Silicon nano-pillar test structures for quantitative evaluation of wafer drying induced pattern collapse

ECS Transactions

Volumn 41, Issue 5, 2011, Pages 189-196

  Vos, I ^a   Hellin, D ^b   Vertommen, J ^b   Demand, M ^a   Boullart, W ^a  

^a IMEC   (Belgium)

^b LAM RESEARCH CORPORATION   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CLEANING; SCANNING ELECTRON MICROSCOPY;

CLUSTER-SIZE DISTRIBUTION; CRITICAL ASPECT RATIO; PATTERN COLLAPSE; PILLAR STRUCTURE; QUANTITATIVE EVALUATION; TEST STRUCTURE; TEST VEHICLE; TOPDOWN;

SILICON WAFERS;

EID: 84857288568     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3630843     Document Type: Conference Paper

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