The effects of substrate temperature on the structure and properties of ZnO films prepared by pulsed laser deposition

Vacuum

Volumn 82, Issue 5, 2008, Pages 495-500

  Zhu, B L ^a   Sun, X H ^b   Zhao, X Z ^b   Su, F H ^c   Li, G H ^c   Wu, X G ^c   Wu, J ^a   Wu, R ^a   Liu, J ^a  

^a WUHAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b WUHAN UNIVERSITY   (China)

^c INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

Crystal quality; Grain size; Optical properties; PLD; Substrate temperature; ZnO films

Indexed keywords

GLASS; GRAIN SIZE AND SHAPE; PHOTOLUMINESCENCE; PULSED LASER DEPOSITION; SCANNING ELECTRON MICROSCOPY; STOICHIOMETRY; X RAY DIFFRACTION; ZINC OXIDE;

GLASS SUBSTRATES; SUBSTRATE TEMPERATURE; TRANSMISSION SPECTRA; ZNO FILMS;

THIN FILMS;

EID: 37049012062     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.07.059     Document Type: Article

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