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Journal of Materials Research

Volumn 16, Issue 7, 2001, Pages 2118-2123

Dependence of structural, electrical, and optical properties of ZnO:Al films on substrate temperature

(5) Chen, M a,b Pei, Z L b Wang, X a Sun, C b Wen, L S b

a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY (China)

b INSTITUTE OF METAL RESEARCH (China)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; MAGNETRON SPUTTERING; SUBSTRATES;

HALL MOBILITY;

CONDUCTIVE FILMS;

EID: 0035410851 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2001.0288 Document Type: Article

Times cited : (18)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.