chang, T.W. Noh, J.-H. Song, and J. Xie Effects of growth temperature and oxygen pressure on the properties of heteroepitaxial ZnO thin films on sapphire (0001) substrates by pulsed laser deposition Phys. Status Solidi B 244 2007 1528 1532
14. K.-K. Kim, S. Niki, J.-Y. Oh, J.-O. Song, T.-Y. Seong, S.-J. Park, S. Fujita, and S.-W. Kim High electron concentration and mobility in Al-doped n-ZnO epilayer achieved via dopant activation using rapid-thermal annealing J. Appl. Phys. 97 2005 066013-3
15. T. Makino, Y. Segawa, S. Yoshida, A. Tsukazaki, A. Ohtomo, and M. Kawasaki Gallium concentration dependence of room temperature near-band-edge luminescence in n-ZnO:Ga Appl. Phys. Lett. 85 2004 759 761
16. M. Chen, Z.L. Pei, X. Wang, C. Sun, and L.S. Wen Dependence of structural, electrical and optical properties of ZnO:Al films on substrate temperature J. Mater. Res. 16 2001 2118 2123
17. Z.L. Pei, C. Sun, M.H. Tan, J.Q. Xiao, D.H. Guan, R.F. Huang, and L.S. Wen Optical and electrical properties of direct-current magnetron sputtered ZnO:Al films J. Appl. Phys. 90 2001 3432 3436
18. H. Kim, C.M. Gilmore, J.S. Horwitz, A. Pique, H. Murata, G.P. Kushto, R. Schlaf, Z.H. Kafafi, and D.B. Chrisey Transparent conducting aluminium-doped zinc oxide thin films for organic light-emitting devices Appl. Phys. Lett. 76 2000 259 261
19. H. Agura, H. Okinaka, S. Hoki, T. Aoki, A. Suzuki, T. Matsushita, and M. Okuda Low-resistive and transparent AZO films prepared by PLD in magnetic field Electr. Eng. Jpn. 151 2005 1916 1920
20. H.-Y. Lu, S.-Y. Chu, and S.-S. Tan The characteristics of low-temperature-synthesized ZnS and ZnO nanoparticles J. Cryst. Growth 269 2004 385 391
21. P. Gondoni, M. Ghidelli, F. Di Fonzo, V. Russo, P. Bruno, J. Martí-Rujas, C.E. Bottani, A. Li Bassi, and C.S. Casari Structural and functional properties of Al:ZnO thin films grown by pulsed laser deposition at room temperature Thin Solid Films 520 2012 4707 4711
22. K. Vanheusden, C.H. Seager, W.L. Waren, D.R. Tallant, and J.A. Voigt Correlation between photoluminescence and oxygen vacancies in ZnO phosphors Appl. Phys. Lett. 68 1996 403 405
23. H. Kim, A. Pique, J.S. Horwitz, H. Murata, Z.H. Kafafi, C.M. Gilmore, and D.B. Chrisey Effect of aluminium doping on zinc oxide thin films grown by pulsed laser deposition for organic light-emitting diodes Thin Solid Films 377-378 2000 798 802
24. Y.-Y. Chen, J.-C. Hsu, P.W. Wang, Y.-W. Pai, C.-Y. Wu, and Y.-H. Lin Dependence of resistivity on structure and composition of AZO films fabricated by ion beam co-sputtering deposition J. Appl. Surf. Sci. 257 2011 3446 3450
25. Y.-Y. Chen, P.W. Wang, J.-C. Hsu, and C.-Y. Lee Post-annealing properties of aluminium-doped zinc oxide films fabricated by ion beam co-sputtering Vacuum 87 2013 227 231
26. W.-J. Lee, C.-R. Cho, K.-M. Cho, and S.-Y. Jeong Rapid thermal annealing effect of Al-doped ZnO thin films J. Korean Phys. Soc. 47 2005 S296 S299
27. B. Bayraktaroglu, K. Leedy, and R. Bedford High temperature stability of postgrowth annealed transparent and conductive ZnO:Al films Appl. Phys. Lett. 93 2008 022104-3
28. J.-H. Noh, H.S. Jung, J.-K. Lee, J.Y. Kim, C.M. Cho, J.-S. An, and K.S. Hong Reversible change in electrical and optical properties in epitaxially grown Al-doped ZnO thin films J. Appl. Phys. 104 2008 073706-5
29. S.M. Park, T. Ikegami, K. Ebihira, and P.K. Shin Structure and properties of transparent conductive doped ZnO films by pulsed laser deposition Appl. Surf. Sci. 253 2006 1522 1527
30. C. Kittle Introduction to Solid State Physics 5th ed. 1985 Maruzen Tokyo
31. S. Flickyngerova, M. Netrvalova, L. Prusakova, I. Novotny, P. Sutta, and V. Tvarozek Modification of AZO thin-film properties by annealing and ion etching Vacuum 84 2010 215 217