Improvement on the analytical reliability of a destructive local analysis by a simultaneous multi-elements measurement

Bunseki Kagaku

Volumn 49, Issue 8, 2000, Pages 593-598

  Tomiyasu, Bunbunoshin ^a   Owari, Masanori ^b   Nihei, Yoshimasa ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

Analytical reliability; Gallium focused ion beam; Secondary ion mass spectrometry; Simultaneous multi elements measurement; Uncertainty of quantitative analysis

Indexed keywords

EID: 1542737879     PISSN: 05251931     EISSN: None     Source Type: Journal    
DOI: 10.2116/bunsekikagaku.49.593     Document Type: Article

References (5)

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2. H. Satoh, M. Owari, Y. Nihei: Jpn. J. Appl. Phys., 32, 3616 (1993).
3. B. Tomiyasu, I. Fukuju, H. Komatsubara, M. Owari, Y. Nihei: Nucl. Instrum. Methods Phys. Res. B, 136-138, 1028 (1998).