Water Vapor Enhancement for Elemental Analysis Using Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS)

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 2001, Pages 281-284

  Shofner, T L ^a   Stevie, F A ^a   McKinley, J M ^a   Lomness, J ^b  

^a AGERE SYSTEMS   (United States)

^b UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; ELECTRON BEAMS; ION BEAMS; IONIZATION; OXIDATION; OXYGEN; SCANNING; SPUTTERING;

ELEMENTAL ANALYSIS; FOCUSED ION BEAMS (FIB);

SECONDARY ION MASS SPECTROMETRY;

EID: 1542270704     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. J. M. Chabala, et al., Appl. Surf. Sci., 32, 10 (1988).
2. J. Bennett, et al., J. Vac. Sci. Technol., A9, 1379 (1991).
3. F. T. Sakamoto, et al., Jpn. J. Apl. Phys., 36, 1287 (1997).
4. F. A. Stevie, et al., J. Vac. Sci. Technol., B17, 2476 (1999).
5. B. W. Schueler, et al., Secondary Ion Mass Spectrometry, SIMS XI, G. Gillen, et. al., eds., Wiley, Chichester (1998) 759.
6. Properties of Selective Carbon Mill (H2O-based FIB Process), FEI Application Note, APPLNOTE 6.0 rev. a 1/96.
7. R.G. Wilson, et al., Secondary Ion mass Spectrometry - A Practical handbook for Depth Profiling and Bulk Impurity Analysis, New York (1989), App. B.14.
8. th ed., Eds. R. J. Ross, et al., (1999) 527.