Transparent conductive Mg and Ga co-doped ZnO thin films for solar cells grown by magnetron sputtering: H2 induced changes

Solar Energy Materials and Solar Cells

Volumn 125, Issue , 2014, Pages 59-65

  Tian, Cong Sheng ^a   Chen, Xin Liang ^a   Ni, Jian ^a   Liu, Jie Ming ^a   Zhang, De Kun ^a   Huang, Qian ^a   Zhao, Ying ^a   Zhang, Xiao Dan ^a  

^a NANKAI UNIVERSITY   (China)

Author keywords

Band gap widening; Magnetron sputtering; Mg and Ga co doping; Solar cells; ZnO thin films

Indexed keywords

CARRIER CONCENTRATION; CRYSTAL ORIENTATION; ENERGY GAP; FLOW RATE; GALLIUM; GALLIUM ALLOYS; GLASS; MAGNETRON SPUTTERING; METALLIC FILMS; OPTICAL DATA PROCESSING; OPTICAL FILMS; SOLAR CELLS; SUBSTRATES; ZINC SULFIDE;

BAND GAP RENORMALIZATION EFFECTS; BAND GAP WIDENING; CO-DOPING; HEXAGONAL WURTZITE STRUCTURE; THERMAL ANNEALING PROCESS; TRANSPARENT CONDUCTIVE; ZNO THIN FILM;

THIN FILMS;

EID: 84896485968     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2014.02.028     Document Type: Article

References (47)

1. A. Shah, P. Torres, R. Tscharner, N. Wyrsch, and H. Keppner Photovoltaic technology: the case for thin-film solar cells Science 285 1999 692 698
2. J. Müller, B. Rech, J. Springer, and M. Vanecek TCO and light trapping in silicon thin film solar cells Sol. Energy 77 2004 917 930 (Pubitemid 39605899)
3. x:H layer leading to a >16% efficient multi-junction thin-film silicon solar cell Appl. Phys. Lett. 99 2011 113512 113513
4. H. Li, N. Wang, and X. Liu Optical and electrical properties of Vanadium doped Indium oxide thin films Opt. Express 16 2008 194 199
5. J.H. Burroughes, D.D.C. Bradley, A.R. Brown, R.N. Marks, K. Mackay, R.H. Friend, P.L. Burns, and A.B. Holmes Light-emitting diodes based on conjugated polymers Nature 347 1990 539 541 (Pubitemid 120015057)
6. S.H. Jang, and S.F. Chichibu Structural, elastic, and polarization parameters and band structures of wurtzite ZnO and MgO J. Appl. Phys. 112 2012 073503 073506
7. 0.15O:Al thin films prepared by pulsed laser deposition Sol. Energy Mater. Sol. Cells 92 2008 343 347 (Pubitemid 350236755)
8. S.W. Shin, I.Y. Kim, G.H. Lee, G.L. Agawane, A.V. Mohokar, G.S. Heo, J.H. Kim, and J.Y. Lee Design and growth of quaternary Mg and Ga codoped ZnO thin films with transparent conductive characteristics Cryst. Growth Des. 11 2011 4819 4824
9. xO transparent conducting films deposited by pulsed laser deposition Appl. Phys. Lett. 85 2004 1374 1376
10. xO:(Al,In) thin films J. Appl. Phys. 96 2004 459 467
11. S. Fernández, O. de Abril, F.B. Naranjo, and J.J. Gandía High quality textured ZnO:Al surfaces obtained by a two-step wet-chemical etching method for applications in thin film silicon solar cells Sol. Energy Mater. Sol. Cells 95 2011 2281 2286
12. M. Boccard, C. Battaglia, S. Hänni, K. Söderström, J. Escarré, S. Nicolay, F. Meillaud, M. Despeisse, and C. Ballif Multiscale transparent electrode architecture for efficient light management and carrier collection in solar cells Nano Lett. 12 2012 1344 1348
13. S.Y. Myong, and K.S. Lim Highly stable and textured hydrogenated ZnO thin films Appl. Phys. Lett. 82 2003 3026 3028
14. Y.R. Park, J. Kim, and Y.S. Kim Effect of hydrogen doping in ZnO thin films by pulsed DC magnetron sputtering Appl. Surf. Sci. 255 2009 9010 9014
15. F. Wang, X.-L. Chen, X.-H. Geng, D.-K. Zhang, C.-C. Wei, Q. Huang, X.-D. Zhang, and Y. Zhao Development of natively textured surface hydrogenated Ga-doped ZnO-TCO thin films for solar cells via magnetron sputtering Appl. Surf. Sci. 258 2012 9005 9010
16. C.G. Van de Walle Hydrogen as a cause of doping in zinc oxide Phys. Rev. Lett. 85 2000 1012 1015
17. C.G. Van de Walle, and J. Neugebauer Universal alignment of hydrogen levels in semiconductors, insulators and solutions Nature 423 2003 626 628 (Pubitemid 36713219)
18. A. Janotti, and C.G. Van de Walle Hydrogen multicentre bonds Nat. Mater. 6 2007 44 47 (Pubitemid 46041475)
19. E.V. Lavrov, F. Börrnert, and J. Weber On the nature of hydrogen-related shallow donors in ZnO Phys. B: Condens. Matter 376-377 2006 694 698
20. G.A. Shi, M. Stavola, S.J. Pearton, M. Thieme, E.V. Lavrov, and J. Weber Hydrogen local modes and shallow donors in ZnO Phys. Rev. B 72 2005 195211
21. Z. Zhou, K. Kato, T. Komaki, M. Yoshino, H. Yukawa, and M. Morinaga Effects of hydrogen doping through ion implantation on the electrical conductivity of ZnO Int. J. Hydrogen Energy 29 2004 323 327
22. xO films: relation to film structure and composition J. Appl. Phys. 113 2013 053710 053716
23. X.L. Chen, B.H. Xu, J.M. Xue, Y. Zhao, C.C. Wei, J. Sun, Y. Wang, X.D. Zhang, and X.H. Geng Boron-doped zinc oxide thin films for large-area solar cells grown by metal organic chemical vapor deposition Thin Solid Films 515 2007 3753 3759 (Pubitemid 46240148)
24. A. Kuroyanagi Crystallographic characteristics and electrical properties of Al-doped ZnO thin films prepared by ionized deposition J. Appl. Phys. 66 1989 5492 5497
25. A. Van Der Drift Evolutionary Selection Philips Res. Rep. 22 1967 267
26. T. Prasada Rao, M.C. Santhosh Kumar, and N. Sooraj Hussain Effects of thickness and atmospheric annealing on structural, electrical and optical properties of GZO thin films by spray pyrolysis J. Alloys Compd. 541 2012 495 504
27. Q.-B. Ma, Z.-Z. Ye, H.-P. He, S.-H. Hu, J.-R. Wang, L.-P. Zhu, Y.-Z. Zhang, and B.-H. Zhao Structural, electrical, and optical properties of transparent conductive ZnO:Ga films prepared by DC reactive magnetron sputtering J. Cryst. Growth 304 2007 64 68 (Pubitemid 46678000)
28. M. Chen, Z.L. Pei, X. Wang, C. Sun, and L.S. Wen Structural, electrical, and optical properties of transparent conductive oxide ZnO:Al films prepared by dc magnetron reactive sputtering J. Vac. Sci. Technol. A 19 2001 963 970 (Pubitemid 32498506)
29. Y.R. Park, J. Kim, and Y.S. Kim Growth and characteristics of hydrogenated In-doped ZnO thin films by pulsed DC magnetron sputtering Appl. Surf. Sci. 256 2009 1589 1594
30. B.L. Zhu, J. Wang, S.J. Zhu, J. Wu, R. Wu, D.W. Zeng, and C.S. Xie Influence of hydrogen introduction on structure and properties of ZnO thin films during sputtering and post-annealing Thin Solid Films 519 2011 3809 3815
31. H. Gomez, A. Maldonado, M.D.L.L. Olvera, and D.R. Acosta Gallium-doped ZnO thin films deposited by chemical spray Sol. Energy Mater. Sol. Cells 87 2005 107 116 (Pubitemid 40573275)
32. B. Szyszka Transparent and conductive aluminum doped zinc oxide films prepared by mid-frequency reactive magnetron sputtering Thin Solid Films 351 1999 164 169 (Pubitemid 32213749)
33. K. Ellmer Resistivity of polycrystalline zinc oxide films: current status and physical limit J. Phys. D: Appl. Phys. 34 2001 3097
34. K. Ellmer, and R. Mientus Carrier transport in polycrystalline transparent conductive oxides: a comparative study of zinc oxide and indium oxide Thin Solid Films 516 2008 4620 4627 (Pubitemid 351601592)
35. xO:Al and ZnO:Al films J. Mater. Res. 27 2012 2249 2256
36. F. Ruske, M. Roczen, K. Lee, M. Wimmer, S. Gall, J. Hupkes, D. Hrunski, and B. Rech Improved electrical transport in Al-doped zinc oxide by thermal treatment J. Appl. Phys. 107 2010 013708(1) 013708(8)
37. E. Burstein Anomalous optical absorption limit in InSb Phys. Rev. 93 1954 632 633
38. T.S. Moss The interpretation of the properties of indium antimonide Proc. Phys. Soc., Sect. B 67 1954 775 782
39. K.F. Berggren, and B.E. Sernelius Band-gap narrowing in heavily doped many-valley semiconductors Phys. Rev. B 24 1981 1971 1986
40. D. Auvergne, J. Camassel, and H. Mathieu Band-gap shrinkage of semiconductors Phys. Rev. B 11 1975 2251 2259
41. P.A. Wolff Theory of the band structure of very degenerate semiconductors Phys. Rev. 126 1962 405 412
42. D.G. Zhao, S.J. Xu, M.H. Xie, S.Y. Tong, and H. Yang Stress and its effect on optical properties of GaN epilayers grown on Si (111), 6H-SiC (0001), and c-plane sapphire Appl. Phys. Lett. 83 2003 677 679
43. xO Eur. Phys. J. B 62 2008 417 421
44. 0.1O thin films prepared by pulsed laser deposition technique Appl. Surf. Sci. 252 2006 8657 8661 (Pubitemid 44468273)
45. J.H. Kim, B.D. Ahn, C.H. Lee, K.A. Jeon, H.S. Kang, and S.Y. Lee Effect of rapid thermal annealing on electrical and optical properties of Ga doped ZnO thin films prepared at room temperature J. Appl. Phys. 100 2006 113515(1) 113515(3)
46. D.H. Zhang, and H.L. Ma Scattering mechanisms of charge carriers in transparent conducting oxide films Appl. Phys. A 62 1996 487 492 (Pubitemid 126595321)
47. X.-L. Chen, F. Wang, X.-H. Geng, D.-K. Zhang, C.-C. Wei, X.-D. Zhang, and Y. Zhao New natively textured surface Al-doped ZnO-TCOs for thin film solar cells via magnetron sputtering Mater. Res. Bull. 47 2012 2008 2011