Focused ion beam secondary ion mass spectrometry (FIB-SIMS)

Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice

Volumn , Issue , 2005, Pages 269-280

  Stevie, F A ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

FIB; Focused ion beam; Imaging; Magnetic sector; Quadrupole; Secondary ion mass spectrometry; SIMS; Time of flight; TOF

Indexed keywords

EID: 84892271638     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/0-387-23313-X_13     Document Type: Chapter

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