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Volumn 3, Issue 1, 2014, Pages

Non-Aqueous cleaning challenges for preventing damage to fragile nano-structures: A review

Author keywords

[No Author keywords available]

Indexed keywords


EID: 84893803075     PISSN: 21628769     EISSN: 21628777     Source Type: Journal    
DOI: 10.1149/2.010401jss     Document Type: Review
Times cited : (21)

References (61)
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  • 12
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  • 14
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    • Watermarks: Generation, control, and removal
    • T. Hattori, editor, Springer, Heidelberg and New York
    • H. Itoh, "Watermarks: Generation, Control, and Removal, " T. Hattori, editor, Ultraclean Surface Processing of Silicon Wafers, p.503, Springer, Heidelberg and New York (1998).
    • (1998) Ultraclean Surface Processing of Silicon Wafers , pp. 503
    • Itoh, H.1
  • 38
    • 74949119462 scopus 로고    scopus 로고
    • Extended. Abstracts, Japan Society of Applied Physics, (30p-B-4)(in Japanese only. Unpublished in English)
    • T. Osaka, H. Kuniyasu, and T. Hattori, Extended. Abstracts Fall 2004 Meeting, Japan Society of Applied Physics, 2, p.846 (30p-B-4) (2004) (in Japanese only. Unpublished in English).
    • (2004) Fall 2004 Meeting , vol.2 , pp. 846
    • Osaka, T.1    Kuniyasu, H.2    Hattori, T.3
  • 54
    • 74949090073 scopus 로고    scopus 로고
    • Extended Abstracts, Japan Society of Applied physics, (#2a-YC-6) (in Japanese)
    • J. Muramoto, H. Kuniyasu, and T. Hattori, Extended Abstracts, Fall 2003 Meeting, Japan Society of Applied physics, 2, 704 (#2a-YC-6) (2003) (in Japanese).
    • (2003) Fall 2003 Meeting , vol.2 , pp. 704
    • Muramoto, J.1    Kuniyasu, H.2    Hattori, T.3
  • 55
    • 84893719430 scopus 로고    scopus 로고
    • Laser Cleaning: Removal of Particles Adhering on silicon surfaces by Femtosecond Laser Beam Irradiation
    • Japan Industrial Conference on Cleaning
    • T. Hattori, "Laser Cleaning: Removal of Particles Adhering on silicon surfaces by Femtosecond Laser Beam Irradiation, " in Sangyo Senjyo (Industrial Cleaning) 10, pp. 26-32, Japan Industrial Conference on Cleaning (http://www.jicc.org) (2012) (in Japanese).
    • (2012) Sangyo Senjyo (Industrial Cleaning) , vol.10 , pp. 26-32
    • Hattori, T.1
  • 56
    • 84893799432 scopus 로고    scopus 로고
    • Pinpoint cleaning
    • Electronics Cleaning Technology, Gijutsu Joho Kyokai (Technical Information Institute), Tokyo, Japan and references therein (in Japanese)
    • T. Hattori: "Pinpoint Cleaning, " in Electronics Senjo Gijyutsu ( Electronics Cleaning Technology), pp.148-154, Gijutsu Joho Kyokai (Technical Information Institute), Tokyo, Japan (2007), and references therein (in Japanese).
    • (2007) Electronics Senjo Gijyutsu , pp. 148-154
    • Hattori, T.1
  • 57
    • 74949094318 scopus 로고    scopus 로고
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    • J. Muramoto, H. Kuniyasu, and T. Hattori, Extended Abstracts, Spring 2004 Meeting, Japan Society of Applied physics, 2, 856 (#32p-B-2) (2004) (in Japanese).
    • (2004) Extended Abstracts , vol.2 , pp. 856
    • Muramoto, J.1    Kuniyasu, H.2    Hattori, T.3
  • 58
    • 74949111760 scopus 로고    scopus 로고
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    • T. Osaka, H. Kuniyasu, and T. Hattori, Extended Abstracts, Spring 2005 Meeting, Japan Society of Applied physics, 2, 880 (#29a-ZC-4) (2005) (in Japanese).
    • (2005) Extended Abstracts , vol.2 , pp. 880
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.