메뉴 건너뛰기




Volumn 95, Issue 8, 2011, Pages 2281-2286

High quality textured ZnO:Al surfaces obtained by a two-step wet-chemical etching method for applications in thin film silicon solar cells

Author keywords

RF sputtering; Scattering properties; Texture surfaces; ZnO:Al

Indexed keywords

II-VI SEMICONDUCTORS; LIGHT SCATTERING; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; SILICON SOLAR CELLS; SOLAR CELLS; SURFACE SCATTERING; THIN FILM SOLAR CELLS; THIN FILMS; ZINC OXIDE;

EID: 79958112556     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2011.03.042     Document Type: Article
Times cited : (45)

References (19)
  • 1
    • 33745466133 scopus 로고    scopus 로고
    • High-efficiency μc-Si solar cells made by very high-frequency plasma-enhanced chemical vapor deposition
    • DOI 10.1002/pip.673
    • A. Gordijn, J.K. Rath, and R.E.I. Schropp High-efficiency μc-Si solar cells made by very high-frequency plasma-enhanced chemical vapor deposition Prog. Photovolt.: Res. Appl. 14 2006 305 311 (Pubitemid 43948135)
    • (2006) Progress in Photovoltaics: Research and Applications , vol.14 , Issue.4 , pp. 305-311
    • Gordijn, A.1    Rath, J.K.2    Schropp, R.E.I.3
  • 3
    • 34548491212 scopus 로고    scopus 로고
    • Superstrate p-i-n a-Si:H solar cells on textured ZnO:Al front transparent conduction oxide
    • DOI 10.1016/j.spmi.2007.04.050, PII S0749603607001292, E-MRS 2006 Symposium K: ZnO and Related Materials
    • J.C. Lee, V. Dutta, J. Yoo, J. Yi, J. Song, and K.H. Yoon Superstrate pin a-Si:H solar cells on textured ZnO:Al front transparent conduction oxide Superlattice Microstruct. 42 2007 369 374 (Pubitemid 47380226)
    • (2007) Superlattices and Microstructures , vol.42 , Issue.1-6 , pp. 369-374
    • Lee, J.C.1    Dutta, V.2    Yoo, J.3    Yi, J.4    Song, J.5    Yoon, K.H.6
  • 4
    • 33748455279 scopus 로고    scopus 로고
    • Rough ZnO layers by LP-CVD process and their effect in improving performances of amorphous and microcrystalline silicon solar cells
    • DOI 10.1016/j.solmat.2006.06.003, PII S0927024806002030
    • S. Faÿ, L. Feitknecht, R. Schlüchter, U. Kroll, E. Vallat-Sauvain, and A. Shah Rough ZnO layers by LP-CVD process and their effect in improving performances of amorphous and microcrystalline silicon solar cells Sol. Energy Mater. Sol. Cells 90 2006 2960 2967 (Pubitemid 44348926)
    • (2006) Solar Energy Materials and Solar Cells , vol.90 , Issue.18-19 , pp. 2960-2967
    • Fay, S.1    Feitknecht, L.2    Schluchter, R.3    Kroll, U.4    Vallat-Sauvain, E.5    Shah, A.6
  • 5
    • 44249109261 scopus 로고    scopus 로고
    • Recent development on surface-textured ZnO:Al films prepared by sputtering for thin-film solar cell application
    • DOI 10.1016/j.tsf.2007.10.029, PII S0040609007016975
    • M. Berginski, H. Hüpkes, W. Reetz, B. Rech, and M. Wuttig Recent development on surface-textured ZnO:Al films prepared by sputtering for thin-film solar cell application Thin Solid Films 516 2008 5836 5841 (Pubitemid 351726007)
    • (2008) Thin Solid Films , vol.516 , Issue.17 , pp. 5836-5841
    • Berginski, M.1    Hupkes, J.2    Reetz, W.3    Rech, B.4    Wuttig, M.5
  • 6
    • 9944234069 scopus 로고    scopus 로고
    • TCO and light trapping in silicon thin film solar cells
    • DOI 10.1016/j.solener.2004.03.015, PII S0038092X04000647, Thin Film PV
    • J. Muller, B. Rech, and M. Vanecek TCO and light trapping in silicon thin film solar cells Sol. Energy 77 2004 917 930 (Pubitemid 39605899)
    • (2004) Solar Energy , vol.77 , Issue.6 , pp. 917-930
    • Muller, J.1    Rech, B.2    Springer, J.3    Vanecek, M.4
  • 7
    • 0037246151 scopus 로고    scopus 로고
    • Analysis of light scattering in amorphous Si:H solar cells by a one-dimensional semi-coherent optical model
    • J. Krc, F. Smole, and M. Topic Analysis of light scattering in amorphous Si:H solar cells by a one-dimensional semi-coherent optical model Prog. Photovolt.: Res. Appl. 11 2003 15 26
    • (2003) Prog. Photovolt.: Res. Appl. , vol.11 , pp. 15-26
    • Krc, J.1    Smole, F.2    Topic, M.3
  • 9
    • 0037463267 scopus 로고    scopus 로고
    • Effect of surface roughness of ZnO:Al films on light scattering in hydrogenated amorphous silicon solar cells
    • J. Krc, M. Zeman, O. Kluth, F. Smole, and M. Topic Effect of surface roughness of ZnO:Al films on light scattering in hydrogenated amorphous silicon solar cells Thin Solid Films 426 2003 296 304
    • (2003) Thin Solid Films , vol.426 , pp. 296-304
    • Krc, J.1    Zeman, M.2    Kluth, O.3    Smole, F.4    Topic, M.5
  • 10
    • 36148962857 scopus 로고    scopus 로고
    • Transparent conducting oxide films for thin film silicon photovoltaics
    • DOI 10.1016/j.tsf.2007.08.110, PII S004060900701512X
    • W. Beyer, J. Hüpkes, and H. Stiebig Transparent conducting oxide films for thin film silicon photovoltaics Thin Solid Films 516 2007 147 154 (Pubitemid 350110588)
    • (2007) Thin Solid Films , vol.516 , Issue.2-4 , pp. 147-154
    • Beyer, W.1    Hupkes, J.2    Stiebig, H.3
  • 11
    • 0033170236 scopus 로고    scopus 로고
    • Texture etched ZnO:Al coated glass substrates for silicon based thin film solar cells
    • DOI 10.1016/S0040-6090(99)00085-1
    • O. Kluth, B. Rech, L. Houben, S. Wieder, G. Schöpe, C. Beneking, H. Wagner, A. Löffl, and H.W. Schock Texture etched ZnO:Al coated glass substrates for silicon based thin film solar cells Thin Solid Films 351 1999 247 253 (Pubitemid 32213766)
    • (1999) Thin Solid Films , vol.351 , Issue.1-2 , pp. 247-253
    • Kluth, O.1    Rech, B.2    Houben, L.3    Wieder, S.4    Schope, G.5    Beneking, C.6    Wagner, H.7    Loffl, A.8    Schock, H.W.9
  • 12
    • 34247266634 scopus 로고    scopus 로고
    • The effect of front ZnO:Al surface texture and optical transparency on efficient light trapping in silicon thin-film solar cells
    • M. Berginski, J. Hüpkes, M. Schulte, G. Schöpe, H. Stiebig, B. Rech, and M. Wuttig The effect of front ZnO:Al surface texture and optical transparency on efficient light trapping in silicon thin-film solar cells J. Appl. Phys. 101 2007 074903-1 074903-11
    • (2007) J. Appl. Phys. , vol.101 , pp. 0749031-07490311
    • Berginski, M.1    Hüpkes, J.2    Schulte, M.3    Schöpe, G.4    Stiebig, H.5    Rech, B.6    Wuttig, M.7
  • 13
    • 33748302820 scopus 로고    scopus 로고
    • Surface textured MF-sputtered ZnO films for microcrystalline silicon-based thin-film solar cells
    • DOI 10.1016/j.solmat.2006.06.027, PII S0927024806002170
    • J. Hupkes, B. Rech, O. Kluth, T. Repmann, B. Zwaygardt, J. Muller, R. Drese, and M. Wuttig Surface textured MF-sputtered ZnO films for microcrystalline silicon-based thin-film solar cells Sol. Energy Mater. Sol. Cells 90 2006 3054 3060 (Pubitemid 44332085)
    • (2006) Solar Energy Materials and Solar Cells , vol.90 , Issue.18-19 , pp. 3054-3060
    • Hupkes, J.1    Rech, B.2    Kluth, O.3    Repmann, T.4    Zwaygardt, B.5    Muller, J.6    Drese, R.7    Wuttig, M.8
  • 14
    • 0141748219 scopus 로고    scopus 로고
    • Modified Thornton model for magnetron sputtered zinc oxide: Film structure and etching behavior
    • O. Kluth, G. Schöpe, J. Hüpkes, C. Agashe, J. Müller, and B. Rech Modified Thornton model for magnetron sputtered zinc oxide: film structure and etching behavior Thin Solid Films 442 2003 80 85
    • (2003) Thin Solid Films , vol.442 , pp. 80-85
    • Kluth, O.1    Schöpe, G.2    Hüpkes, J.3    Agashe, C.4    Müller, J.5    Rech, B.6
  • 15
    • 0025493712 scopus 로고
    • Growth and characterization of tin oxide films prepared by chemical vapour deposition
    • G. Sanon, R. Rip, and A. Mansingh Growth and characterization of tin oxide films prepared by chemical vapour deposition Thin solid Films 190 1990 287 301
    • (1990) Thin Solid Films , vol.190 , pp. 287-301
    • Sanon, G.1    Rip, R.2    Mansingh, A.3
  • 16
    • 0000965471 scopus 로고
    • Properties of conductive zinc oxide films prepared by rf magnetron sputtering for transparent electrode applications
    • R.E.I. Schropp, and A. Madan Properties of conductive zinc oxide films prepared by rf magnetron sputtering for transparent electrode applications J. Appl. Phys. 66 1989 2027 2031
    • (1989) J. Appl. Phys. , vol.66 , pp. 2027-2031
    • Schropp, R.E.I.1    Madan, A.2
  • 17
    • 33846382402 scopus 로고    scopus 로고
    • Growth and characterization of ZnO:Al thin film using RF sputtering for transparent conducting oxide
    • A.I. Ali, C.H. Kim, J.H. Cho, and B.G. Kim Growth and characterization of ZnO:Al thin film using RF sputtering for transparent conducting oxide J. Korean Phys. Soc. 49 2006 S652 S656
    • (2006) J. Korean Phys. Soc. , vol.49
    • Ali, A.I.1    Kim, C.H.2    Cho, J.H.3    Kim, B.G.4
  • 18
    • 33847179491 scopus 로고    scopus 로고
    • Effect of thickness on structural, electrical, and optical properties of ZnO:Al films deposited by pulsed laser deposition
    • B.-Z. Dong, G.-J. Fang, J.-F. Wang, W.-J. Guan, and X.-Z. Zhao Effect of thickness on structural, electrical, and optical properties of ZnO:Al films deposited by pulsed laser deposition J. Appl. Phys. 101 2007 033713-1 033713-7
    • (2007) J. Appl. Phys. , vol.101 , pp. 0337131-0337137
    • Dong, B.-Z.1    Fang, G.-J.2    Wang, J.-F.3    Guan, W.-J.4    Zhao, X.-Z.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.