Supercritical Co2 applications in BEOL cleaning

Solid State Phenomena

Volumn 103-104, Issue , 2005, Pages 315-322

  Matz, P D ^a   Reidy, R F ^b  

^a TEXAS INSTRUMENTS   (United States)

^b UNIVERSITY OF NORTH TEXAS   (United States)

Author keywords

BEOL cleans; Carbon dioxide; Supercritical

Indexed keywords

EID: 33644955905     PISSN: 10120394     EISSN: 16629779     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/SSP.103-104.315     Document Type: Conference Paper

References (24)

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