Real-time scheduling of wafer fabrication with multiple product types

Proceedings of the IEEE International Conference on Systems, Man and Cybernetics

Volumn 1, Issue , 1999, Pages

  Yoon, Hyun Joong ^a   Lee, Doo Yong ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; INTEGRATED CIRCUIT MANUFACTURE; PRODUCTIVITY; QUALITY ASSURANCE; SCHEDULING; THROUGHPUT; WSI CIRCUITS;

GENERALIZED STOCHASTIC PETRI NETS; OPERATION DUE DATE RULE; UTILIZATION INDEX; WAFER FABRICATION;

PETRI NETS;

EID: 0033348174     PISSN: 08843627     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)