High spatial resolution 3D analysis of materials using gallium focused ion beam secondary ion mass spectrometry (FIB SIMS)

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 1028-1033

  Tomiyasu, Bunbunoshin ^a   Fukuju, Isamu ^a   Komatsubara, Hirotaka ^a   Owari, Masanori ^b   Nihei, Yoshimasa ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

3D analysis; Depth profiling; Focused ion beam; Individual particle analysis; Secondary ion mass spectrometry

Indexed keywords

ION BEAMS; MICROMACHINING; PARTICLE DETECTORS; SECONDARY ION MASS SPECTROMETRY; SPUTTERING;

DEPTH PROFILING TECHNIQUE; FOCUSED ION BEAM SECONDARY ION MASS SPECTROMETRY (FIB SIMS);

NUCLEAR INSTRUMENTATION;

EID: 0032020292     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00790-8     Document Type: Article

References (8)

1. H. Satoh, M. Owari, Y. Nihei, J. Vac. Sci. Technol. B6 (1988) 915.
2. Y. Nihei, H. Satoh, S. Tatsuzawa, M. Owari, M. Akita, R. Aihara, K. Azuma, Y. Kammei, J. Vac. Sci. Technol. A5 (1987) 1254.
3. B. Tomiyasu, N. Mie, M. Owari, Y. Nihei, in: A. Benninghoven, Y. Nihei, R. Shimizu, H. W. Werner (Eds.), Secondary Ion Mass Spectrometry, SIMS IX, Wiley, Chichester, 1994, p. 848.
4. M. Owari, H. Satoh, B. Tomiyasu, Y. Nihei, in: A. Benninghoven, K.T.F. Janssen, J. Tümpner, H.W. Werner (Eds.), Secondary Ion Mass Spectrometry, SIMS VIII, Wiley, Chichester, 1992, p. 545.
5. B. Tomiyasu, M. Owari, Y. Nihei, in: A. Benninghoven, Y. Nihei, R. Shimizu, H.W. Werner (Eds.), Secondary Ion Mass Spectrometry, SIMS IX, Wiley, Chichester, 1994, p. 565.
6. U. von Wimmersperg, J.F. Prins, T.E. Derry, Nucl. Instr. and Meth. 197 (1982) 597.
7. K. Kajiyama, Y. Suzuki, T. Kokubo, M. Kawashita, F. Miyaji, Proc. 11th Int. Conf. Ion Implantation Technol., Austin, 1996, p. 816.
8. A. Benninghoven, F.G. Rüdenauer, H.W. Werner, Secondary Ion Mass Spectrometry Basic Concepts: Instrumental Aspects, Application and Trends, Wiley, Chichester, 1987, p. 7.